[특허]Self-testing capacitive pressure transducer and method

Self-testing capacitive pressure transducer and method 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01F-001/38
출원번호	US-0902328 (1992-06-22)
발명자 / 주소	Wise Kensall D. (Ann Arbor MI) Cho Steve T. (Arlington MA)
출원인 / 주소	The Regents of the University of Michigan (Ann Arbor MI 02)
인용정보	피인용 횟수 : 55 인용 특허 : 0

초록 ▼

A high-performance switched-capacitor circuit for electronic read-out of a pressure sensor-based ultrasensitive microflow transducer. The microflow transducer uses a differential capacitive pressure sensor to measure flow. Read-out electronics associated with the transducer feature a clocking speed of 100 KHz and drive loads up to 35 pF. The read-out electronics include a high DC gain that nulls out stray input capacitance, which is beneficial for the multichip realization of the microflow transducer disclosed herein. The uncompensated linearity of the overall read-out electronics is 10 bits, and the pressure/flow resolution is 12 bits. An ultrasensitive membrane associated with the pressure sensor does not respond to a pulsed waveform for frequencies above 50 KHz. But for lower frequencies, it deflects in response to the time-average voltage applied across the capacitor plates of the pressure sensor. A self-test mode is provided which employs an extremely long pre-charge pulse. An integrated flowmeter package including transducer and circuitry, and a second circuit for extending the range of the microflowmeter circuitry are also disclosed.

대표청구항 ▼

A self-testable micromachined transducer apparatus for measuring at least one externally applied condition, the transducer apparatus including at least one solid-state capacitive pressure sensor, the transducer apparatus comprising: a rigid support substrate; a solid-state micromachined pressure sensor, formed at least in part on the support substrate and having a flexible member and a capacitor adjustable by varying pressure applied to the flexible member; and an electronic read-out circuit, electrically coupled to the solid-state pressure sensor, the read-out circuit including: (1) a solid-state operational amplifier for producing an analog output signal corresponding to a charge applied to the adjustable capacitor, the amplifier having first and second differential input terminals, and an output terminal upon which the analog output signal is placed, with the first input terminal connected to the adjustable capacitor, (2) a reference capacitor connected to the first input terminal of the operational amplifier, (3) an integrating capacitor connected to the first input terminal and the output terminal of the operational amplifier, (4) means for providing a reset signal to the read-out circuit, the reset signal having a precharge portion and an integration portion which establishes an integration period during which the analog output signal is produced; (5) means for applying at least one clock signal which alternates between two states substantially in synchronization with transitions between the precharge portion and the integration portion of the reset signal, to the adjustable capacitor and to the reference capacitor, with the beginning of the integrating portion coinciding with the beginning of the integration period established by the reset signal, whereby an output signal is generated on the output terminal of the operational amplifier during the integrating portion of the reset signal; and (6) means for selectively extending at least one precharge portion of the reset signal so as to cause the flexible member to deflect to a maximum steady-state deflection immediately prior to an integration portion of the reset signal, wherein the means for selectively extending causes the transducer apparatus to be self-tested by determining whether the value of the analog output signal from the operational amplifier includes an electrostatic deflection component consistent with predetermined expectations about same.

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