다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.NTIS 바로가기
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.DataON 바로가기
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.Edison 바로가기
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.Kafe 바로가기
|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||73/3106 ; 73/2905 ; 73/33503|
|발명자 / 주소|
|인용정보||피인용 횟수 : 24 인용 특허 : 0|
A sensor or detector for fluid parameters is in the form of a substrate having at least two cavities and at least two sensing or detecting portions bridging respective cavities. The sensing portions include a first sensing unit which is exposed to the ambient and a second sensing unit which serves a compensating function and is in an air-tight enclosure formed by joining a cover plate with the substrate by a solid adhesive layer formed around the boundary of the second sensing unit. An adhesive tape can be attached to the cover plate to facilitate dicing...
A sensor comprising a substrate having at least two cavities formed therein and at least two sensing portions bridged over the respective cavities, said sensing portions comprising a first sensing unit being exposed to ambient atmosphere for sensing the state of the atmosphere and a second sensing unit being air-tightly enclosed by a cover member and usable for temperature compensation, characterized in that the cover member is made of a thin flat plate and is air-tightly joined with the substrate by means of a solid adhesive layer formed around the boun...