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Pressurized sealable transportable containers for storing a semiconductor wafer in a protective gaseous environment 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65D-081/28
출원번호 US-0101599 (1993-08-03)
우선권정보 FR-0480109 (1992-08-04)
발명자 / 주소
  • Garric George (Perthes FRX) Lafond Andr (Nemours FRX)
출원인 / 주소
  • International Business Machines Corporation (Armonk NY 02)
인용정보 피인용 횟수 : 56  인용 특허 : 0

초록 ▼

A pressurized sealable transportable container (100) stores at least one workpiece (138) and has a substantially parallelepipedic-shaped cassette reservoir (123). The container has a box-shaped housing (102) with a main access opening (104) on the front lateral face and protective shells to protect

대표청구항 ▼

A pressurized sealable transportable container (100) for storing at least one workpiece (138) comprising a substantially parallelepipedic-shaped cassette reservoir (123) comprising: a box-shaped housing (102) having a main access opening (104) on a front lateral face and having top (143) and bottom

이 특허를 인용한 특허 (56)

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  4. Jin, Jian Ping; Heng, Lee Kwang, End handler for film and film frames and a method thereof.
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  5. Hosoi Masato,JPX, Identification structure of a substrate storage container and method of identifying a substrate storage container.
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  7. Elliott, Martin R.; Rice, Michael R.; Hudgens, Jeffrey C.; Englhardt, Eric A.; Belitsky, Victor, Load port configurations for small lot size substrate carriers.
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  8. Puri,Amitabh; Duffin,David; Englhardt,Eric A., Method and apparatus for integrating large and small lot electronic device fabrication facilities.
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  9. Brill,Todd J.; Teferra,Michael; Hudgens,Jeffrey C.; Puri,Amitabh, Methods and apparatus for electronic device manufacturing system monitoring and control.
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  10. Teferra, Michael; Puri, Amitabh; Englhardt, Eric, Methods and apparatus for enhanced operation of substrate carrier handlers.
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  11. Teferra, Michael; Puri, Amitabh; Englhardt, Eric, Methods and apparatus for enhanced operation of substrate carrier handlers.
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  12. Shah, Vinay; Elliott, Martin R.; Hudgens, Jeffrey C.; Englhardt, Eric Andrew, Methods and apparatus for identifying small lot size substrate carriers.
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  13. Puri, Amitabh; Duffin, David; Englhardt, Eric A., Methods and apparatus for integrating large and small lot electronic device fabrication facilities.
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  15. Duffin, David C.; Jessop, Daniel R.; Teferra, Michael; Puri, Amitabh; Warner, Glade L., Methods and apparatus for material control system interface.
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  16. Duffin,David C.; Jessop,Daniel R.; Teferra,Michael; Puri,Amitabh; Warner,Glade L., Methods and apparatus for material control system interface.
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  17. Brill, Todd J.; Teferra, Michael; Puri, Amitabh; Jessop, Daniel R.; Warner, Glade L.; Duffin, David C., Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility.
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  18. Brill,Todd J.; Teferra,Michael; Puri,Amitabh; Jessop,Daniel R.; Warner,Glade L.; Duffin,David C., Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility.
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  19. Elliott,Martin R.; Rice,Michael Robert; Lowrance,Robert B.; Hudgens,Jeffrey C.; Englhardt,Eric Andrew; Stuart,Loy Randall, Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing.
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  20. Ambrefe, Jr., Joseph T; Linehan, Douglas J, Methods and systems for efficient security screening.
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  21. Rice, Michael R.; Elliott, Martin R.; Lowrance, Robert B.; Hudgens, Jeffrey C.; Englhardt, Eric A., Overhead transfer flange and support for suspending a substrate carrier.
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  22. Rice, Michael R.; Elliott, Martin R.; Lowrance, Robert B.; Hudgens, Jeffrey C.; Englhardt, Eric A., Overhead transfer flange and support for suspending a substrate carrier.
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  23. Dautartas Mindaugas F. ; Sneh Ofer, Portable purge system for transporting materials.
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  24. Itakura, Akira, Processing method and processing apparatus.
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  25. Cheng, Lin, Reticle box transport cart.
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  26. Bonora Anthony C. ; Netsch Robert ; Sullivan Patrick ; Fosnight William J. ; Shenk Joshua ; Noma Edwin, SMIF-compatible open cassette enclosure.
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  27. Beckhart,Gordon Haggott; Conarro,Patrick Rooney; Farivar Sadri,Kamran Michael, Semiconductor cassette reducer.
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  28. Kim,Ki Sang, Semiconductor fabrication apparatus having FOUP index in apparatus installation area.
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  29. Goodwin Dennis L. ; Hawkins Mark R. ; Crabb Richard ; Doley Allan D., Semiconductor processing system with gas curtain.
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  30. Babbs, Daniel; Fosnight, William; May, Robert C.; Weaver, William, Side opening unified pod.
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  31. Babbs, Daniel; Fosnight, William; May, Robert C.; Weaver, William, Side opening unified pod.
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  32. Englhardt, Eric Andrew; Shah, Vinay, Small lot size lithography bays.
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  34. Kinkead Devon A. ; Joffe Michael A., Storing substrates between process steps within a processing facility.
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  35. Rice,Michael Robert; Elliott,Martin R.; Lowrance,Robert B.; Hudgens,Jeffrey C.; Englhardt,Eric Andrew, Substrate carrier handler that unloads substrate carriers directly from a moving conveyer.
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  36. Rice, Michael Robert; Elliott, Martin R.; Lowrance, Robert B.; Hudgens, Jeffrey C.; Englhardt, Eric Andrew, Substrate carrier handler that unloads substrate carriers directly from a moving conveyor.
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  37. Rice,Michael Robert; Elliott,Martin R.; Lowrance,Robert B.; Hudgens,Jeffrey C.; Englhardt,Eric Andrew, Substrate carrier handler that unloads substrate carriers directly from a moving conveyor.
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  38. Rice,Michael Robert; Elliott,Martin R.; Lowrance,Robert B.; Hudgens,Jeffrey C.; Englhardt,Eric Andrew, Substrate carrier handler that unloads substrate carriers directly from a moving conveyor.
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  39. Gregerson, Barry; Halbmaier, David; Sumner, Stephen; Wiseman, Brian; Tieben, Anthony Mathius; Strike, Justin, Substrate container with pressure equalization.
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  40. Matsuoka, Takaaki; Iwabuchi, Katsuhiko; Ishizawa, Shigeru; Hiroki, Tsutomu, Substrate processing device.
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  41. Friedman, Glenn M.; DeMarco, Michael; Ivaldi, Jorge S.; McClay, James A., System and method for reticle protection and transport.
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  42. del Puerto,Santiago E.; DeMarco,Michael A.; Friedman,Glenn M.; Ivaldi,Jorge S.; McClay,James A., System and method for reticle protection and transport.
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  43. del Puerto,Santiago E.; DeMarco,Michael A.; Friedman,Glenn M.; Ivaldi,Jorge S.; McClay,James A., System and method for reticle protection and transport.
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  44. Rice, Michael Robert; Lowrance, Robert B.; Elliott, Martin R.; Hudgens, Jeffrey C.; Englhardt, Eric A., System for transporting substrate carriers.
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  49. Rice, Michael R.; Englhardt, Eric A.; Shah, Vinay; Elliott, Martin R.; Lowrance, Robert B.; Hudgens, Jeffrey C., Systems and methods for transferring small lot size substrate carriers between processing tools.
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  51. Walck, Scott D, Telescopic specimen holder.
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  52. Wiseman, Brian; Peterson, Michael; Simpson, Tony, Thin wafer insert.
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  53. Ku, Chen-Wei; Lu, Pao-Yi; Liao, Kun-Hong; Sheng, Jain-Ping, Transmission box for reticle POD.
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