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Method for enhancement of semiconductor device contact pads 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/268
  • H01L-021/441
  • H01L-021/311
출원번호 US-0774427 (1991-10-10)
발명자 / 주소
  • Wojnarowski Robert J. (Ballston Lake NY) Gorowitz Bernard (Clifton Park NY)
출원인 / 주소
  • Martin Marietta Corp. (King of Prussia PA 02)
인용정보 피인용 횟수 : 42  인용 특허 : 0

초록

Semiconductor device contact pads are enhanced by forming a metal plate over at least a portion of the contact pad. “Enhancement”includes repair such as by bridging a reinforcing pad area over probe damage, general reinforcement or enlargement of a contact pad, and placement of a protective buffer p

대표청구항

A method for enhancing a contact pad on a surface of a semiconductor device, comprising: applying a layer of resist material over the semiconductor device surface and over the contact pad; forming in the layer of resist material an enhancement access vial of re-entrant hole shape which is wider at t

이 특허를 인용한 특허 (42)

  1. Agarwal, Vishnu K.; Sandhu, Gurtej S., Boron incorporated diffusion barrier material.
  2. Agarwal, Vishnu K.; Sandhu, Gurtej S., Boron incorporated diffusion barrier material.
  3. Agarwal, Vishnu K.; Sandhu, Gurtej S., Boron incorporated diffusion barrier material.
  4. Agarwal, Vishnu K.; Sandhu, Gurtej S., Boron incorporated diffusion barrier material.
  5. Agarwal,Vishnu K.; Sandhu,Gurtej S., Boron incorporated diffusion barrier material.
  6. Agarwal,Vishnu K.; Sandhu,Gurtej S., Boron incorporated diffusion barrier material.
  7. Hu Yungjun Jeff, Conductive material for integrated circuit fabrication.
  8. Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
  9. Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
  10. Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
  11. Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
  12. Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
  13. Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
  14. Hu, Yungjun Jeff, Conductive material for integrated circuit fabrication.
  15. Hu,Yungjun Jeff, Conductive material for integrated circuit fabrication.
  16. Hanson David A., Electrical means for extracting layer to layer registration.
  17. Fischer Paul J. ; Korleski Joseph, Electronic chip package.
  18. Fischer, Paul J.; Korleski, Joseph E., Electronic chip package.
  19. Noddin David B., Laser apparatus having improved via processing rate.
  20. Swenson Edward J. ; Sun Yunlong ; Harris Richard S., Laser based method and system for integrated circuit repair or reconfiguration.
  21. Cooney, III,Edward C.; Motsiff,William T., Method and apparatus for selectively altering dielectric properties of localized semiconductor device regions.
  22. Coomer, Boyd L., Method and system to manufacture stacked chip devices.
  23. Koblinger Otto,DEX ; Stoffler Werner,DEX, Method for providing a metallization layer on an insulating layer and for opening through holes in the said insulating.
  24. Hanson David A., Method for reducing via inductance in an electronic assembly and article.
  25. Noddin David B. ; Hutchins Donald G., Method for using fiducial schemes to increase nominal registration during manufacture of laminated circuit.
  26. Noddin David B., Method for using photoabsorptive coatings and consumable copper to control exit via redeposit as well as diameter variance.
  27. Noddin David B. ; Gorrell Robin E. ; Leaf Michael R., Method for using ultrasonic treatment in combination with UV-lasers to enable plating of high aspect ratio micro-vias.
  28. Pagani, Alberto, Method of filling probe indentations in contact pads.
  29. Noddin David B., Method of sequential laser processing to efficiently manufacture modules requiring large volumetric density material rem.
  30. Noddin David B., Method to correct astigmatism of fourth yag to enable formation of sub 25 micron micro-vias using masking techniques.
  31. Ghandi, Jaspreet S.; Yates, Don L.; Sun, Yangyang, Methods for forming a semiconductor structure.
  32. Coster, Michael T.; DiRocco, Mark A.; Gambino, Jeffrey P.; Peterson, Kirk D., Methods for testing integrated circuits of wafer and testing structures for integrated circuits.
  33. Noddin David B., Multiple frequency processing to minimize manufacturing variability of high aspect ratio micro through-vias.
  34. Noddin David B., Multiple frequency processing to minimize manufacturing variability of high aspect ratio micro through-vias.
  35. Noddin David B., Multiple frequency processing to minimize manufacturing variability of high aspect ratio micro through-vias.
  36. Pagani, Alberto, Probe pad with indentation.
  37. Burrell, Lloyd G.; Wong, Kwong H.; Kelly, Adreanne A.; McKnight, Samuel R., Semiconductor device having a composite layer in addition to a barrier layer between copper wiring and aluminum bond pad.
  38. Noddin David B., Semiconductor flip chip package.
  39. Pagani, Alberto; Ziglioli, Federico Giovanni, Semiconductor structure with low-melting-temperature conductive regions, and method of repairing a semiconductor structure.
  40. Gandhi, Jaspreet S.; Yates, Don L.; Sun, Yangyang, Semiconductor structures comprising a dielectric material having a curvilinear profile.
  41. Saran Mukul ; Martin Charles A., System and method for reinforcing a bond pad.
  42. Dunaway Thomas J. ; Spielberger Richard K., Test and tear-away bond pad design.
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