이 특허를 인용한 특허 (23)

1. Miller, Steven A.; Gaydos, Mark; Shekhter, Leonid N.; Gulsoy, Gokce, Dynamic dehydriding of refractory metal powders.

   상세보기
2. Miller, Steven A.; Gaydos, Mark; Shekhter, Leonid N.; Gulsoy, Gokce, Dynamic dehydriding of refractory metal powders.

   상세보기
3. Miller, Steven A.; Kumar, Prabhat; Wu, Richard; Sun, Shuwei; Zimmermann, Stefan; Schmidt-Park, Olaf, Fine grained, non banded, refractory metal sputtering targets with a uniformly random crystallographic orientation, method for making such film, and thin film based devices and products made therefrom.

   상세보기
4. Smathers, David B.; Heimanson, Dorian; Gutkin, Michael, Hermetic sealing of target/backing plate assemblies using electron beam melted indium or tin.

   상세보기
5. Elliot, Alfred Grant; Elliot, Brent Donald Alfred; Balma, Frank; Schuster, Richard Erich; Rex, Dennis George; Veytser, Alexander, Hermetically joined ceramic assemblies and low temperature method for hermetically joining ceramic materials.

   상세보기
6. Elliot, Alfred Grant; Elliot, Brent Donald Alfred; Balma, Frank; Schuster, Richard Erich; Rex, Dennis George; Veytser, Alexander, High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same.

   상세보기
7. Dary, Francois-Charles; Gaydos, Mark; Loewenthal, William; Miller, Steven A.; Rozak, Gary; Volchko, Scott Jeffrey; Zimmermann, Stefan; Stawovy, Michael Thomas, Large-area sputtering targets.

   상세보기
8. Elliot, Alfred Grant; Elliot, Brent Donald Alfred; Balma, Frank; Schuster, Richard Erich; Rex, Dennis George; Veytser, Alexander, Low temperature method for hermetically joining non-diffusing ceramic materials.

   상세보기
9. Elliot, Alfred Grant; Elliot, Brent Donald Alfred; Balma, Frank; Schuster, Richard Erich; Rex, Dennis George; Veyster, Alexander, Method for hermetically joining plate and shaft devices including ceramic materials used in semiconductor processing.

   상세보기
10. Stellrecht David E., Method for producing near net shape planar sputtering targets and an intermediate therefor.

    상세보기
11. Elliot, Brent; Balma, Frank; Veytser, Alexander; Parker, Michael; Cunha, Jeff, Method for repairing heaters and chucks used in semiconductor processing.

    상세보기
12. Miller, Steven A.; Shekhter, Leonid N.; Zimmermann, Stefan, Methods of joining metallic protective layers.

    상세보기
13. Miller, Steven A.; Shekhter, Leonid N.; Zimmermann, Stefan, Methods of joining metallic protective layers.

    상세보기
14. Volchko, Scott Jeffrey; Zimmermann, Stefan; Miller, Steven A.; Stawovy, Michael Thomas, Methods of manufacturing high-strength large-area sputtering targets.

    상세보기
15. Loewenthal, William; Miller, Steven Alfred, Methods of manufacturing large-area sputtering targets.

    상세보기
16. Miller, Steven A.; Dary, Francois-Charles; Gaydos, Mark; Rozak, Gary, Methods of manufacturing large-area sputtering targets by cold spray.

    상세보기
17. Volchko, Scott Jeffrey; Loewenthal, William; Zimmermann, Stefan; Gaydos, Mark; Miller, Steven Alfred, Methods of manufacturing large-area sputtering targets using interlocking joints.

    상세보기
18. Volchko, Scott Jeffrey; Loewenthal, William; Zimmermann, Stefan; Gaydos, Mark; Miller, Steven Alfred, Methods of manufacturing large-area sputtering targets using interlocking joints.

    상세보기
19. Miller, Steven A.; Kumar, Prabhat; Wu, Rong-chein Richard; Sun, Shuwei; Zimmermann, Stefan; Schmidt-Park, Olaf, Methods of rejuvenating sputtering targets.

    상세보기
20. Elliot, Alfred Grant; Elliot, Brent Donald Alfred; Balma, Frank; Schuster, Richard Erich; Rex, Dennis George; Veytser, Alexander, Multi-layer plate device.

    상세보기
21. Shekhter, Leonid N.; Miller, Steven A.; Haywiser, Leah F.; Wu, Rong-Chein R., Process for preparing metal powders having low oxygen content, powders so-produced and uses thereof.

    상세보기
22. Heimart von Zweck, Sputter ion source for boron and other targets.

    상세보기
23. McLeod, Paul Stephen, Target fabrication method for cylindrical cathodes.

    상세보기
더보기