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Apparatus for deposition of thin-film, solid state batteries 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/00
  • H01M-004/00
  • H01M-006/00
출원번호 US-0254392 (1994-06-06)
발명자 / 주소
  • Ovshinsky Stanford R. (Bloomfield Hills MI) Ovshinsky Herbert (Oak Park MI) Young Rosa (Troy MI)
출원인 / 주소
  • Ovonic Battery Company, Inc. (Troy MI 02)
인용정보 피인용 횟수 : 175  인용 특허 : 0

초록 ▼

A multi-chambered deposition apparatus for depositing solid-state, thin-film battery materials onto substrate material. The apparatus minimally includes at least three distinct evacuable deposition chambers, which are physically interconnected in series. The first deposition chamber is adapted to de

대표청구항 ▼

A multi-chambered deposition apparatus for depositing solid-state, thin-film battery materials onto substrate material, said apparatus including: at least three distinct evacuable deposition chambers, said deposition chambers physically interconnected in series; the first of said deposition chambers

이 특허를 인용한 특허 (175)

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