[특허]Semiconductor acceleration sensor and vehicle control system using the same

Semiconductor acceleration sensor and vehicle control system using the same 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B60T-008/58 B60T-008/72 G01P-015/08
출원번호	US-0147083 (1993-11-03)
우선권정보	JP-0138494 (1990-05-30); JP-0155217 (1990-06-15); JP-0155218 (1990-06-15); JP-0157528 (1990-06-18)
발명자 / 주소	Tsuchitani Shigeki (Mito JPX) Suzuki Seiko (Hitachioota JPX) Tanaka Tomoyuki (Hitachi JPX) Miki Masayuki (Katsuta JPX) Matsumoto Masahiro (Hitachi JPX) Ichikawa Norio (Mito JPX) Ebine Hiromichi (Oomi
출원인 / 주소	Hitachi, Ltd. (Tokyo JPX 03) Hitachi Automotive Engineering Co., Inc. (Katsuta JPX 03)
인용정보	피인용 횟수 : 97 인용 특허 : 0

초록 ▼

A semiconductor acceleration sensor is formed by a cantilever having a conductive movable electrode of predetermined mass at one end, at least one pair of fixed conductive electrodes which are stationary with respect to the movable electrode located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate to which the fixed electrodes are mounted, a lower melting point material is firstly coated on the substrates. A sensor detector unit processing circuit has the output characteristic of the circuit digitally adjusted by suitable switching of a plurality of resistors, and the sensor chip and the detector unit integrated circuit may be located on a common base and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40°C. or lower is, advantageously, charged into the hermetically sealed chamber.

대표청구항 ▼

A semiconductor acceleration sensor comprising a cantilever having a conductive, movable electrode of predetermined mass at one end thereof, said cantilever being made of a material of silicon type, at least one fixed conductive electrode which is stationary with respect to said movable electrode and located on a side of said movable electrode, said fixed electrode being separated from said movable electrode by a predetermined gap, and insulation means located between the movable electrode and the fixed electrode for preventing a short-circuit therebetween, wherein (a) said sensor is in combination with a detector unit therefor and said sensor and said detector unit are both located in a hermetically sealed chamber, (b) said detector unit being an integrated circuit and said sensor being an integrated chip device, (c) said integrated circuit and said chip device being both mounted on a base, and (d) a cap is hermetically sealed to said base.

이 특허를 인용한 특허 (97)

Masahiro Matsumoto JP; Seikou Suzuki JP; Masayuki Miki JP, Acceleration sensor.
상세보기
Matsumoto Masahiro,JPX ; Suzuki Seikou,JPX ; Miki Masayuki,JPX, Acceleration sensor.
상세보기
Matsumoto, Masahiro; Suzuki, Seikou; Miki, Masayuki, Acceleration sensor.
상세보기
Lohberg,Peter; Zydek,Michael; Ziebart,Wolfgang, Acceleration sensor for motor vehicles.
상세보기
Potter, Michael D., Accelerometer and methods thereof.
상세보기
Stevenson Paul E. (Colorado Springs CO) Stephan Craig H. (Ann Arbor MI) Samman Amer M. (Dearborn MI) Spangler Leland J. (Manitou Springs CO), Accelerometer with a combined self-test and ground electrode.
상세보기
Johnson, Burgess R.; Supino, Ryan, All-silicon electrode capacitive transducer on a glass substrate.
상세보기
Kramer Dennis A., Brake shoe assembly having a resistive brake lining wear sensor.
상세보기
Suzuki Masayoshi (Hitachioota JPX) Sasayama Takao (Hitachi JPX) Hanzawa Keizi (Mito JPX) Ichikawa Norio (Mito JPX) Horie Junichi (Hitachinaka JPX) Sugisawa Yukiko (Hitachinaka JPX) Ogasawara Yuuji (H, Capacitance type acceleration sensor.
상세보기
Kato,Kenji; Sudo,Minoru; Yarita,Mitsuo, Capacitance type dynamic quantity sensor.
상세보기
Lehtonen, Tuomo, Capacitive acceleration sensor.
상세보기
Abe, Munemitsu; Shinohara, Eiji; Esashi, Masayoshi, Capacitive micro sensor, gyroscope, and input device.
상세보기
Langereis, Geert, Capacitive sensor device and a method of sensing accelerations.
상세보기
Schatz Oliver (Reutlingen DEX), Circuit arrangement for evaluating an acceleration sensor signal.
상세보기
Campbell,Ray F.; Wada,Joan D.; Costello,Michael J.; Khatiblou,Mohsen A., Compensated composite structure.
상세보기
Gutierrez Adolfo O. ; Edmans Daniel M. ; Cormeau Christopher, Differential wideband vibration.
상세보기
Fujii, Tetsuo, Dynamic amount sensor and process for the production thereof.
상세보기
Gulba, Thomas; Escher, Olaf Walter, Electronic device and method for evaluating a variable capacitance.
상세보기
Min, Dong-ki; Lee, Jin-ho; Hong, Seung-bum, Electrostatic actuator and controller with PWM driving.
상세보기
Koyama, Mitsuaki; Mutoh, Takeru; Iwai, Hiroki; Ichikawa, Ryoichi, External force detection apparatus and external force detection sensor.
상세보기
Gauker Bradford K. ; Rhein David J. ; Lapraik Scott J., Grounding plate for orientationless squib connector assembly for automotive air bag assemblies.
상세보기
Potter, Michael D., High temperature embedded charge devices and methods thereof.
상세보기
Chan Tsiu Chiu ; DeSilva Melvin Joseph ; Sunkara Syama Sundar, Integrated released beam oscillator and associated methods.
상세보기
Chan Tsiu Chiu ; DeSilva Melvin Joseph, Integrated released beam sensor for sensing acceleration and associated methods.
상세보기
Chan Tsiu Chiu ; DeSilva Melvin Joseph, Integrated released beam sensor for sensing acceleration and associated methods.
상세보기
Chan Tsiu Chiu ; DeSilva Melvin Joseph, Integrated released beam, thermo-mechanical sensor for sensing temperature variations and associated methods.
상세보기
Chan Tsiu Chiu ; DeSilva Melvin Joseph, Integrated sensor having plurality of released beams for sensing acceleration.
상세보기
Chan Tsiu Chiu ; DeSilva Melvin Joseph, Integrated sensor having plurality of released beams for sensing acceleration and associated methods.
상세보기
Chan, Tsiu Chiu; DeSilva, Melvin Joseph, Integrated sensor having plurality of released beams for sensing acceleration and associated methods.
상세보기
Piske Wilfried,CHX ; Predl Gerhard,ATX ; Bernhard Heinz,CHX ; Koeppel Martin,CHX, Laser leveling instrument with a leveling base and fine self-leveling of the laser beam.
상세보기
Kretschmann, Robert J.; Harris, Richard D., Magnetic field sensor using microelectromechanical system.
상세보기
Fujii Tetsuo (Toyohashi JPX) Imai Masahito (Chita JPX), Mechanical force sensing semiconductor device.
상세보기
Kretschmann, Robert J.; Lucak, Mark A.; Harris, Richard D.; Knieser, Michael J., Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques.
상세보기
Harris, Richard D.; Kretschmann, Robert J., Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge.
상세보기
Harris, Richard D.; Kretschmann, Robert J., Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge.
상세보기
Harris, Richard D.; Knieser, Michael J.; Kretschmann, Robert J.; Lucak, Mark A., Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap.
상세보기
Harris, Richard D.; Kretschmann, Robert J.; Knieser, Michael J.; Lucak, Mark A., Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void.
상세보기
Harris,Richard D.; Kretschmann,Robert J.; Knieser,Michael J.; Lucak,Mark A., Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void.
상세보기
Harris,Richard D.; Kretschmann,Robert J.; Knieser,Michael J.; Lucak,Mark A., Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void.
상세보기
Fujii Tetsuo,JPX ; Imai Masahito,JPX, Method for manufacturing a mechanical force sensing semiconductor device.
상세보기
Potter,Michael D., Method for non-damaging charge injection and a system thereof.
상세보기
Potter,Michael D., Method for non-damaging charge injection and system thereof.
상세보기
Lucak, Mark A.; Harris, Richard D.; Knieser, Michael J.; Kretschmann, Robert J., Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate.
상세보기
Suzuki Masayoshi (Hitachioota JPX) Sasayama Takao (Hitachi JPX) Hanzawa Keizi (Mito JPX) Ichikawa Norio (Mito JPX) Horie Junichi (Hitachinaka JPX) Sugisawa Yukiko (Hitachinaka JPX) Ogasawara Yuuji (H, Method of making a capacitance type acceleration sensor.
상세보기
Bulliard, Joseph; Pasquier, Eric, Method of processing high voltage capacitors.
상세보기
Bulliard,Joseph; Pasquier,Eric, Method of processing high voltage capacitors.
상세보기
Potter,Michael D., Methods for distributed electrode injection.
상세보기
Chan Tsiu Chiu ; DeSilva Melvin Joseph, Methods of forming thermo-mechanical sensor.
상세보기
Potter,Michael D., Micro fluidic valves, agitators, and pumps and methods thereof.
상세보기
Potter,Michael D., Micro-electro-mechanical switch and a method of using and making thereof.
상세보기
Deimerly, Yannick; Jourdan, Guillaume; Rey, Patrice, Microelectromechanical and/or nanoelectromechanical structure with a variable quality factor.
상세보기
Knieser, Michael J.; Harris, Richard D.; Pond, Robert J.; Szabo, Louis F.; Discenzo, Frederick M.; Herbert, Patrick C.; Kretschmann, Robert J.; Lucak, Mark A., Microelectromechanical isolating circuit.
상세보기
Harris, Richard D.; Knieser, Michael J.; Dummermuth, Ernst H.; Kretschmann, Robert J., Microelectromechanical system (MEMS) analog electrical isolator.
상세보기
Herbert, Patrick C.; Annis, Jeffrey R.; Yao, Jun J.; Morris, Winfred L.; Larsson, Henric; Harris, Richard D.; Kretschmann, Robert J., Microelectromechanical system (MEMS) with improved beam suspension.
상세보기
Pinter, Stefan, Micromirror system.
상세보기
Potter,Michael D., Motion based, electrostatic power source and methods thereof.
상세보기
Silverbrook,Kia, Moulding assembly for forming at least one protective cap.
상세보기
Siswick, Howard; Khan, Mohammed, Movement pattern detection in a vehicle communication system.
상세보기
Harris, Richard D.; Kretschmann, Robert J., On-board microelectromechanical system (MEMS) sensing device for power semiconductors.
상세보기
Gauker Bradford K. ; Rhein David J., Orientationless squib connector assembly for automotive air bag assemblies.
상세보기
Gauker Bradford K. ; Rhein David J. ; Lapraik Scott J., Orientationless squib connector assembly for automotive air bag assemblies.
상세보기
Silverbrook, Kia, Packaged accelerometer.
상세보기
Nagata, Yoichi, Physical quantity sensor.
상세보기
Siswick, Howard; Khan, Mohammed, Position-based limited-response mode operation in a vehicle communication system.
상세보기
Siswick, Howard; Khan, Mohammed, Position-based limited-response mode operation in a vehicle communication system.
상세보기
Siswick, Howard; Khan, Mohammed, Position-based performance of a vehicle function in a vehicle communication system.
상세보기
Siswick, Howard; Khan, Mohammed, Provision of a status indication to a user in a vehicle communication system.
상세보기
Potter,Michael D., Rotational motion based, electrostatic power source and methods thereof.
상세보기
Nagahara Teruaki,JPX ; Otani Hiroshi,JPX, Semiconductor acceleration sensor.
상세보기
Matsunaga Tadao,JPX ; Kunimi Takashi,JPX ; Nezu Masahiro,JPX ; Mori Masatomo,JPX ; Esashi Masayoshi,JPX, Semiconductor acceleration sensor and its self-diagnosing method.
상세보기
Sakai,Minekazu, Semiconductor dynamic quantity sensor.
상세보기
Fujii, Tetsuo; Imai, Masahito, Semiconductor mechanical sensor.
상세보기
Fujii, Tetsuo; Imai, Masahito, Semiconductor mechanical sensor.
상세보기
Fujii, Tetsuo; Imai, Masahito, Semiconductor mechanical sensor.
상세보기
Fujii, Tetsuo; Imai, Masahito, Semiconductor mechanical sensor.
상세보기
Fujii, Tetsuo; Imai, Masahito, Semiconductor mechanical sensor.
상세보기
Fujii,Tetsuo; Imai,Masahito, Semiconductor mechanical sensor.
상세보기
Fujii,Tetsuo; Imai,Masahito, Semiconductor mechanical sensor.
상세보기
Masahito Imai JP, Semiconductor mechanical sensor.
상세보기
Tetsuo Fujii JP; Masahito Imai JP, Semiconductor mechanical sensor.
상세보기
Fujii Tetsuo,JPX ; Imai Masahito,JPX, Semiconductor mechanical sensor and method of manufacture.
상세보기
Minekazu Sakai JP; Minoru Murata JP; Seiki Aoyama JP; Youko Nakagawa JP, Semiconductor physical quantity sensor.
상세보기
Ueyanagi, Katsumichi; Saito, Kazunori; Ashino, Kimihiro; Nishikawa, Mutsuo; Uematsu, Katsuyuki, Semiconductor physical quantity sensor with improved noise resistance.
상세보기
Ikehashi, Tamio, Sensor and its manufacturing method.
상세보기
Brisson, Raphael; Ragot, Vincent, Sensor with electrostatic pendular accelerometer and method of controlling such a sensor.
상세보기
Howe Roger T. ; Bart Stephen, Sensor with separate actuator and sense fingers.
상세보기
Wu,Lifeng; Wei,Jianlin; Chen,I Hsien, Shape based noise characterization and analysis of LSI.
상세보기
Kawai Hiroshi,JPX, Small size electronic part and a method for manufacturing the same, and a method for forming a via hole for use in the same.
상세보기
Matsumoto, Masahiro; Suzuki, Seikou; Miki, Masayuki, Structure for mounting components.
상세보기
Masahiro Matsumoto JP; Seikou Suzuki JP; Masayuki Miki JP, Surface mount type package unit.
상세보기
Forgue,John R., Variable resistor card for a fuel level sensor.
상세보기
Michael D. Warner ; Frederick O. Schipp, Vehicle brake control assembly with an integral vehicle motion sensor.
상세보기
Khan, Mohammed; Siswick, Howard, Vehicle communication system.
상세보기
Khan, Mohammed; Siswick, Howard, Vehicle communication system.
상세보기
Je, Chang Han, Vertical accelerometer.
상세보기
Tanaka,Hidetoshi; Ohkubo,Norio; Kanetomo,Masafumi, Vibrational power generation device vibrator.
상세보기
Edmans Daniel M. ; Gutierrez Adolfo ; Cormeau Christopher ; Maby Edward, Wideband vibration sensor.
상세보기

IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Semiconductor acceleration sensor and vehicle control system using the same 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

이 특허를 인용한 특허 (97)

관련 콘텐츠

특허 원문 보기

IPC 상위 출원인

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트

연합인증

Semiconductor acceleration sensor and vehicle control system using the same 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

전체(0) 논문(0) 특허(0) 보고서(0)

이 특허를 인용한 특허 (97)

관련 콘텐츠

특허 원문 보기

IPC 상위 출원인

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트