이 특허를 인용한 특허 (59)

1. Suzuki,Yasuhiro; Atobe,Hiroshi; Horiba,Minako, Adsorbent for purifying perfluorocarbon, process for producing same, high purity octafluoropropane and octafluorocyclobutane, and use thereof.

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2. Banucci Eugene G. ; Hultquist Steven J., Adsorbent-based storage and dispensing system.

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3. Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery.

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4. Wilson, Shaun M.; Sturm, Edward A.; Wodjenski, Michael J.; Carruthers, J. Donald; Sweeney, Joshua B., Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent.

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5. Lu Yaping ; Doong Shain-Jer ; Bulow Martin ; Shen Dongmin ; Acharya Divyanshu R. ; Andrecovich Mark J. ; Fitch Frank R. ; Ojo Adeola Florence, Composite adsorbent beads for adsorption process.

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6. Tom Glenn M. ; Brown Duncan W., Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium.

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7. Chernyakov Iosif ; Hsiung Thomas Hsiao-Ling ; Schwarz Alexander ; Yang James Hsu-Kuang, Fluorochemical recovery and recycle using membranes.

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8. Glenn M. Tom ; James V. McManus, Gas cabinet assembly comprising sorbent-based gas storage and delivery system.

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9. Tom, Glenn M.; McManus, James V., Gas cabinet assembly comprising sorbent-based gas storage and delivery system.

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10. Sato, Toshikazu; Inohara, Toshiaki; Murase, Hiroshi; Naotsuka, Hiromi; Imai, Takahiro, Gas reclaiming equipment.

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11. Tom Glenn M. ; McManus James V., Gas source and dispensing system.

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12. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.

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13. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.

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14. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.

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15. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.

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16. Carruthers,J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.

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17. Carruthers,J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.

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18. Achilefu Samuel I. A., Gaseous inhalable ultrasound contrast agents and method therefor.

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19. Tom Glenn M., High capacity gas storage and dispensing system.

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20. Brandes George R. ; Tom Glenn M. ; McManus James V., Laser system utilizing sorbent-based gas storage and delivery system.

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21. Olander W. Karl, Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means.

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22. Helmut Stach DE; Hans-Juergen Bachert DE; Hartmut Welke DE, Method and device for recovering gases.

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23. Izumi Jun (Nagasaki JPX) Yasutake Akinori (Nagasaki JPX) Tsutaya Hiroyuki (Nagasaki JPX) Harada Takayuki (Shimonoseki JPX) Hamada Kenichi (Shimonoseki JPX), Method for collecting volatile organic substances.

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24. Ohno, Hiromoto; Ohi, Toshio, Method for purification of tetrafluoromethane and use thereof.

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25. Ezell, Edward Frederick; Hogle, Richard A.; Whitlock, Walter H.; McFarlane, Graham A., Method of recycling fluorine using an adsorption purification process.

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26. Paul M. Bhadha ; Tadaharu Watanabe ; Dan Fraenkel, Methods for removal of impurity metals from gases using low metal zeolites.

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27. Fraenkel Dan ; Funke Hans H. ; Cooper Gerald, Methods for removal of water from gases using superheated zeolites.

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28. Wilson, Shaun M.; Sturm, Edward A., PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same.

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29. Wilson, Shaun M.; Sturm, Edward A., PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same.

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30. Wilson, Shaun M.; Sturm, Edward A., PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same.

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31. Li Yao-En ; Paganessi Joseph E. ; Vassallo David ; Fleming Gregory K., Process and system for separation and recovery of perfluorocompound gases.

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32. Wang Luping ; McManus James V., Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment.

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33. Georges Kraus FR; Patrick Le Bot FR; Lian-Ming Sun FR, Process for the treatment of a gas by temperature swing adsorption.

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34. Henderson, Philip Bruce; Underwood, Richard Paul, Purification of nitrogen trifluoride by pressure swing absorption.

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35. McManus James V. (Danbury CT), Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas.

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36. Dunne Stephen R. (Bethel CT) Staniulis Mark T. (Peekskill NY) Cohen Alan P. (New Fairfield CT), Recovery and purification of refrigerants.

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37. Henderson, Philip Bruce; Colleran, Patrick Michael; Hulbert, Forrest Eli, Recovery of NF3 from adsorption operation.

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38. Yang James Hsu-Kuang ; Chernyakov Iosif ; Hsiung Thomas Hsiao-Ling ; Schwarz Alexander, Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series.

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39. Chernyakov Iosif ; Hsiung Thomas Hsiao-Ling ; Schwarz Alexander ; Yang James Hsu-Kuang, Recovery of perfluorinated compounds from the exhaust of semiconductor fabs with recycle of vacuum pump diluent.

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40. Tamhankar Satish S. (Scotch Plains NJ) Ramachandran Ramakrishnan (Allendale NJ), Recovery of trace gases from gas streams.

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41. Brestovansky,Dennis; Wodjenski,Michael J.; Arno,Jose I.; Carruthers,J. Donald; Moroco, legal representative,Judith A.; Moroco,Philip A., Rectangular parallelepiped fluid storage and dispending vessel.

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42. Brestovansky, Dennis; Wodjenski, Michael J.; Arno, Jose I.; Carruthers, J. Donald; Moroco, Philip A., Rectangular parallelepiped fluid storage and dispensing vessel.

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43. Brestovansky, Dennis; Wodjenski, Michael J.; Arno, Jose I.; Carruthers, J. Donald; Moroco, Philip A., Rectangular parallelepiped fluid storage and dispensing vessel.

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44. Brestovansky, Dennis; Wodjenski, Michael J.; Arno, Jose I.; Carruthers, J. Donald; Moroco, Phillip A., Rectangular parallelepiped fluid storage and dispensing vessel.

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45. Brestovansky, Dennis; Wodjenski, Michael J.; Arno, Jose I.; Carruthers, J. Donald; Moroco, Phillip A.; Moroco, legal representative, Judith A., Rectangular parallelepiped fluid storage and dispensing vessel.

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46. Brestovansky,Dennis; Moroco,Philip A., Rectangular parallelepiped fluid storage and dispensing vessel.

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47. Brestovansky,Dennis; Wodjenski,Michael J.; Arno,Jose I.; Carruthers,J. Donald, Rectangular parallelepiped fluid storage and dispensing vessel.

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48. Shamouilian, Shamouil; Lai, Canfeng; Cox, Michael Santiago; Krishnaraj, Padmanabhan; Tanaka, Tsutomu; Raoux, Sebastien; Porshnev, Peter I.; Nowak, Thomas, Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas.

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49. Olander, W. Karl; Sweeney, Joseph D.; Wang, Luping, Semiconductor manufacturing facility utilizing exhaust recirculation.

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50. Li Yao-En, Separation of CF4 and C2F6 from a perfluorocompound mixture.

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51. Michael Pittroff DE; Thomas Schwarze DE; Heinz-Joachim Belt DE; Pierre Barthelemy BE, Separation of gases containing SF6.

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52. Tom Glenn M. ; McManus James V., Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium.

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53. Tischler Michael A. ; Kirlin Peter S., Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members.

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54. Tom, Glenn M.; McManus, James V.; Wang, Luping; Olander, W. Karl, Sorbent-based gas storage and delivery system.

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55. Hultquist Steven J. ; Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same.

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56. Tom Glenn M. ; McManus James V., Storage and delivery system for gaseous compounds.

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57. Markovs John ; Cartwright Gordon T. ; Yon Carmen M. ; Rastelli Henry, Sulfur production process.

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58. Markovs John ; Cartwright Gordon Thomas ; Yon Carmen M. ; Rastelli Henry, Sulfur production process.

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59. Dietz James ; McManus James V., Throughflow gas storage and dispensing system.

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