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Apparatus and a method for dynamically tuning a particle sensor in response to varying process conditions 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-015/06
출원번호 US-0062904 (1993-05-17)
발명자 / 주소
  • Borden Peter G. (San Mateo CA) Stolz James (Milpitas CA)
출원인 / 주소
  • High Yield Technology, Inc. (Sunnyvale CA 02)
인용정보 피인용 횟수 : 40  인용 특허 : 0

초록 ▼

A method and an apparatus allow dynamic tuning of a particle sensor. The particle sensor provides output signals indicating particle detection to a controller, which includes an amplifier whose bandwidth and gain can be adjusted. The bandwidth and the gain of the amplifier are adjusted in accordance

대표청구항 ▼

A particle sensor whose performance is capable of being dynamically tuned, comprising: a particle sensor which provides output signals indicating the detection of particles in a manufacturing process; and a controller coupled to said particle sensor for processing said output signals of said particl

이 특허를 인용한 특허 (40)

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  2. Desplats, Romain; Perdu, Philippe; Shah, Ketan J.; Lundquist, Theodore R., Apparatus and method for detecting photon emissions from transistors.
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  3. Desplats,Romain; Le Coupanec,Patricia; Lo,William K.; Perdu,Philippe; Kasapi,Steven, Apparatus and method for detecting photon emissions from transistors.
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  4. Desplats,Romain; Le Coupanec,Patricia; Lo,William K.; Perdu,Philippe; Kasapi,Steven, Apparatus and method for detecting photon emissions from transistors.
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  5. Desplats,Romain; Le Coupanec,Patricia; Lo,William K.; Perdu,Philippe; Kasapi,Steven, Apparatus and method for detecting photon emissions from transistors.
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  6. Desplats,Romain; Perdu,Philippe; Shah,Ketan J.; Lundquist,Theodore R., Apparatus and method for detecting photon emissions from transistors.
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  7. Vig, Ravi; David, Paul A.; Shoemaker, Eric G., Arrangements for magnetic field sensors that act as movement detectors.
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  8. Taylor, William P.; Scheller, P. Karl; David, Paul, Arrangements for magnetic field sensors that act as tooth detectors.
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  9. Taylor, William P.; Scheller, P. Karl; David, Paul A., Arrangements for magnetic field sensors that act as tooth detectors.
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  10. David, Paul A.; Shoemaker, Eric G.; Eagen, Jeffrey, Arrangements for magnetic field sensors to cancel offset variations.
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  11. Cesaretti, Juan Manuel; Monreal, Gerardo A.; Taylor, William P.; Doogue, Michael C., Circuits and methods for generating a diagnostic mode of operation in a magnetic field sensor.
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  12. Cesaretti, Juan Manuel; Monreal, Gerardo; Taylor, William P.; Doogue, Michael C., Circuits and methods for generating a diagnostic mode of operation in a magnetic field sensor.
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  13. Friedrich, Andreas P.; Foletto, Andrea; Doogue, Michael C.; Taylor, William P.; Vig, Ravi; Scheller, P. Karl, Circuits and methods for generating a self-test of a magnetic field sensor.
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  14. Friedrich, Andreas P.; Foletto, Andrea; Doogue, Michael C.; Taylor, William P.; Vig, Ravi; Scheller, P. Karl, Circuits and methods for generating a self-test of a magnetic field sensor.
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  15. Friedrich, Andreas P.; Foletto, Andrea; Doogue, Michael C.; Taylor, William P.; Vig, Ravi; Scheller, P. Karl, Circuits and methods for generating a self-test of a magnetic field sensor.
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  16. Cesaretti, Juan Manuel; Monreal, Gerardo, Circuits and methods for self-calibrating or self-testing a magnetic field sensor.
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  17. Cesaretti, Juan Manuel; Alpago, Octavio; Milesi, Alejandro G.; Martin Pirchio, Franco Noel; Romero, Hernan D.; Uberti, Bruno Luis, Circuits and methods for self-calibrating or self-testing a magnetic field sensor using phase discrimination.
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  18. Cesaretti, Juan Manuel; Romero, Hernan D., Circuits and methods using adjustable feedback for self-calibrating or self-testing a magnetic field sensor with an adjustable time constant.
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  19. Petrie, Craig S.; Choe, Soo-Chang, Dual-path analog to digital converter.
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  20. Cesaretti, Juan Manuel, Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress.
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  21. Cesaretti, Juan Manuel, Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress.
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  22. Cesaretti, Juan Manuel; Cook, Aaron, Electronic circuit for driving a hall effect element with a current compensated for substrate stress.
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  23. Drouin, Mathew; Fernandez, Devon; Towne, Jay M.; Milesi, Alejandro G., Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element.
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  24. Foletto, Andrea; Eagen, Jeffrey; David, Paul A., Magnetic field sensor for sensing a movement of a ferromagnetic target object.
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  25. Foletto, Andrea; Vuillermet, Yannick; Friedrich, Andreas P., Magnetic field sensor for sensing a movement of a target object.
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  26. David, Paul A.; Vig, Ravi, Magnetic field sensor for sensing a proximity of an object.
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  27. David, Paul A.; Taylor, William P., Magnetic field sensor providing a movement detector.
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  28. Petrie, Craig S.; Cadugan, Bryan; Toebes, David; Doogue, Michael C.; Taylor, William P., Magnetic field sensors with self test.
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  29. David, Paul; Taylor, William P., Method and apparatus for magnetic sensor producing a changing magnetic field.
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  30. Wirth, Ralf; Haerle, Heribert; Handler, Torsten; Samuelsen, Dirk; Christl, Werner; Rösch, Sabine; Kamp, Bernhard; Kolitsch, Michael; Schaenzlin, Katharina, Method for operating a sensor for recording particles in a gas stream and device for implementing the method.
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  31. Milano, Shaun D.; Kerdraon, Thomas; El Bacha, Georges; Gaboury, Michael; Doogue, Michael C., Methods and apparatus for a current sensor having fault detection and self test functionality.
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  32. Pepka, Gary T.; Taylor, William P., Methods and apparatus for magnetic sensor having integrated coil.
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  33. Milano, Shaun D.; El Bacha, Georges; Doogue, Michael C.; Taylor, William P., Methods and apparatus for sensor diagnostics including programmable self-test signals.
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  34. Unger Roger L., Particle sensor and related method offering improved particle discrimination.
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  35. Felbinger Raymond J. ; Chandler David L, Particle sensor with features for setting, adjusting and trimming the flow rate of the sampled air.
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  36. Tsukazaki Hisashi,JPX ; Doi Makoto,JPX ; Miyazaki Shigemi,JPX ; Oohisa Akira,JPX, Semiconductor manufacturing apparatus.
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  37. Bonin, Michel P.; Stibbich, Aaron; Holve, Donald J., Signal processing method for in-situ, scanned-beam particle monitoring.
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  38. Rhodes, Michael L.; Krafthefer, Brian C.; Kittleson, David B.; Ma, Hogbin, System for particulate matter sensor signal processing.
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  39. Cesaretti, Juan Manuel, Systems and methods for reducing high order hall plate sensitivity temperature coefficients.
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  40. McIntosh, James; Christie, Robert D.; Bryce, Douglas; Wilson, Walter Morrison Stewart, Systems and methods for sensing current through a low-side field effect transistor.
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