$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Method of micromachining an integrated sensor on the surface of a silicon wafer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/3065
출원번호 US-0059222 (1993-05-10)
발명자 / 주소
  • Sparks Douglas R. (Kokomo IN) Brown Ronald E. (Kokomo IN) Healton Robert L. (Kokomo IN) Christenson John C. (Kokomo IN)
출원인 / 주소
  • Delco Electronics Corporation (Kokomo IN 02)
인용정보 피인용 횟수 : 115  인용 특허 : 0

초록 ▼

A method for micromachining the surface of a silicon substrate which encompasses a minimal number of processing steps. The method involves a preferential etching process in which a chlorine plasma etch is capable of laterally etching an N+buried layer beneath the surface of the bulk substrate. Such

대표청구항 ▼

A method for micromachining a surface of a silicon substrate so as to form therein a micromachined element of a semiconductor device, the method comprising the steps of: forming an N+region in the surface of the substrate; growing an epitaxial silicon layer over the surface of the substrate so as to

이 특허를 인용한 특허 (115)

  1. Payne, Alexander; Miller, Gregory, 2-D diffraction grating for substantially eliminating polarization dependent losses.
    상세보기
  2. Amm, David T., Angled illumination for a single order light modulator based projection system.
    상세보기
  3. Trisnadi, Jahja I.; Carlisle, Clinton B., Apparatus for selectively blocking WDM channels.
    상세보기
  4. Maheshwari,Dinesh, Arbitrary phase profile for better equalization in dynamic gain equalizer.
    상세보기
  5. Amm, David T.; Trisnadi, Jahja; Hunter, James; Gudeman, Christopher; Maheshwari, Dinesh, Blazed grating light valve.
    상세보기
  6. Eaton William P. ; Staple Bevan D. ; Smith James H., Capacitance pressure sensor.
    상세보기
  7. Gutierrez, Roman C., Cascaded electrostatic actuator.
    상세보기
  8. Maheshwari, Dinesh; Trisnadi, Jahia; Corrigan, Robert W., Chirped optical MEM device.
    상세보기
  9. Leung, Omar; Amm, David T., Controlled curvature of stressed micro-structures.
    상세보기
  10. Maheshwari, Dinesh, Diffractive light modulator with dynamically rotatable diffraction plane.
    상세보기
  11. Trisnadi,Jahja I.; Carlisle,Clinton B.; Cejna,Vlastimil, Diffractive light modulator-based dynamic equalizer with integrated spectral monitor.
    상세보기
  12. Partridge, Aaron; Lutz, Markus; Kronmueller, Silvia, Electromechanical system having a controlled atmosphere, and method of fabricating same.
    상세보기
  13. Partridge, Aaron; Lutz, Markus; Kronmueller, Silvia, Electromechanical system having a controlled atmosphere, and method of fabricating same.
    상세보기
  14. Adams,Scott; Davis,Tim; Miller,Scott; Shaw,Kevin; Chong,John Matthew; Lee,Seung (Chris) Bok, Electrostatic actuator for microelectromechanical systems and methods of fabrication.
    상세보기
  15. Adams,Scott; Davis,Tim; Miller,Scott; Shaw,Kevin; Chong,John Matthew; Lee,Seung Bok (Chris), Electrostatic actuator for microelectromechanical systems and methods of fabrication.
    상세보기
  16. Adams, Scott; Davis, Tim; Miller, Scott; Shaw, Kevin; Chong, John Matthew; Lee, Seung Bok (Chris), Electrostatic actuator for micromechanical systems.
    상세보기
  17. Brown,Peter S.; Berlo,Marcelyn A.; Ton,Tina A.; Dang,Kim Lien; Creech,Veronica; Parker,Joanne L., Endovascular graft with pressor and attachment methods.
    상세보기
  18. Hayashi,Reid K.; Concemi,Alfred, Endovascular graft with pressure, temperature, flow and voltage sensors.
    상세보기
  19. Brown,Peter S.; Lemere,Mark T.; Barkman,Kimberly; Kovac,Tim, Endovascular graft with sensors design and attachment methods.
    상세보기
  20. Partridge, Aaron; Lutz, Markus, Episeal pressure sensor.
    상세보기
  21. Miller, Gregory; Berger, Josef, Fiber optic transceiver.
    상세보기
  22. McNie, Mark E., Formation of a bridge in a micro-device.
    상세보기
  23. Sridhar, Uppili; Nagarajan, Ranganathan; Miao, Yu Bo; Su, Yi, High aspect ratio trench isolation process for surface micromachined sensors and actuators.
    상세보기
  24. Tomita,Akira; Amm,David Thomas; Daneman,Michael J.; Hunter,James; Staker,Bryan, High contrast grating light valve type device.
    상세보기
  25. Maheshwari,Dinesh, High contrast tilting ribbon blazed grating.
    상세보기
  26. Ajay Kumar ; Anisul Khan ; Jeffrey D Chin ; Dragan V Podlesnik, High etch rate method for plasma etching silicon nitride.
    상세보기
  27. Paolo Ferrari IT; Armando Manfredi IT; Benedetto Vigna IT, High quality factor, integrated inductor and production method thereof.
    상세보기
  28. Fruth, John R.; Kesler, Scott B., Integrated circuit including semiconductor power device and electrically isolated thermal sensor.
    상세보기
  29. Hunter, James A., Integrated driver process flow.
    상세보기
  30. Luce, Stephen E.; Stamper, Anthony K., Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure.
    상세보기
  31. Luce, Stephen E.; Stamper, Anthony K., Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure.
    상세보기
  32. Harame, David L.; Luce, Stephen E.; Stamper, Anthony K., Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure.
    상세보기
  33. Harame, David L.; Luce, Stephen E.; Stamper, Anthony K., Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure.
    상세보기
  34. Harame, David L.; Stamper, Anthony K., Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure.
    상세보기
  35. Harame, David L.; Stamper, Anthony K., Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure.
    상세보기
  36. Carlisle, Clinton B.; Trisnadi, Jahia I.; Hunter, James, Light modulator structure for producing high-contrast operation using zero-order light.
    상세보기
  37. Trisnadi,Jahja I.; Carlisle,Clinton B., MEMS interferometer-based reconfigurable optical add-and-drop multiplexor.
    상세보기
  38. Haluzak,Charles C.; Pollard,Jeffrey R., MEMS packaging structure and methods.
    상세보기
  39. Ganapathi,Srinivasan K., Magnetoresistive semiconductor pressure sensors and fingerprint identification/verification sensors using same.
    상세보기
  40. Ganapathi,Srinivasan K., Magnetoresistive semiconductor pressure sensors and fingerprint identification/verification sensors using same.
    상세보기
  41. Hiroshi Ohji JP; Kazuhiko Tsutsumi JP; Patrick J. French NL, Manufacturing method of silicon device.
    상세보기
  42. Lun, Zhao; Lee, James Yong Meng; Teo, Lee Wee; Tan, Shyue Seng; Lai, Chung Woh; Widodo, Johnny; Mishra, Shailendra; Chee, Jeffrey, Memory cell structure and method for fabrication thereof.
    상세보기
  43. Trisnadi, Jahja I.; Carlisle, Clinton B., Method and apparatus for dynamic equalization in wavelength division multiplexing.
    상세보기
  44. Winer, Paul; Vakanas, George P., Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates.
    상세보기
  45. Winer,Paul; Vakanas,George P., Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates.
    상세보기
  46. de Groot, Wilhelmus; Maheshwari, Dinesh, Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices.
    상세보기
  47. Trisnadi, Jahja I., Method and apparatus for reducing laser speckle using polarization averaging.
    상세보기
  48. Faguet, Jacques, Method and system for fabricating a nano-structure.
    상세보기
  49. Miller, Gregory D., Method for domain patterning in low coercive field ferroelectrics.
    상세보기
  50. Faguet, Jacques, Method for enlarging a nano-structure.
    상세보기
  51. Barron Carole C. ; Fleming James G. ; Montague Stephen, Method for integrating microelectromechanical devices with electronic circuitry.
    상세보기
  52. Kumar Ajay ; Khan Anisul ; Chinn Jeffrey D ; Podlesnik Dragan, Method for plasma etching at a high etch rate.
    상세보기
  53. Philippe Robert FR; France Michel FR; Hubert Grange FR, Method for producing a suspended element in a micro-machined structure.
    상세보기
  54. Shook, James Gill, Method of and apparatus for sealing an hermetic lid to a semiconductor die.
    상세보기
  55. Chong, John M.; Waldrop, Paul; Davis, Tim; Adams, Scott, Method of fabricating semiconductor wafers having multiple height subsurface layers.
    상세보기
  56. Ho Francis ; Yamamoto Yoshihisa, Method of making released micromachined structures by directional etching.
    상세보기
  57. Leung, Omar S., Method of sealing a hermetic lid to a semiconductor die at an angle.
    상세보기
  58. Trisnadi, Jahja I., Method, apparatus, and diffuser for reducing laser speckle.
    상세보기
  59. Lee, Whonchee; Fucsko, Janos; Wells, David H., Methods of etching single crystal silicon.
    상세보기
  60. Wells, David H.; Manning, H. Montgomery, Methods of fabricating intermediate semiconductor structures by selectively etching pockets of implanted silicon.
    상세보기
  61. Fucsko, Janos; Wells, David H.; Flynn, Patrick; Lee, Whonchee, Methods of forming single crystal silicon structures and semiconductor device structures including single crystal silicon structures.
    상세보기
  62. Harame, David L.; Luce, Stephen E.; Stamper, Anthony K., Methods of manufacturing integrated semiconductor devices with single crystalline beam.
    상세보기
  63. Fucsko, Janos; Wells, David H.; Flynn, Patrick; Lee, Whonchee, Methods of shaping vertical single crystal silicon walls and resulting structures.
    상세보기
  64. Bowers, John Edward; Helkey, Roger Jonathan; Corbalis, Charles; Sink, Robert Kehl; Lee, Seung Bok; MacDonald, Noel, Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same.
    상세보기
  65. Hunter,Jim; Amm,David; Gudeman,Christopher, Micro-structures with individually addressable ribbon pairs.
    상세보기
  66. Gudeman, Christopher; Hunter, James; Yeh, Richard; Amm, David T., Micro-support structures.
    상세보기
  67. Glenn, Thomas P., Microcircuit die-sawing protector.
    상세보기
  68. Thomas P. Glenn, Microcircuit die-sawing protector and method.
    상세보기
  69. Yazdi Navid ; Najafi Khalil, Microelectromechanical capacitive accelerometer and method of making same.
    상세보기
  70. Navid Yazdi ; Khalil Najafi, Microelectromechanical capactive accelerometer and method of making same.
    상세보기
  71. Bruner, Mike, Microelectronic mechanical system and methods.
    상세보기
  72. Bruner,Mike, Microelectronic mechanical system and methods.
    상세보기
  73. Bruner,Mike; Yeh,Richard; Hunter,Jim, Microelectronic mechanical system and methods.
    상세보기
  74. Kyle S. Lebouitz ; Roger T. Howe ; Albert P. Pisano, Microfabricated filter and shell constructed with a permeable membrane.
    상세보기
  75. Werner, Wolfgang; Kolb, Stefan, Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component.
    상세보기
  76. Fuertsch,Matthias; Pinter,Stefan; Weber,Heribert; Fischer,Frank; Metzger,Lars; Schelling,Christoph; Sundermeier,Frieder, Micromechanical structural element having a diaphragm and method for producing such a structural element.
    상세보기
  77. Shafaat, Syed Tariq; Carlisle, Clinton B.; Hartranft, Marc, Optical communication arrangement.
    상세보기
  78. Alioshin, Paul; Corbin, Dave B.; Tomita, Akira; Corrigan, Robert W., Optical device arrays with optimized image resolution.
    상세보기
  79. Maheshwari, Dinesh; Dueweke, Michael, PDL mitigation structure for diffractive MEMS and gratings.
    상세보기
  80. Dueweke, Michael; Maheshwari, Dinesh; Gudernan, Christopher; Trisnadi, Jahja I., Patterned diffractive light modulator ribbon for PDL reduction.
    상세보기
  81. Rich,David B.; Crist,Steven M., Piezoresistive sensing structure.
    상세보기
  82. Arturo A. Ayon, Plasma etch techniques for fabricating silicon structures from a substrate.
    상세보기
  83. Gudeman,Christopher; Leung,Omar; Hunter,James; Amm,David, Pre-deflected bias ribbons.
    상세보기
  84. Carlisle, Clinton B.; Trisnadi, Jahja I., Rapidly tunable external cavity laser.
    상세보기
  85. Trisnadi,Jahja I.; Carlisle,Clinton B., Reconfigurable modulator-based optical add-and-drop multiplexer.
    상세보기
  86. Hunter, James; Staker, Bryan, Reduced formation of asperities in contact micro-structures.
    상세보기
  87. Seefeldt James D. ; Mattes Michael F., Resonating structure and method for forming the resonating structure.
    상세보기
  88. Gutierrez, Roman C., Row and column actuator control.
    상세보기
  89. Steegen, An L.; Surendra, Maheswaran; Wann, Hsing-Jen; Zhang, Ying; Zach, Franz; Wong, Robert, Selective silicon-on-insulator isolation structure and method.
    상세보기
  90. Steegen,An L.; Surendra,Maheswaran; Wann,Hsing Jen; Zhang,Ying; Zach,Franz; Wong,Robert, Selective silicon-on-insulator isolation structure and method.
    상세보기
  91. Fukuzumi,Yoshiaki, Semiconductor device and method of manufacturing a semiconductor device.
    상세보기
  92. Sugaya,Hiroyuki, Semiconductor device with cavity and method of manufacture thereof.
    상세보기
  93. Yokoyama, Kenichi, Semiconductor physical quantity sensor and method for manufacturing the same.
    상세보기
  94. Yokoyama,Kenichi, Semiconductor physical quantity sensor and method for manufacturing the same.
    상세보기
  95. Lee, Whonchee; Fucsko, Janos; Wells, David H., Semiconductor structures including square cuts in single crystal silicon.
    상세보기
  96. Lee, Whonchee; Fucsko, Janos; Wells, David H., Semiconductor structures including square cuts in single crystal silicon and method of forming same.
    상세보기
  97. Wells, David H.; Manning, H. Montgomery, Semiconductor substrates with undercut structures.
    상세보기
  98. Chong, John; Lee, Seung Bok; MacDonald, Noel; Lewis, Robert; Hunt, Peter, Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same.
    상세보기
  99. Sparks Douglas Ray ; Jiang George Qin ; Chilcott Dan Wesley ; Kearney Mark Billings, Silicon micromachined motion sensor and method of making.
    상세보기
  100. Hunter,James; Gudeman,Christopher S., Silicon substrate as a light modulator sacrificial layer.
    상세보기
  101. Karanfilov, Christopher I., Single cell isolation apparatus and method of use.
    상세보기
  102. Fucsko, Janos; Wells, David H.; Flynn, Patrick; Lee, Whonchee, Single crystal silicon structures.
    상세보기
  103. Yazdi Navid ; Najafi Khalil, Single-side microelectromechanical capacitive accelerometer and method of making same.
    상세보기
  104. Yazdi, Navid; Najafi, Khalil; Salian, Arvind, Single-side microelectromechanical capacitive accelerometer and method of making same.
    상세보기
  105. Yazdi Navid ; Najafi Khalil, Single-side microelectromechanical capacitive acclerometer and method of making same.
    상세보기
  106. Najafi, Nader; Sparks, Douglas Ray, System having wireless implantable sensor.
    상세보기
  107. Maheshwari, Dinesh, Tilt-able grating plane for improved crosstalk in 1×N blaze switches.
    상세보기
  108. Seefeldt James D. ; Mattes Michael F., Transducer having a resonating silicon beam and method for forming same.
    상세보기
  109. Seefeldt James D. ; Mattes Michael F., Transducer having a resonating silicon beam and method for forming same.
    상세보기
  110. Adams Scott G. ; Shaw Kevin A. ; Webb Russell Y. ; Reed Bryan W. ; MacDonald Noel C. ; Davis Timothy J., Trench isolation for micromechanical devices.
    상세보기
  111. Scott G. Adams ; Kevin A. Shaw ; Russell Y. Webb ; Bryan W. Reed ; Noel C. MacDonald ; Timothy J. Davis, Trench isolation for micromechanical devices.
    상세보기
  112. Baiocco,Christopher V.; Steegen,An L.; Zhang,Ying, Trench sidewall passivation for lateral RIE in a selective silicon-on-insulator process flow.
    상세보기
  113. Corrigan,Robert W.; Maheshwari,Dinesh, Two-stage gain equalizer.
    상세보기
  114. Roxlo, Charles B., Wavelength selective switch and equalizer.
    상세보기
  115. Lee, Whonchee; Fucsko, Janos; Wells, David H., Wet etch suitable for creating square cuts in si.
    상세보기

관련 콘텐츠

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로