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PFPE coatings for micro-mechanical devices 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B32B-027/00
출원번호 US-0239497 (1994-05-09)
발명자 / 주소
  • Wallace Robert M. (Dallas TX) Henck Steven A. (Plano TX) Webb Douglas A. (Chandler AZ)
출원인 / 주소
  • Texas Instruments Incorporated (Dallas TX 02)
인용정보 피인용 횟수 : 88  인용 특허 : 0

초록 ▼

A micro-mechanical device (10) includes relatively movable elements (11, 17) which contact or engage and which thereafter stick or adhere. A perfluoropolyether (PFPE) film (31) is applied to the contacting or engaging portions of the elements (11,17) to ameliorate or eliminate such sticking or adhes

대표청구항 ▼

An improved micro-mechanical device of the type having a first element selectively movable relative to a second element, portions of the elements contacting in one position of the first element, wherein the improvement comprises: a film of perfluoropolyether (PFPE) on at least one of the contacting

이 특허를 인용한 특허 (88)

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