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Thermal imaging system with a monolithic focal plane array and method 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01J-005/02
  • G02F-001/13
출원번호 US-0281711 (1994-07-26)
발명자 / 주소
  • Hanson Charles M. (Richardson TX)
출원인 / 주소
  • Texas Instruments Incorporated (Dallas TX 02)
인용정보 피인용 횟수 : 94  인용 특허 : 0

초록

A thermal imaging system (10) contains a focal plane array (30) including a plurality of thermal sensors (32) mounted on a substrate (62). Each thermal sensor (32) includes a film layer (34) of infrared sensitive material which is both electronically and thermally isolated from the associated integr

대표청구항

A thermal sensor mounted on an integrated circuit substrate to provide an image representative of the amount of infrared radiation incident to the thermal sensor comprising: a film layer of infrared sensitive material disposed adjacent to a first surface of the substrate with a gap formed therebetwe

이 특허를 인용한 특허 (94)

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