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Method of making hard, transparent amorphous hydrogenated boron nitride films 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-003/06
출원번호 US-0261278 (1994-06-16)
발명자 / 주소
  • Tamor Michael A. (Toledo OH) Vassell William C. (Bloomfield MI)
출원인 / 주소
  • Ford Motor Company (Dearborn MI 02)
인용정보 피인용 횟수 : 33  인용 특허 : 0

초록

This invention is directed to a process for providing a hard, transparent, hydrophobic film of hydrogenated boron nitride on a substrate and the film so made. The process comprises depositing the film condensation from a flux of ions generated from gaseous precursors comprising borazine, the kinetic

대표청구항

A process for providing a hard, transparent film comprising amorphous hydrogenated boron-nitride on a substrate, said process comprising depositing said film on said substrate at a temperature of less than about 100°C. by plasma-enhanced chemical vapor deposition from gaseous precursor materials com

이 특허를 인용한 특허 (33)

  1. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method.
  2. Veerasamy, Vijayen S., Coated article with DLC inclusive layer(s) having increased hydrogen content at surface area.
  3. Doll Gary Lynn ; Mantese Joseph Vito, Conversion of hexagonal-like BN to cubic-like BN by ion implantation.
  4. Nastasi, Michael A.; Walter, Kevin C.; Rej, Donald J., Forming adherent coatings using plasma processing.
  5. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  6. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  7. Veerasamy, Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  8. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Hydrophobic coating including DLC and/or FAS on substrate.
  9. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
  10. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
  11. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo, Hydrophobic coating with DLC & FAS on substrate.
  12. Sei Tsunoda JP; Hideharu Nobutoki JP; Noboru Mikami JP, LOW DIELECTRIC CONSTANT FILM COMPOSED OF BORON, NITROGEN, AND HYDROGEN HAVING THERMAL RESISTANCE, PROCESS FOR FORMING THE FILM, USE OF THE FILM BETWEEN SEMICONDUCTOR DEVICE LAYERS, AND THE DEVICE FOR.
  13. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Low-E coating system including protective DLC.
  14. Nguyen, Victor; Chen, Yi; Balseanu, Mihaela; Roflox, Isabelita; Xia, Li-Qun; Witty, Derek R, Method for depositing boron-rich films for lithographic mask applications.
  15. Yamamoto Hiroaki, Method for pre-shaping of plastic films used in co-molding processes and improved paint film covered parts made thereby.
  16. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of depositing DLC inclusive coating on substrate.
  17. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of deposition DLC inclusive layer(s) using hydrocarbon and/or siloxane gas(es).
  18. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of ion beam milling a glass substrate prior to depositing a coating system thereon, and corresponding system for carrying out the same.
  19. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon.
  20. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of making a coated article including DLC and FAS.
  21. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Method of making coated article including DLC inclusive layer over low-E coating.
  22. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of making coated article including diamond-like carbon (DLC) and FAS.
  23. Veerasamy, Vijayen S., Method of making coated article including layer(s) of diamond-like carbon which may be hydrophobic.
  24. Veerasamy, Vijayen S., Method of making coating article including carbon coating on glass.
  25. Veerasamy,Vijayen S., Method of making heat treatable coated article with diamond-like carbon (DLC) inclusive layer.
  26. Veerasamy, Vijayen S., Method of making heat treatable coated article with protective layer.
  27. Vijayen S. Veerasamy, Method of making hydrophobic coated article.
  28. Zhang, Haiyan; Benson, Gerald M., Methods for replication, replicated articles, and replication tools.
  29. Trowbridge, Tammy L.; Wertsching, Alan K.; Pinhero, Patrick J.; Crandall, David L., Methods of forming boron nitride.
  30. Chiang, Tony P.; Leeser, Karl, Modulated ion-induced atomic layer deposition (MII-ALD).
  31. Kumada, Teruhiko; Nobutoki, Hideharu; Yasuda, Naoki, Plasma CVD apparatus, method for forming thin film and semiconductor device.
  32. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Solar management coating system including protective DLC.
  33. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Solar management coating system including protective DLC.
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