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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0589194 (1996-01-22) |
발명자 / 주소 |
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출원인 / 주소 |
|
인용정보 | 피인용 횟수 : 10 인용 특허 : 0 |
A polishing tool includes a tool body and a polishing member which is mounted rotatably on the tool body and which has a central hole unit formed through the polishing member. The working surface of the polishing member has a plurality radially extending slots which are spaced apart from each other
A polishing tool adapted to polish a workpiece which is placed in front of the tool, said tool comprising: a tool body having a slurry passage unit which is formed therein and which is adapted to permit flow of a slurry therethrough that consists of a lubricating liquid and abrasive grains; a polish
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