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Fabrication of vertical SiGe base HBT with lateral collector contact on thin SOI 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/265
출원번호 US-0251987 (1994-06-01)
발명자 / 주소
  • Burghartz Joachim N. (Shrub Oak NY)
출원인 / 주소
  • International Business Machines Corporation (Armonk NY 02)
인용정보 피인용 횟수 : 64  인용 특허 : 0

초록

A SiGe-HBT structure for device integration on thin-SOI substrates is disclosed. The emitter and base regions are vertical while the collector contact is lateral in the otherwise MOS-like device structure. This allows one to integrate a SiGe base, the device capacitances are reduced, and the transis

대표청구항

A method for forming a vertical heterojunction bipolar transistor having a lateral connector contact, comprising: 1) providing a silicon on insulator (SOI) substrate; 2) placing an epitaxial layer on the substrate, the epitaxial layer comprising a collector layer, a base layer above the collector la

이 특허를 인용한 특허 (64)

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