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특허 상세정보

Manifold systems for high purity chemical delivery systems

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) F17C-013/00   
미국특허분류(USC) 141/21 ; 141/67 ; 141/91 ; 141/63
출원번호 US-0485966 (1995-06-07)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 34  인용 특허 : 21
초록

A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

대표
청구항

A high purity chemical delivery system comprising a manifold, said manifold comprising a bulk container outlet line connected to an ampule refill line by a process isolation valve; a carrier gas bulk container inlet line connected to a carrier gas source by a carrier gas isolation valve; a low pressure vent valve connected between a low pressure line communicating with said carrier gas bulk container inlet line and a vacuum line; and, a container bypass valve connected between said bulk container outlet line and said carrier gas bulk container inlet line...

이 특허에 인용된 특허 (21)

  1. Smith Dresden G. (1621 English Dr. San Jose CA 95129). Air and water volume control apparatus for hydropneumatic tanks. USP1986034576552.
  2. Geatz Tobin (Durham NC). Apparatus and method for the transfer and delivery of high purity chemicals. USP1992095148945.
  3. Fair David L. (Rockford IL). Bubbler container automatic refill system. USP1990124979545.
  4. Fair David L. (Rockford IL). Bubbler container automatic refill system. USP1991085038840.
  5. Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf Ha. Chemical refill system. USP1990124979643.
  6. Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randtke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf H. Chemical refill system. USP1989084859375.
  7. Sawada Ryoji (Mori JPX) Yamamoto Satoshi (Mori JPX). Fluid level indicator for small watercraft. USP1992045103673.
  8. Morales Gerald A. (Simi Valley CA). Jet level sensor for fuel tanks. USP1994025285812.
  9. McKiernan Edward (Big Prairie OH) Bailey Ronald J. (Big Prairie OH) Sigler James A. (Big Prairie OH). Level indicating in vehicle holding tanks. USP1992015079950.
  10. Senghaas Karl A. (434 Forrest Hill San Antonio TX 78209) Senghaas Peter (334 Olney San Antonio TX 78209). Liquid level measuring apparatus. USP1990124976146.
  11. Bongort Edgar A. (Southfield MI) Cruickshank William T. (Pontiac MI). Liquid level sensor. USP1977114056979.
  12. Bongort Edgar A. (Southfield MI) Cruickshank William T. (Pontiac MI). Liquid level sensor. USP1977124064755.
  13. Miyazaki Shinji (Yokohama JPX) Tsunashima Yoshitaka (Tokyo JPX). Liquid source container device. USP1991125069244.
  14. Schumacher John C. (Oceanside CA) Lagendijk Andre (Oceanside CA). Liquid source material container and method of use for semiconductor device manufacturing. USP1979014134514.
  15. Yamazaki Masahiro (Yokohama JPX) Iizuka Shigeru (Yokohama JPX) Kamiya Shigemitsu (Kawasaki JPX) Oka Yoshiro (Yokohama JPX) Fujino Katsuhiro (Yokohama JPX). Method and apparatus for feeding drug liquid from hermetic returnable can. USP1987064676404.
  16. Jones Michael E. (Barsted GB3) Kenward Andrew J. (London GB3). Method of and apparatus for packaging a beverage in a container. USP1994075329963.
  17. Schumacher John C. (Oceanside CA) Lagendijk Andre (Oceanside CA). Method of shipping and using semiconductor liquid source materials. USP1981114298037.
  18. Rowe ; Jr. Edward A. (North Perry OH). Process for removing undesirable substances from electrical devices. USP1984014425949.
  19. Randtke Peter T. (La Costa CA) Graf Hans-Juergen (Oceanside CA). Ultra high purity reagent container with large breakseal. USP1991085041267.
  20. McMenamin Joseph C. (Oceanside CA). Vapor mass flow control system. USP1984034436674.
  21. Foster Leonard W. (Richardson TX) Millis Edwin G. (Dallas TX). Vented vacuum semiconductor wafer cassette. USP1992085137063.

이 특허를 인용한 특허 피인용횟수: 34

  1. Engelland, Randall Allen; Olson, Thomas Richard; Gillingham, Gary Ray; Rothman, Jim C.; Suydam, Richard Lawrence. Air cleaner arrangements; serviceable filter elements; and, methods. USP2010037682416.
  2. Engelland, Randall Allen; Olson, Thomas Richard; Gillingham, Gary Ray; Rothman, Jim C.; Suydam, Richard Lawrence. Air cleaner arrangements; serviceable filter elements; and, methods. USP2011077972405.
  3. Engelland, Randall Allen; Olson, Thomas Richard; Gillingham, Gary Ray; Rothman, Jim C.; Suydam, Richard Lawrence. Air cleaner arrangements; serviceable filter elements; and, methods. USP201506RE45588.
  4. Blatt, Christopher S.; Pearce, Richard H.; Williams, Graham; Wentworth, III, Edward H.. Automatic refill system for ultra pure or contamination sensitive chemicals. USP2003086604555.
  5. Christopher S. Blatt ; Richard H. Pearce ; Graham Williams GB; Edward H. Wentworth, III. Automatic refill system for ultra pure or contamination sensitive chemicals. USP2002086435224.
  6. Noah, Craig M.; Gregg, John N.; Jackson, Robert M.; Esser, Craig. Bulk chemical delivery system. USP2003106637475.
  7. Jackson Robert M.. Chemical cabinet employing air flow baffles. USP2000086105606.
  8. Jackson Robert M. ; Esser Craig ; Serdahl Eric ; Gregg John N.. Chemical delivery system employing containment crate. USP2000026029718.
  9. Gregg John N. ; Noah Craig M. ; Jackson Robert M.. Chemical delivery system having purge system utilizing multiple purge techniques. USP2001036199599.
  10. Gregg John N. ; Noah Craig M. ; Jackson Robert M.. Chemical delivery system having purge system utilizing multiple purge techniques. USP2001106296025.
  11. Gregg John N. ; Noah Craig M. ; Jackson Robert M.. Chemical delivery system having purge system utilizing multiple purge techniques. USP2001106296026.
  12. John N. Gregg ; Craig M. Noah ; Robert M. Jackson. Chemical delivery system having purge system utilizing multiple purge techniques. USP2002106457494.
  13. Birtcher Charles Michael ; Steidl Thomas Andrew ; Martinez Martin Castaneda ; Hamidi Jamshid Jay. Chemical delivery system with ultrasonic fluid sensors. USP2001076264064.
  14. Gregg, John N.; Harris, Gregory W.; Cook, Frank L.; Jackson, Robert M.. Container chemical guard. USP2003026520218.
  15. Jackson Robert M.. Delivery system and manifold. USP1999105964254.
  16. Lim, Gregory; Francis, Aaron; Williams, Kenneth; Mariserla, Sandeep. Ex-situ cleaning assembly. USP2015038974606.
  17. Coulonvaux, Paul; DeWit, Johan; Olson, Cary Donald; Miller, Thomas; Barris, Marty; Bishop, Wayne; Engel, Donald; Campbell, Steven; Fobe, Johan. Filter arrangements; housings; assemblies; and, methods. USP20190410252206.
  18. Coulonvaux, Paul; Dewit, Johan; Olson, Cary Donald; Miller, Thomas; Barris, Marty; Bishop, Wayne; Engel, Donald; Campbell, Steven; Fobe, Johan. Filter arrangements; housings; assemblies; and, methods. USP2016039283507.
  19. Nelson, Benny Kevin; Zientara, Daniel Robert; Petricka, Jasson Louis. Filter cartridge. USP2011100646369.
  20. Husain, M. Kaja Aliar. Fuel sender with reed switch and latching magnets. USP2012098261613.
  21. Takeharada Mitsuhide,JPX ; Nozawa Shigeyoshi,JPX. Gas filling method and facility. USP1999085937918.
  22. Siegele Stephen H. ; Gregg John N. ; Noah Craig M.. High aspect ratio containers for ultrahigh purity chemicals. USP2000026029717.
  23. Lim, Gregory; Francis, Aaron; Williams, Kenneth. In-situ cleaning assembly. USP2014018627835.
  24. Kelekar, Rajesh; Verma, Gaurav; Weiner, Kurt. Maintaining flow rate of a fluid. USP2011108037894.
  25. Jursich, Gregory M.. Methods and apparatus for delivering high purity liquids with low vapor pressure. USP2003066581649.
  26. Steidl, Thomas Andrew; Vivanco, Gildardo; Birtcher, Charles Michael. Purgeable container for low vapor pressure chemicals. USP2005116966348.
  27. Birtcher, Charles Michael; Martinez, Martin Castaneda; Steidl, Thomas Andrew; Vivanco, Gil; Silva, David James. Purgeable manifold for low vapor pressure chemicals containers. USP2003116648034.
  28. Chism, Richard D.; Krell, Andy. Refillable ampoule with purge capability. USP2016059347616.
  29. Calabrese, Ronald V.. Self-calibrating liquid level transmitter. USP2010027665358.
  30. Calabrese,Ronald V.. Self-calibrating liquid level transmitter. USP2007107284427.
  31. Calabrese,Ronald V.. Self-calibrating liquid level transmitter. USP2008127461550.
  32. Arisumi, Osamu; Kiyotoshi, Masahiro; Hieda, Katsuhiko. Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method. USP2012028119196.
  33. Charles Michael Birtcher ; Robert Sam Zorich ; Thomas Andrew Steidl ; Gil Vivanco ; Cynthia Lee Trent ; David James Silva. Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals. USP2002086431229.
  34. Newton, Christopher William. System for accurately weighing solids and control mechanism for same. USP2012048156957.