초록 ▼

A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that

A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

대표청구항 ▼

A high purity chemical delivery system comprising a manifold, said manifold comprising a bulk container outlet line connected to an ampule refill line by a process isolation valve; a carrier gas bulk container inlet line connected to a carrier gas source by a carrier gas isolation valve; a low press

A high purity chemical delivery system comprising a manifold, said manifold comprising a bulk container outlet line connected to an ampule refill line by a process isolation valve; a carrier gas bulk container inlet line connected to a carrier gas source by a carrier gas isolation valve; a low pressure vent valve connected between a low pressure line communicating with said carrier gas bulk container inlet line and a vacuum line; and, a container bypass valve connected between said bulk container outlet line and said carrier gas bulk container inlet line; a first block valve comprising said container bypass valve and said process isolation valve, and a second block valve comprising said low pressure vent valve and said carrier gas isolation valve.