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특허 상세정보

Vertically integrated sensor structure and method

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) G01L-009/06   
미국특허분류(USC) 73/721
출원번호 US-0684723 (1996-07-22)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 73  인용 특허 : 12
초록

A vertically integrated sensor structure (60) includes a base substrate (71) and a cap substrate (72) bonded to the base substrate (71). The base substrate (71) includes a transducer (78) for sensing an environmental condition. The cap substrate (72) includes electronic devices (92) formed on one surface to process output signals from the transducer (78). The sensor structure (60) provides an integrated structure that isolates sensitive components from harsh environments.

대표
청구항

A vertically integrated sensor device comprising: a base substrate having a first major surface, a second major surface opposite the first major surface, and a cavity extending from the second major surface to form a diaphragm, and wherein the base substrate comprises a semiconductor material; a transducer formed on the diaphragm; a cap substrate having a third major surface and a fourth major surface opposite the third major surface, wherein the third major surface is connected to the first major surface to provide a hermetically sealed chamber, and whe...

이 특허에 인용된 특허 (12)

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  9. Yamada Kazuji (Ibaraki JPX) Suzuki Seiko (Ibaraki JPX) Nishihara Motohisa (Ibaraki JPX) Kawakami Kanji (Ibaraki JPX) Sato Hideo (Ibaraki JPX) Kobori Shigeyuki (Ibaraki JPX) Kanzawa Ryosaku (Ibaraki J. Semiconductor absolute pressure transducer assembly and method. USP1981094291293.
  10. Stein Karl-Ulrich (Unterhaching DEX). Semiconductor pressure sensor with casing and method for its manufacture. USP1989044823605.
  11. Kato Yukihiro (Toyoake JPX) Ishii Masami (Toyoake JPX) Yabuno Ryohei (Toyoake JPX) Oka Tetsuo (Toyoake JPX). Strain gauges for the pressure sensor. USP1989104876893.
  12. Horning Robert D. (Burnsville MN) Stratton Thomas G. (Roseville MN) Saathoff Deidrich J. (Burnsville MN). Wafer bonding enhancement technique. USP1994065318652.

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