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[미국특허] Suspended single crystal silicon structures and method of making same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-031/058
  • H01L-029/06
출원번호 US-0321299 (1994-10-11)
발명자 / 주소
  • Reay Richard J. (Palo Alto CA) Klaassen Erno H. (San Jose CA)
출원인 / 주소
  • The Board of Trustees of the Leeland Stanford Junior University (Palo Alto CA 02)
인용정보 피인용 횟수 : 56  인용 특허 : 4

초록 ▼

Temperature-sensitive transducers and other circuitry are manufactured by an electrochemical post-processing etch on an integrated circuit fabricated using a conventional CMOS process. Tetramethyl ammonium hydroxide or another anisotropic etchant having similar characterisics is used to selectively

대표청구항 ▼

An integrated circuit incorporating a suspended single crystal silicon structure, comprising: a p-substrate; a pit etched in said p-substrate; at least one dielectric beam extending over said pit; an n-well suspended over said pit by said at least one dielectric beam, said at least one dielectric be

이 특허에 인용된 특허 (4) 인용/피인용 타임라인 분석

  1. Bohrer Philip J. (Minneapolis MN) Johnson Robert G. (Minneapolis MN), Flow sensor.
    상세보기
  2. Liddiard Kevin C. (Adelaide AUX), Semiconductor film bolometer thermal infrared detector.
    상세보기
  3. Bu Jong U. (Seoul KRX), Thermal comfort sensing device.
    상세보기
  4. Higashi Robert E. (Bloomington MN) Holmen James O. (Minnetonka MN) Johnson Robert G. (Minnetonka MN), Thermal sensor.
    상세보기

이 특허를 인용한 특허 (56) 인용/피인용 타임라인 분석

  1. Landsberger, Leslie M.; Grudin, Oleg, Compensating for linear and non-linear trimming-induced shift of temperature coefficient of resistance.
    상세보기
  2. King, William P.; Lee, Jungchul, Device for calorimetric measurement.
    상세보기
  3. Hou, Kuan-Chou; Ou-Yang, Mang; Chiou, Jin-Chern, Electrical calibrated radiometer.
    상세보기
  4. Euisik Yoon KR; Kwang Hyun Lee KR; Hyung Kew Lee KR, Electrothermal integrator and audio frequency filter.
    상세보기
  5. Maes, Ben; Van Buggenhout, Carl; Van Der Wiel, Appolonius Jacobus, Etching of infrared sensor membrane.
    상세보기
  6. Seki,Koji; Zushi,Nobuhiko; Ike,Shinichi; Nakano,Seishi; Nakata,Tarou; Kamiunten,Shoji, Flow sensor and method of manufacturing the same.
    상세보기
  7. Dhuler Vijayakumar R. ; Hill Edward ; Cowen Allen, In-plane MEMS thermal actuator and associated fabrication methods.
    상세보기
  8. Merrill Richard Billings ; Lee Tsung-Wen, Integrated inductor with filled etch.
    상세보기
  9. Faralli, Dino; Vigna, Benedetto; Castoldi, Laura Maria, MEMS device incorporating a fluidic path, and manufacturing process thereof.
    상세보기
  10. Agrawal, Vivek; Wood, Robert L.; Mahadevan, Ramaswamy, MEMS microactuators located in interior regions of frames having openings therein and methods of operating same.
    상세보기
  11. Dhuler Vijayakumar R. ; Hill Edward A. ; Mahadevan Ramaswamy ; Walters Mark David ; Wood Robert L., MEMS variable optical attenuator.
    상세보기
  12. Wu Zhiqiang ; Li Li ; Figura Thomas A.,JPX ; Parekh Kunal R. ; Pan Pai-Hung ; Reinberg Alan R. ; Ma Kin F., Material removal method for forming a structure.
    상세보기
  13. Wu, Zhiqiang; Li, Li; Figura, Thomas A.; Parekh, Kunal R.; Pan, Pai-Hung; Reinberg, Alan R.; Ma, Kin F., Material removal method for forming a structure.
    상세보기
  14. Wu, Zhiqiang; Li, Li; Figura, Thomas A.; Parekh, Kunal R.; Pan, Pai-Hung; Reinberg, Alan R.; Ma, Kin F., Material removal method for forming a structure.
    상세보기
  15. Wu, Zhiqiang; Li, Li; Figura, Thomas A.; Parekh, Kunal R.; Pan, Pai-Hung; Reinberg, Alan R.; Ma, Kin F., Material removal method for forming a structure.
    상세보기
  16. Zhiqiang Wu ; Li Li ; Thomas A. Figura JP; Kunal R. Parekh ; Pai-Hung Pan ; Alan R. Reinberg ; Kin F. Ma, Material removal method for forming a structure.
    상세보기
  17. Grudin,Oleg; Landsberger,Leslie M., Measuring and trimming circuit components embedded in micro-platforms.
    상세보기
  18. Chen, Chung-Nan; Hsiao, Chien-Hua; Huang, Wen-Chie, Metallic silicide resistive thermal sensor and method for manufacturing the same.
    상세보기
  19. Dhuler Vijayakumar R. ; Wood Robert L. ; Mahadevan Ramaswamy, Method of fabricating a microelectro mechanical structure having an arched beam.
    상세보기
  20. Verhaverbeke Steven, Methods for treating semiconductor wafers.
    상세보기
  21. Wu Zhiqiang ; Li Li ; Figura Thomas A. ; Parekh Kunal R. ; Pan Pai-Hung ; Reinberg Alan R. ; Ma Kin F., Methods of making implanted structures.
    상세보기
  22. Hill, Edward; Wood, Robert L.; Mahadevan, Ramaswamy, Methods of overplating surfaces of microelectromechanical structure.
    상세보기
  23. Dhuler Vijayakumar R. ; Walters Mark David, Microactuators including a metal layer on distal portions of an arched beam.
    상세보기
  24. Dhuler Vijayakumar R., Microelectromechanical device having single crystalline components and metallic components.
    상세보기
  25. Dhuler, Vijayakumar R., Microelectromechanical device having single crystalline components and metallic components.
    상세보기
  26. Dhuler Vijayakumar R. ; Wood Robert L., Microelectromechanical positioning apparatus.
    상세보기
  27. Hill Edward A., Microelectromechanical rotary structures.
    상세보기
  28. Vijayakumar R. Dhuler ; Mark David Walters, Microelectromechanical valves including single crystalline material components.
    상세보기
  29. Shorrocks Nicholas M,GBX ; Walker Martin J,GBX ; Nicklin Ralph,GBX ; Parsons Andrew D,GBX, Micromachined devices having microbridge structure.
    상세보기
  30. Lee, Dae Sung; Lee, Kyung Il; Hwang, Hak In, Microwave power sensor and method for manufacturing the same.
    상세보기
  31. Conta,Renato; Piano,Mara, Monolithic printhead with built-in equipotential network and associated manufacturing method.
    상세보기
  32. Conta,Renato; Piano,Mara, Monolithic printhead with built-in equipotential network and associated manufacturing method.
    상세보기
  33. Chavan, Abhijeet V.; Logsdon, James H.; Chilcott, Dan W.; Lee, Han-Sheng S.; Lambert, David K.; Vas, Timothy A., Monolithically-integrated infrared sensor.
    상세보기
  34. Hill Edward A. ; Dhuler Vijayakumar R., Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays.
    상세보기
  35. Saul Cyro K.,BRX ; Zemel Jay N., Multi-purpose integrated intensive variable sensor.
    상세보기
  36. Zhan, Changqing; Schuele, Paul J.; Conley, Jr., John F.; Hartzell, John W., Piezo-diode cantilever MEMS.
    상세보기
  37. Chan, Lap; Chu, Sanford; Ng, Chit Hwei; Verma, Purakh; Zheng, Jia Zhen; Chew, Johnny; Sia, Choon Beng, Process to reduce substrate effects by forming channels under inductor devices and around analog blocks.
    상세보기
  38. Chan,Lap; Chu,Sanford; Ng,Chit Hwei; Verma,Purakh; Zheng,Jia Zhen; Chew,Johnny; Sia,Choon Beng, Process to reduce substrate effects by forming channels under inductor devices and around analog blocks.
    상세보기
  39. Noda, Takafumi, Pyroelectric detector, pyroelectric detection device, and electronic instrument.
    상세보기
  40. Johansson, Ted; Norstr?m, Hans, Selective base etching.
    상세보기
  41. Lescouzeres Lionel,FRX ; Lorenzo Alexandra,FRX ; Scheid Emmanual,FRX, Semiconductor chemical sensor device and method of forming a thermocouple for a semiconductor chemical sensor device.
    상세보기
  42. Merassi, Angelo Antonio; Ferrera, Marco; Mantovani, Marco; Ferrari, Paolo; Vigna, Benedetto, Semiconductor integrated device with mechanically decoupled active area and related manufacturing process.
    상세보기
  43. Im, Yun-Hyeok; Park, Kyol; Hwang, Hee-Jung, Semiconductor package and electronic system including the same.
    상세보기
  44. Opitz, Bernhard; Feyh, Ando; Herrmann, Daniel; Wolst, Oliver, Sensor.
    상세보기
  45. Hill Edward ; Wood Robert L. ; Mahadevan Ramaswamy, Temperature compensated microelectromechanical structures and related methods.
    상세보기
  46. Milley, Andrew Joseph; Ricks, Lamar Floyd; Becke, Craig Scott, Temperature compensation module for a fluid flow transducer.
    상세보기
  47. Lukashevich, Dzianis, Temperature stabilized circuitry.
    상세보기
  48. Wood Robert L. ; Dhuler Vijayakumar R., Thermal arched beam microelectromechanical actuators.
    상세보기
  49. Dhuler Vijayakumar R. ; Wood Robert L. ; Mahadevan Ramaswamy, Thermal arched beam microelectromechanical devices and associated fabrication methods.
    상세보기
  50. Dhuler Vijayakumar R. ; Wood Robert L. ; Mahadevan Ramaswamy, Thermal arched beam microelectromechanical structure.
    상세보기
  51. Dhuler Vijayakumar R. ; Wood Robert L. ; Mahadevan Ramaswamy, Thermal arched beam microelectromechanical valve.
    상세보기
  52. Noda, Takafumi; Takizawa, Jun, Thermal detector, thermal detection device, and electronic instrument.
    상세보기
  53. Dries Michael F. ; Roisen Roger L., Thermally isolated integrated circuit.
    상세보기
  54. Wojciechowski, Kenneth; Olsson, Roy H.; Clews, Peggy J.; Bauer, Todd, Thermally-isolated silicon-based integrated circuits and related methods.
    상세보기
  55. Liu Chien-Chang ; Mastrangelo Carlos H., Uncooled infrared focal plane imager and microelectromechanical infrared detector for use therein.
    상세보기
  56. Verhaverbeke Steven ; McConnell Christopher F. ; Trissel Charles F., Wet processing methods for the manufacture of electronic components using sequential chemical processing.
    상세보기

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