초록 ▼

An improved method for isolating electrical conductors which are positioned over each other is disclosed. These conductors would normally contact each other because of the somewhat imprecise patterning and etching steps used to fabricate a multitude of conductive elements, e.g., in a very dense semi

An improved method for isolating electrical conductors which are positioned over each other is disclosed. These conductors would normally contact each other because of the somewhat imprecise patterning and etching steps used to fabricate a multitude of conductive elements, e.g., in a very dense semiconductor structure. The method involves forming a recess in the upper surface of the lower conductor, and then at least partially filling the recess with an oxide-type material. This method is particularly valuable in the construction of stacked capacitor cells. Cells prepared using this technique also form part of this invention.

대표청구항 ▼

A method for electrically isolating a first lower conductor disposed in an insulating region from a first upper conductor disposed over at least a portion of the first lower conductor having an upper surface wherein a second lower conductor is disposed in the insulating region and electrically isola

A method for electrically isolating a first lower conductor disposed in an insulating region from a first upper conductor disposed over at least a portion of the first lower conductor having an upper surface wherein a second lower conductor is disposed in the insulating region and electrically isolated from the first lower conductor; and a second upper conductor is disposed over at least a portion of the second lower conductor, and electrically connected thereto, said method comprising the step of forming a recess in the upper surface of the first lower conductor that is self-aligned to the subsequently-formed first upper conductor, said recess being at least partially filled with an insulator, thereby electrically isolating the first lower conductor from the first upper conductor.