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Gas sensor and manufacturing method of the same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-027/26
출원번호 US-0337065 (1994-11-10)
우선권정보 KR-0023897 (1993-11-11); KR-0005132 (1994-03-15)
발명자 / 주소
  • Park Hyeon S. (Seoul KRX) Lee Kyu C. (Shungcheongbuk-do KRX) Kwon Chul H. (Chungcheongbuk-do KRX) Yun Dong H. (Chungcheongbuk-do KRX) Shin Hyun W. (Chungcheongbuk-do KRX) Hong Hyung K. (Chungcheongbu
출원인 / 주소
  • Goldstar Electron Co., Ltd. (Chungcheongbuk-do KRX 03)
인용정보 피인용 횟수 : 45  인용 특허 : 0

초록

A thin-film gas sensor and manufacturing method of the same is disclosed which includes a silicon substrate; an insulating layer formed on the surface of the silicon substrate; a heater formed in zigzag on the surface of said insulating layer; a temperature sensor formed in zigzag on the surface of

대표청구항

A thin-film gas sensor comprising: a silicon substrate; an insulating layer formed on a surface of said silicon substrate; a heater of a plurality of lines in zigzag on a first region of a surface of said insulating layer, each of said lines being connected to adjacent lines; a temperature sensor fo

이 특허를 인용한 특허 (45)

  1. Dimeo, Jr., Frank; Chen, Philip S. H.; Neuner, Jeffrey W.; Welch, James; Stawasz, Michele; Baum, Thomas H.; King, Mackenzie E.; Chen, Ing-Shin; Roeder, Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
  2. Dimeo, Jr.,Frank; Chen,Philip S. H.; Neuner,Jeffrey W.; Welch,James; Stawacz,Michele; Baum,Thomas H.; King,Mackenzie E.; Chen,Ing Shin; Roeder,Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
  3. Kobayashi Masafumi,JPX ; Kazuta Mayumi,JPX, Apparatus for measuring quantity of hydrogen.
  4. Melker,Richard J.; Hayes,Ronald L.; Wang,Ka Wang Kevin; Dennis,Donn Michael, Application of nanotechnology and sensor technologies for ex-vivo diagnostics.
  5. Bischof, Michael; Kessler, Burkhard; Moos, Ralf; Mueller, Ralf; Mueller, Willi; Plog, Carsten, Arrangement of a heating layer for a high-temperature gas sensor.
  6. Ricco Antonio J. ; Hughes Robert C. ; Smith James H. ; Moreno Daniel J. ; Manginell Ronald P. ; Senturia Stephen D. ; Huber Robert J., Calorimetric gas sensor.
  7. Dobrokhotov, Vladimir; Larin, Alexander, Doped, metal oxide-based chemical sensors.
  8. Kiesele, Herbert; Mett, Frank; Tschuncky, Peter, Electrochemical gas sensor with diamond electrode.
  9. Betsill, Harry Edwards, Gas sensitive apparatus.
  10. Biskupski, Diana; Fleischer, Maximilian; Moos, Ralf; Schönauer, Daniela; Wiesner, Kerstin, Gas sensor.
  11. Meixner Hans,DEX ; Kornely Susanne,DEX ; Hahn Dieter,DEX ; Leiderer Hermann,DEX ; Lemire Bertrand,DEX ; Hacker Birgitta,DEX, Gas sensor.
  12. Park Hyeon Soo,KRX ; Shin Hyun Woo,KRX ; Kwon Chul Han,KRX ; Hong Hyung Ki,KRX ; Yun Dong Hyun,KRX ; Lee Kyuchung,KRX ; Kim Sung Tae,KRX, Gas sensor and method for fabricating same.
  13. Smith, Peter; Blake, Jane; Cavanagh, Leon; Speer, Raymond, Gas sensor materials and methods for preparation thereof.
  14. Buehler Martin, Gas sensor test chip.
  15. Buehler, Martin, Gas sensor test chip.
  16. Buehler Martin, Gas sensor test chip sensing method.
  17. Iovdalsky Viktor Anatolievich,RUX ; Olikhov Igor Mikhailovich,RUX ; Bleivas Ilya Markovich,RUX ; Ipolitov Vladimir Mikhailovich,RUX, Hybrid integrated circuit for a gas sensor.
  18. Shankar, Ravi; Le Neel, Olivier; Loh, Tien-Choy; Kam, Shian-Yeu, Integrated SMO gas sensor module.
  19. Lampotang, Samsun; Melker, Richard J.; Silverman, David N., Marker detection method and apparatus to monitor drug compliance.
  20. Melker,Richard J.; Gold,Mark, Method and apparatus for detecting environmental smoke exposure.
  21. Melker,Richard J.; Bjoraker,David G., Method and apparatus for monitoring intravenous (IV) drug concentration using exhaled breath.
  22. Melker,Richard J., Method and apparatus for monitoring respiratory gases during anesthesia.
  23. Joodaki, Mojtaba, Method for producing a conductor path on a substrate, and a component having a conductor path fabricated in accordance with such a method.
  24. Jung, Sung-ouk; Jung, Myung-sup; Lee, Soo-suk, Method of manufacturing gas sensor.
  25. Smith, Peter; Blake, Jane; Cavanagh, Leon; Speer, Raymond, Methods and materials for forming gas sensor structures.
  26. Martin, John R.; Roberts, Carl M., Methods for packaging and sealing an integrated circuit die.
  27. Schnee, Vincent P., Multi-dimensional cross-reactive array for chemical sensing.
  28. Takao Yasumasa,JPX ; Awano Masanobu,JPX ; Sando Mutsuo,JPX, Multilayered gas sensor.
  29. Takao Yasumasa,JPX ; Awano Masanobu,JPX ; Sando Mutsuo,JPX, Multilayered gas sensor.
  30. Wohltjen, Henry, Personnel location and monitoring system and method for enclosed facilities.
  31. Tice,Lee D., Portable combustible gas detector.
  32. Williams David Edward,GBX ; Moseley Patrick Timothy ; McGeehin Peter,GBX, Resistive gas sensing, especially for detection of ozone.
  33. Starling,Jared; Khadkikar,Prasad S.; Sterken,Robert; Volz,Charles L.; Blok,Edward J.; Donnelly,Donald E., Robust chemiresistor sensor.
  34. Lewis Nathan S. ; Freund Michael S., Sensor arrays for detecting analytes in fluids.
  35. Lewis Nathan S. ; Freund Michael S., Sensor arrays for detecting microorganisms.
  36. Koh Seok Keun,KRX ; Jung Hyung Jin,KRX ; Song Seok Kyun,KRX ; Choi Won Kook,KRX ; Choi Dongsoo,KRX ; Jeon Jin Seok,KRX, Sensor having tin oxide thin film for detecting methane gas and propane gas, and process for manufacturing thereof.
  37. Cole, Barrett E.; Higashi, Robert E.; Tobias, Peter, Sensor temperature sensing device.
  38. Lewis Nathan S. ; Severin Erik, Sensors for detecting analytes in fluids.
  39. Lewis Nathan S. ; Severin Erik, Sensors for detecting analytes in fluids.
  40. Lewis Nathan S. ; Severin Erik, Sensors for detecting analytes in fluids.
  41. Melker, Richard J.; Bjoraker, David G.; Lampotang, Samsun, System and method for monitoring health using exhaled breath.
  42. Speer, Raymond; Cavanagh, Leon; Smith, Peter; Pavelka, John, Systems and methods for packaging integrated circuit gas sensor systems.
  43. Feder, Jan; Beyerle, Rick; Byers, Stephen; Jones, Thomas, Thermal control of a DUT using a thermal control substrate.
  44. Feder,Jan; Beyerle,Rick; Byers,Stephen; Jones,Thomas, Thermal control of a DUT using a thermal control substrate.
  45. Salter, Carlton; Pendergrass, Robert, Thin film gas sensor configuration.
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