초록 ▼

A system is provided for batch loading semiconductor wafers into a load lock from a portable carrier used for supporting a plurality of the wafers in spaced relationship and transporting them in a particle free environment. The carrier is supported adjacent a load lock chamber which also has a parti

A system is provided for batch loading semiconductor wafers into a load lock from a portable carrier used for supporting a plurality of the wafers in spaced relationship and transporting them in a particle free environment. The carrier is supported adjacent a load lock chamber which also has a particle free environment. Wafers are retrieved from the carrier and then held in the load lock chamber for subsequent transport, one at a time, into an adjacent transport chamber for delivery to a specified one of a plurality of processing stations. A mini-environment sealingly isolates the load lock chamber and the interior of the carrier from the surrounding atmosphere. Mechanisms are provided for individually moving a carrier door and a load lock door between closed, sealed, positions and open positions, then as a unit to a parked position remote from the region between the carrier and the load lock chamber.

대표청구항 ▼

In combination with a system for batch loading semiconductor wafers including a portable carrier for supporting and transporting in a substantially particle free environment a plurality of the wafers in spaced generally stacked relationship, said carrier having a carrier port for providing access to

In combination with a system for batch loading semiconductor wafers including a portable carrier for supporting and transporting in a substantially particle free environment a plurality of the wafers in spaced generally stacked relationship, said carrier having a carrier port for providing access to the interior thereof, said system including a load lock defining a chamber therein having a substantially particle free environment and including a load lock port opening into the load lock chamber, and an isolation housing for sealingly isolating the load lock chamber and the interior of the carrier from the surrounding atmosphere, a communication access assembly comprising: a carrier door on said carrier movable between a closed position overlying said carrier port for sealing the interior of said carrier from the surrounding atmosphere and an open position spaced from said carrier port; a load lock door on said load lock movable between a closed position overlying said load lock port for sealing the load lock chamber from the surrounding atmosphere and an open position spaced therefrom; a carrier door drive mechanism on said load lock door for moving said carrier door between the closed and open positions; said isolation housing having an aperture generally aligned with said load lock port but spaced therefrom and including a platform for supporting said carrier thereon such that said carrier port is proximate the aperture in said isolation housing; and seal means between said isolation housing and said carrier and encompassing said carrier port and the aperture in said isolation housing for isolating the interior of said carrier when said carrier is supported on said platform, the interior of said isolation housing and the load lock chamber from the surrounding atmosphere.