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A vacuum process apparatus includes a convey chamber having a plurality of loading/unloading ports and an airtight structure kept in a vacuum when a target object is conveyed, at least one preliminary vacuum chamber connected to the convey chamber through a loading/unloading port, a plurality of vac

A vacuum process apparatus includes a convey chamber having a plurality of loading/unloading ports and an airtight structure kept in a vacuum when a target object is conveyed, at least one preliminary vacuum chamber connected to the convey chamber through a loading/unloading port, a plurality of vacuum process chambers connected to the convey chamber through the loading/unloading ports and each having a vacuum process mechanism, a plurality of gate valves for opening/closing the plurality of loading/unloading ports, and a multi-joint arm member, arranged in the convey chamber, for conveying the target object between the convey chamber and the vacuum process chambers, and between the convey chamber and the preliminary chamber. The convey chamber is evacuated through a bearing for a pivot shaft of the multi-joint arm member.

대표청구항 ▼

A vacuum process apparatus comprising: a convey chamber having a plurality of loading/unloading ports and an airtight structure kept in a vacuum when a target object is conveyed; at least one preliminary vacuum chamber connected to said convey chamber through one of said plurality of loading/unloadi

A vacuum process apparatus comprising: a convey chamber having a plurality of loading/unloading ports and an airtight structure kept in a vacuum when a target object is conveyed; at least one preliminary vacuum chamber connected to said convey chamber through one of said plurality of loading/unloading ports; a plurality of vacuum process chambers each connected to said convey chamber through a respective one of said plurality of loading/unloading ports and each having a vacuum process mechanism; a plurality of opening/closing means for opening/closing said plurality of loading/unloading ports; convey means, arranged in said convey chamber and having a multi-joint arm member, for conveying the target object between said convey chamber and said vacuum process chambers, and between said convey chamber and said preliminary chamber; a plurality of first support frames for independently supporting said plurality of vacuum process chambers; a second support frame, arranged independently of said first support frames, for supporting said convey chamber; and a base on which said first support frames and said second support frame are mounted.