IPC분류정보
| 국가/구분 |
United States(US) Patent
등록
|
| 국제특허분류(IPC7판) |
|
| 출원번호 |
US-0369127
(1995-01-05)
|
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발명자
/ 주소 |
- Wakalopulos George (Pacific Palisades CA)
|
| 출원인 / 주소 |
- American International Technologies, Inc. (Torrance CA 02)
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| 인용정보 |
피인용 횟수 :
82 인용 특허 :
12 |
초록
▼
A vacuum tube electron beam device having a thin, single crystal, electron permeable, gas impermeable membrane for electron transmission and methods for making such a device. Single crystal membranes can have small thickness due to high strength, are highly transmissive to free electrons due to that
A vacuum tube electron beam device having a thin, single crystal, electron permeable, gas impermeable membrane for electron transmission and methods for making such a device. Single crystal membranes can have small thickness due to high strength, are highly transmissive to free electrons due to that small thickness. The ordered crystalline structure of such membranes provides minimal obstructions to electron beams, and yet is highly impermeable to penetration by gas and liquid molecules. Single crystals are anisotropically etched to precise membrane dimensions, and can also be etched to provide microchannel structures for flowing cooling fluid across the membrane during use. A doped silicon anode can provide support for the membrane with matching thermal expansion characteristics, and a crystalline anode can be integral with the membrane. A double membrane embodiment confines the cooling fluid so that it passes close to both membranes. A double membrane structure can also have a pressure between the membranes that is between the pressure within the vacuum tube and ambient pressure outside the vacuum tube, allowing the membranes to be thinner. The membrane can also be compressed for increased strength. A number of cooling methods are used to maintain the integrity of the membrane.
대표청구항
▼
An electron beam device comprising, a body formed from gas impermeable material and defining a chamber having an aperture disposed at one end, a crystalline substrate positioned on said body to cover said aperture, said crystalline substrate attached to said body forming a fluid-tight seal therewith
An electron beam device comprising, a body formed from gas impermeable material and defining a chamber having an aperture disposed at one end, a crystalline substrate positioned on said body to cover said aperture, said crystalline substrate attached to said body forming a fluid-tight seal therewith, with said body forming a generally vacuous chamber, said crystalline substrate including a thin, electron permeable, gas impermeable, single crystal membrane, disposed adjacent to said aperture, said membrane having first and second opposed major surfaces, means, distally positioned with respect to said membrane, for generating electrons within said chamber, means, in electrical communication with said generating means, for accelerating said electrons toward said membrane. An electron beam device comprising, a vacuum tube body having a front end and a back end, with a crystalline anode disposed near said front end, said crystalline anode including an electron permeable, gas impermeable crystalline membrane, said membrane having first and second major surfaces oriented transversely to said thickness, said first major surface facing said back end, means for generating electrons within said body near said back end, and an acceleration means, in electrical communication with said electrons, for accelerating said electrons toward said membrane, said accelerating means including an electrode, disposed distal to said front end, said electrode being adapted to maintain a cathode disposed distal to said membrane and held at an electrical potential more negative than said crystalline anode.
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