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[미국특허] Conveying system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-065/00
출원번호 US-0702800 (1996-08-26)
우선권정보 JP-0126828 (1994-05-17)
발명자 / 주소
  • Murata Masanao (Ise JPX) Yamashita Teppei (Ise JPX) Tanaka Tsuyoshi (Ise JPX) Morita Teruya (Ise JPX) Oyobe Hiroyuki (Ise JPX)
출원인 / 주소
  • Shinko Electric Co., Ltd. (Tokyo JPX 03)
인용정보 피인용 횟수 : 45  인용 특허 : 7

초록

A conveying system provides a cassette accommodating workpieces; a container containing the cassette; a transferring device for conveying the cassette while supporting it or conveying the container which is empty or contains the cassette while supporting it, the transferring device having a supporti

대표청구항

In a conveying system comprising: a cassette arranged to accommodate a workpiece; a container arranged to contain said cassette; container transferring means for transferring a container to a position in a sealed area where a cassette can be loaded or unloaded into or from the container and for tran

이 특허에 인용된 특허 (7) 인용/피인용 타임라인 분석

  1. Murata Masanao (Ise JPX) Tanaka Tsuyoshi (Ise JPX) Morita Teruya (Ise JPX) Kawano Hitoshi (Ise JPX), Automatic transferring system using portable closed container.
  2. Flint Alan (San Diego County CA) Nguyen Quy (Santa Clara County CA) Jacobs William G. (Santa Clara County CA), Disc loading and unloading assembly.
  3. Davis Cecil J. (Greenville TX) Matthews Robert (Plano TX) Bowling Robert A. (Garland TX), Integrated circuit processing system.
  4. Tullis Barclay J. (Palo Alto CA) Parikh Mihir (San Jose CA) Thrasher David L. (Menlo Park CA) Johnston Mark E. (Saratoga CA), Particle-free dockable interface for integrated circuit processing.
  5. Maccaferri Angelo (Bologna ITX), Robot device for loading and unloading spools in wire winding machine.
  6. Harada Hiroshi (Tokyo JPX) Iwasawa Yoshiyuki (Tokyo JPX) Ishida Tsutomu (Tokyo JPX) Kobayashi Shintaro (Tokyo JPX), Semiconductor processing system.
  7. Bacchi Paul E. (Novato CA) Robalino Manuel J. (San Francisco CA) Filipski Paul S. (Greenbrae CA), Specimen carrier platform and scanning assembly.

이 특허를 인용한 특허 (45) 인용/피인용 타임라인 분석

  1. Sato Akira,JPX, Apparatus and method of automatically removing a wafer carrier from a container.
  2. Nulman, Jaim; Sidi, Nissim, Apparatus for storing and moving a cassette.
  3. Nulman, Jaim; Sidi, Nissim, Apparatus for storing and moving a cassette.
  4. Nulman,Jaim; Sidi,Nissim, Apparatus for storing and moving a cassette.
  5. Perlov Ilya ; Gantvarg Evgueni ; Belitsky Victor, Apparatus for storing and moving a cassette.
  6. Perlov, Ilya; Gantvarg, Evgueni; Belitsky, Victor, Apparatus for storing and moving a cassette.
  7. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
  8. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
  9. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
  10. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
  11. Keiichi Ando JP, Automatic storage unit and automatic storing method.
  12. Fukushima Masazumi,JPX ; Shiwaku Tamotsu,JPX, Automatic warehouse.
  13. Rice,Michael R.; Englhardt,Eric A.; Lowrance,Robert B.; Elliott,Martin R.; Hudgens,Jeffrey C.; Van Katwyk,Kirk; Puri,Amit, Calibration of high speed loader to substrate transport system.
  14. Bonora, Anthony C.; Fosnight, William J.; Shenk, Joshua W., Cassette buffering within a minienvironment.
  15. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
  16. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
  17. Marohl Dan, Compact apparatus and method for storing and loading semiconductor wafer carriers.
  18. Yamashita, Seishi, Device for temporarily loading, storing and unloading a container.
  19. Schultz Klaus,DEX ; Weisbach Volker,DEX ; Gey Bernd,DEX ; Mages Andreas,DEX, Device for the transfer of an object between at least two locations.
  20. Aggarwal, Ravinder K., Docking cart with integrated load port.
  21. Bachrach Robert Z., Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers.
  22. Ito, Kenji, Hanging conveyance equipment and learning system therefor.
  23. Sakata, Kazunari; Mochizuki, Shinya; Akimoto, Motoki; Motono, Hiroshi, Heat treatment system and method therefore.
  24. Anthony C. Bonora ; Richard H. Gould ; Michael Brain ; David V. Adams, Integrated intra-bay transfer, storage, and delivery system.
  25. Fosnight William J., Integrated intrabay buffer, delivery, and stocker system.
  26. Sackett, James G.; Weldon, David E.; Anderson, H. Alexander, Local store for a wafer processing station.
  27. Morimoto Toru,JPX, Method and apparatus for controlling substrate processing apparatus.
  28. Elliott, Martin R.; Rice, Michael R.; Lowrance, Robert B.; Hudgens, Jeffrey C.; Englhardt, Eric A., Method and apparatus for supplying substrates to a processing tool.
  29. Bonora Anthony C. ; Neads Michael A. ; Oen Joshua T., Method and apparatus for vertical transfer of a semiconductor wafer cassette.
  30. Mochizuki, Shinya; Akimoto, Motoki, Method of object transfer for a heat treatment system.
  31. Lowrance, Robert B.; Englhardt, Eric Andrew; Rice, Michael R.; Shah, Vinay; Koshti, Sushant S.; Hudgens, Jeffrey C., Methods and apparatus for a band to band transfer module.
  32. Murata, Masanao; Morita, Teruya; Kawano, Hitoshi, Overhead conveyance device and overhead conveyance vehicle.
  33. Masanao Murata JP; Teruya Morita JP; Hitoshi Kawano JP, Overhead conveying device and overhead conveying vehicle.
  34. Monti, Giuseppe, Packing apparatus in a sterile environment with a loading and supply system of articles.
  35. Bonora, Anthony C.; Martin, Raymond S.; Netsch, Robert; Oen, Joshua T.; Mosier, Terry; Fosnight, William J., SMIF pod storage, delivery and retrieval system.
  36. Sato Akira,JPX, Semiconductor wafer accommodating jig.
  37. Akira Sato JP, Semiconductor wafer accommodating jig, handling method and production system.
  38. Hwang, Gui Jin; Jeong, Yeon Kyu; Kim, Young Woo, Stocker for receiving cassettes and method of teaching a stocker robot disposed therein.
  39. Kimura, Yoshio; Ueda, Issei; Matsushita, Mitiaki; Ito, Kazuhiko, Substrate processing apparatus and substrate processing method.
  40. Yoshio Kimura JP; Issei Ueda JP; Mitiaki Matsushita JP; Kazuhiko Ito JP, Substrate processing apparatus and substrate processing method.
  41. Benzing, David W.; Luebker, Christopher A., Wafer boat and boat holder.
  42. Zinger, Jan; De Ridder, Christianus G. M., Wafer handling system.
  43. Zinger,Jan; De Ridder,Christianus G. M., Wafer handling system.
  44. Hirata, Yasunari; Hirakawa, Takenori; Yamamoto, Akemichi, Work conveying system.
  45. Babbs, Daniel J.; Fosnight, William J.; Cosentino, Tim; Sammut, Mark; Pinna, Pascal; Zemen, Russell, Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers.

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