초록 ▼

A hard-carbon-film-coated substrate includes in stacked sequence a substrate, an intermediate layer, and a hard carbon film. The substrate consists of a metal or an alloy mainly composed of Ni or Al, or stainless steel. The intermediate layer is mainly composed of Ru, Si, Ge or carbon, or is a mixed

A hard-carbon-film-coated substrate includes in stacked sequence a substrate, an intermediate layer, and a hard carbon film. The substrate consists of a metal or an alloy mainly composed of Ni or Al, or stainless steel. The intermediate layer is mainly composed of Ru, Si, Ge or carbon, or is a mixed layer including Ru, Si, or Ge mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness. An apparatus for forming the coated substrate especially includes means for forming the intermediate layer and means for forming the hard carbon film in the same vacuum chamber.

대표청구항 ▼

A hard-carbon-film coated substrate comprising: a substrate that consists of stainless steel or of a metal or alloy at least mainly composed of Ni or Al; an intermediate layer arranged on said substrate that comprises Ru and at least one element selected from carbon, nitrogen and oxygen and that has

A hard-carbon-film coated substrate comprising: a substrate that consists of stainless steel or of a metal or alloy at least mainly composed of Ni or Al; an intermediate layer arranged on said substrate that comprises Ru and at least one element selected from carbon, nitrogen and oxygen and that has a compositional gradient across its thickness; and a predominantly amorphous hard carbon film arranged on said intermediate layer; wherein said compositional gradient comprises a predominant proportion of Ru at a side of said intermediate layer adjacent said substrate and a predominant proportion of said at least one element selected from carbon, nitrogen and oxygen at a side of said intermediate layer adjacent said hard carbon film.