초록 ▼

An electrostatically controlled cantilever apparatus for continuous tuning of the resonance wavelength of a Fabry-Perot cavity is disclosed. A resonant cavity is formed between two distributed Bragg reflector (DBR) mirrors. The top reflector is composed of a movable top DBR supported in a freely sus

An electrostatically controlled cantilever apparatus for continuous tuning of the resonance wavelength of a Fabry-Perot cavity is disclosed. A resonant cavity is formed between two distributed Bragg reflector (DBR) mirrors. The top reflector is composed of a movable top DBR supported in a freely suspended cantilever, a variable-thickness air spacer layer and a fixed DBR. The bottom reflector is fixed on the substrate. By applying a tuning voltage to create electrostatic attraction, the cantilever may be deflected towards the substrate, thereby changing the thickness of the air spacer layer and consequently the resonant wavelength of the Fabry-Perot cavity.

대표청구항 ▼

A cantilever apparatus for tuning a resonance wavelength of a Fabry-Perot cavity, said Fabry-Perot cavity comprising a bottom reflecting means and a top reflecting means, said cantilever apparatus comprising: a) an electrically responsive substrate; b) a support block positioned on said electrically

A cantilever apparatus for tuning a resonance wavelength of a Fabry-Perot cavity, said Fabry-Perot cavity comprising a bottom reflecting means and a top reflecting means, said cantilever apparatus comprising: a) an electrically responsive substrate; b) a support block positioned on said electrically responsive substrate; c) a cantilever structure comprising a base section resting on said support block, a deformable section extending above said electrically responsive substrate and creating an air gap between said deformable section and said electrically responsive substrate, and an active head positioned at a predetermined location on said deformable section and comprising at least a portion of said top reflecting means; d) an electrical tuning contact disposed on said cantilever structure for applying a first tuning voltage Vt1 to produce a vertical electrostatic force Fd between said electrical tuning contact and said electrically responsive substrate, thereby altering the size of said air gap and tuning said resonant wavelength.