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Method of forming a boron-doped diamond film by chemical vapor deposition 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-003/06
  • C23C-016/30
출원번호 US-0415646 (1995-04-03)
발명자 / 주소
  • Chen Chia-Fu (Hsinchu TWX) Chen Sheng-Hsiung (Taichung Hsien TWX) Hong Tsao-Ming (Changhua Hsien TWX)
출원인 / 주소
  • National Science Council (Taipei TWX 03)
인용정보 피인용 횟수 : 44  인용 특허 : 0

초록

A method of forming boron-doped diamond film by, chemical vapor deposition (CVD) utilizing two-component system reactant gas doped with trimethyl borate.

대표청구항

A method of fabricating boron doped diamond film on a substrate, comprising the following steps: (a) providing a two-component system reactant gas, wherein the two-component system reactant gas is a gas selected from the group consisting of CxHy-CO2,and CxHyOz-CO2, and said gas is doped with trimeth

이 특허를 인용한 특허 (44)

  1. Scarsbrook,Geoffrey Alan; Martineau,Philip Maurice; Twitchen,Daniel James; Whitehead,Andrew John; Cooper,Michael Andrew; Dorn,B?rbel Susanne Charlotte, Boron doped diamond.
  2. Linares, Robert C.; Doering, Patrick J., Boron doped single crystal diamond electrochemical synthesis electrode.
  3. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method.
  4. Veerasamy, Vijayen S., Coated article with DLC inclusive layer(s) having increased hydrogen content at surface area.
  5. Collins John Lloyd,GBX, Diamond.
  6. Noguchi,Hitoshi; Kubota,Yoshihiro, Diamond film and method for producing the same.
  7. Yokota Yoshihiro,JPX ; Tachibana Takeshi,JPX ; Miyata Koichi,JPX ; Kobashi Koji,JPX, Diamond films and methods for manufacturing diamond films.
  8. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  9. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  10. Veerasamy, Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  11. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Hydrophobic coating including DLC and/or FAS on substrate.
  12. Veerasamy Vijayen S., Hydrophobic coating including DLC on substrate.
  13. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
  14. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
  15. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo, Hydrophobic coating with DLC & FAS on substrate.
  16. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Low-E coating system including protective DLC.
  17. Wang, Sea-Fue; Pu, Jui-Chen; Lin, Chia-Lun; Hsu, Fu-Ting; Hsu, Kai-Hung; Wu, Yu-Chuan; Wang, Shea-Jue; Sung, Chien-Min; Hu, Shao-Chung; Kan, Ming-Chi, Method for production of diamond-like carbon film having semiconducting property.
  18. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of depositing DLC inclusive coating on substrate.
  19. Veerasamy, Vijayen S.; Thomsen, Scott V., Method of depositing DLC on substrate.
  20. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of deposition DLC inclusive layer(s) using hydrocarbon and/or siloxane gas(es).
  21. Linares,Robert C.; Doering,Patrick J., Method of forming an N-type doped single crystal diamond.
  22. Linares, Robert C.; Doering, Patrick J., Method of growing single crystal diamond in a plasma reactor.
  23. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of ion beam milling a glass substrate prior to depositing a coating system thereon, and corresponding system for carrying out the same.
  24. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon.
  25. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of making a coated article including DLC and FAS.
  26. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Method of making coated article including DLC inclusive layer over low-E coating.
  27. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of making coated article including diamond-like carbon (DLC) and FAS.
  28. Veerasamy, Vijayen S., Method of making coated article including layer(s) of diamond-like carbon which may be hydrophobic.
  29. Veerasamy, Vijayen S., Method of making coating article including carbon coating on glass.
  30. Veerasamy,Vijayen S., Method of making heat treatable coated article with diamond-like carbon (DLC) inclusive layer.
  31. Veerasamy, Vijayen S., Method of making heat treatable coated article with protective layer.
  32. Vijayen S. Veerasamy, Method of making hydrophobic coated article.
  33. Koeck, Franz A. M.; Nemanich, Robert J., Phosphorus doped diamond electrode with tunable low work function for emitter and collector applications.
  34. Koeck, Franz A.; Chowdhury, Srabanti; Nemanich, Robert J, Phosphorus incorporation for n-type doping of diamond with (100) and related surface orientation.
  35. Vijayen S. Veerasamy, Process for depositing DLC inclusive coating with surface roughness on substrate.
  36. Doering, Patrick J.; Linares, Robert C.; Novak, Alicia E.; Abrahams, John M.; Murray, Michael, Single crystal diamond electrochemical electrode.
  37. Linares, Robert C.; Doering, Patrick J, Single crystal diamond having C, C, and phosphorous.
  38. Linares,Robert C.; Doering,Patrick J., Single crystal diamond tool.
  39. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Solar management coating system including protective DLC.
  40. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Solar management coating system including protective DLC.
  41. Linares, Robert C.; Doering, Patrick J., System and method for producing synthetic diamond.
  42. Linares,Robert C.; Doering,Patrick J., System and method for producing synthetic diamond.
  43. Linares, Robert C.; Doering, Patrick J., Tunable CVD diamond structures.
  44. Tanabe Keiichiro,JPX ; Seki Yuichiro,JPX ; Ikegaya Akihiko,JPX ; Fujimori Naoji,JPX ; Tsuno Takashi,JPX, Wafer and method of producing same.
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