초록 ▼

A confocal optical apparatus comprising a light source, a first aperture portion for passing light emitted from the light source and obtaining a point source, an objective lens for causing the light that has passed through the first aperture portion to converge on a measurement object, a second aper

A confocal optical apparatus comprising a light source, a first aperture portion for passing light emitted from the light source and obtaining a point source, an objective lens for causing the light that has passed through the first aperture portion to converge on a measurement object, a second aperture portion located on a plane conjugate with the convergence surface on the measurement object, and light detectors for detecting light that has passed through the second aperture portion, wherein placing the first and second aperture portions in the same position and using them as the same aperture portion, as well as positioning the detection surfaces of the light detectors substantially on the same surfaces as the conjointly used identical aperture portions make it possible to reduce the size and weight of the apparatus, to perform three-dimensional shape measurements rapidly and accurately, and to facilitate the alignment of each portion.

대표청구항 ▼

A confocal optical apparatus comprising: a surface light ray generating means for generating surface light rays; an aperture array comprising a plurality of apertures for light passage arranged in two dimensions, for passing therethrough the surface light rays from the surface light ray generating m

A confocal optical apparatus comprising: a surface light ray generating means for generating surface light rays; an aperture array comprising a plurality of apertures for light passage arranged in two dimensions, for passing therethrough the surface light rays from the surface light ray generating means; an optical element for receiving light that has passed through the aperture array and acting as a half-mirror and a diffraction grating; a lens array positioned close to the optical element and comprising a plurality of two-dimensionally arranged lenses for condensing zero-order light from the optical element; a pinhole array comprising a plurality of two-dimensionally arranged pinholes for passing light condensed by each of the lenses of the lens array; and a condensing means for condensing the light that has passed through each pinhole and projecting the light onto a measurement object, and for causing the light scattered on the measurement object to converge toward each pinhole, wherein the optical element directs toward the lens array first-order diffracted light of the light reintroduced via each of the pinholes and the lens array; and wherein the confocal optical apparatus further comprises: a light detector array comprising a plurality of two-dimensionally arranged light detectors for receiving the first-order diffracted light condensed by each of the lenses of the lens array; movement control means for moving in the direction of the optical axis at least some of the surface light ray generating means, aperture array, optical element, lens array, pinhole array, condensing means, and light detector array; and a three-dimensional distance measuring means for measuring the measurement object in three dimensions based on the output of each light detector in accordance with the movement control of the movement control means.