초록 ▼

A SMIF system for transferring semiconductor wafers between two controlled environments, one being within a wafer cassette carrier and the other being within an enclosure around a wafer processing apparatus. In a carrier loading position, a carrier door rests on a port door which forms part of a pla

A SMIF system for transferring semiconductor wafers between two controlled environments, one being within a wafer cassette carrier and the other being within an enclosure around a wafer processing apparatus. In a carrier loading position, a carrier door rests on a port door which forms part of a platform for vertically fixing and horizontally moving the cassette within the enclosure. A carrier cover, when unlocked from the carrier door, is engageable by a port plate for vertical movement therewith as an elevator mechanism moves the port plate between down and up positions. In the down position, the port door closes an enclosure opening defined by the port plate. In the up position, the port plate raises the carrier cover to allow access to the wafers in the cassette by an article processing apparatus. External and internal panels carried by the port plate cause the controlled environment of the enclosure to be extended to include a compartment containing the uncovered cassette. The cassette platform also rotates to position the cassette relative to the article processing apparatus.

대표청구항 ▼

A transfer system for transferring articles between two controlled environments, said system comprising: an article carrier defining a first controlled environment and having a cover and a door for closing an opening in the bottom of said cover; a holder for supporting at least one article on said c

A transfer system for transferring articles between two controlled environments, said system comprising: an article carrier defining a first controlled environment and having a cover and a door for closing an opening in the bottom of said cover; a holder for supporting at least one article on said carrier door; an enclosure defining a second controlled environment around an apparatus for processing said article; a port door for closing a port opening in said enclosure defined by a movable port member, said port door forming at least part of a platform for supporting said carrier door and said article holder within said enclosure, said movable port member being adapted to engage said carrier cover to cause its vertical movement; and, lift means for vertically moving said port member between a down position in which said port door closes said port opening and an up position in which said port member vertically raises said carrier cover to allow access to said article holder by the article processing apparatus.