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Plasma gun apparatus for forming dense, uniform coatings on large substrates 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/00
출원번호 US-0292399 (1994-08-18)
발명자 / 주소
  • Muehlberger Erich (San Clemente CA)
출원인 / 주소
  • Sulzer Metco AG (Wohlen CHX 03)
인용정보 피인용 횟수 : 33  인용 특허 : 19

초록

A plasma system forms a dense, uniform coating of metallic oxide or other material on a relatively large substrate of metal foil or other composition located a substantial distance from the plasma gun so that the plasma stream covers the entire width of the substrate. A large pressure differential b

대표청구항

A plasma gun comprising the combination of: an elongated body having an elongated slot therein forming a nozzle, the elongated slot extending out of the body from a hollow interior therein; means for introducing an arc gas into the hollow interior of the body so that the arc gas flows out of the elo

이 특허에 인용된 특허 (19)

  1. Knowles Steven C. (Seattle WA) Kull Alan E. (Seattle WA) Butler George W. (Seattle WA) King David O. (Woodinville WA), Apparatus for synthesizing diamond films utilizing an arc plasma.
  2. Schuster Frdric (Saint Germain En Laye FRX) Piet Grard (Bezons FRX), Device for the continuous coating of a metallic material in motion with a polymer deposition having a composition gradie.
  3. Suzuki Shigeo (Hirakata JPX) Nojima Takashi (Katano JPX) Kurokawa Hideo (Katano JPX), Heat-plasma-jet generator capable of conducting plasma spray or heat-plasma CVD coating in a relatively wide area.
  4. Muehlberger Stephan E. (San Clemente CA), High temperature plasma gun assembly.
  5. Khler Gnter A. (Stillwater MN) Kirk Seth M. (Minneapolis MN) Follett Gary J. (St. Paul MN), Jet plasma process and apparatus.
  6. Sugimoto Hisashi (Aichi JPX) Watanabe Goro (Aichi JPX), Method and apparatus for generating an ultra low current plasma arc.
  7. Kurihara Kazuaki (Kawasaki JPX) Sasaki Kenichi (Kawasaki JPX) Itani Tsukasa (Kawasaki JPX) Kawarada Motonobu (Kawasaki JPX), Method for producing diamond by a DC plasma jet.
  8. Mitani Tsutomu (Akashi) Nakaue Hirokazu (Higashiosaka) Kurokawa Hideo (Katano JPX), Method of and apparatus for synthesizing diamondlike thin film.
  9. Muehlberger Erich (San Clemente CA), Method of and apparatus providing oxide reduction in a plasma environment.
  10. Lang Martin H. (Sassenheim NLX), Plasma flux spraying method of treating the surface of a substrate, for example, and apparatus for implementing the meth.
  11. Muehlberger Stephan E. (San Clemente CA), Plasma gun having improved anode cooling system.
  12. Kawarada Motonobu (Sagamihara JPX) Kurihara Kazuaki (Atsugi JPX) Sasaki Ken-ichi (Atsugi JPX) Teshima Akitomo (Isehara JPX) Koshino Nagaaki (Yokohama JPX), Plasma jet CVD apparatus for forming diamond films.
  13. Oishi Konosuke (Mito JPX) Koga Masataka (Katsuta JPX) Yamashita Hiromi (Katsuta JPX) Iino Takashi (Katsuta JPX) Okumoto Toyoharu (Katsuta JPX) Nishitarumizu Tsuyoshi (Katsuta JPX), Plasma mass spectrometer.
  14. Beason ; Jr. George P. (Arab AL) McKechnie Timothy N. (Huntsville AL) Power Christopher A. (Guntersville AL), Plasma spray nozzle with low overspray and collimated flow.
  15. Tsantrizos Peter G. (Ville St-Pierre CAX) Mavropoulos Lakis T. (Montreal CAX) Maher Boulos (Sherbrooke CAX) Jurewicz Jerzy (Sherbrooke CAX) Henshaw Bruce (Rigaud CAX) Lachance Raynald (Pincourt CAX) , Reactive spray forming process.
  16. Nakatani Kenji (Hino JPX) Okaniwa Hiroshi (Hachioji JPX) Yano Mitsuaki (Osaka JPX), Reactor for depositing a layer on a moving substrate.
  17. Muehlberger Erich (San Clemente CA) Kremith Roland D. (Newport Beach CA), System and method for plasma coating.
  18. Gruner Heiko (Beinwiel am See CHX), Vacuum plasma coating apparatus.
  19. Ahola Tom (Klaukkala FIX) Ahola Kari (Klaukkala FIX), Welding assembly for feeding powdered filler material into a torch.

이 특허를 인용한 특허 (33)

  1. Suslov, Nikolay, Cathode assembly and method for pulsed plasma generation.
  2. Andre Anders, Constricted glow discharge plasma source.
  3. Yang, Barry Lee-Mean, Fluid injector for and method of prolonged delivery and distribution of reagents into plasma.
  4. Zehavi, Raanan, Hybrid nozzle for plasma spraying silicon.
  5. Yamazaki, Shunpei, Method for manufacturing display device.
  6. Yamazaki, Shunpei, Method for producing semiconductor device and display device.
  7. Yamazaki,Shunpei; Hosoya,Kunio, Method of manufacturing a display device using droplet emitting means.
  8. Yamazaki, Shunpei, Method of manufacturing semiconductor device and display device utilizing solution ejector.
  9. Storm, Roger S.; Shapovalov, Vladimir; Withers, James C.; Loutfy, Raouf, Method of using a thermal plasma to produce a functionally graded composite surface layer on metals.
  10. Suslov, Nikolay, Methods of sealing vessels using plasma.
  11. Lee, Sang Hun; Kim, Jay Joongsoo, Microwave plasma nozzle with enhanced plume stability and heating efficiency.
  12. Forrest, Stephen R.; McGraw, Gregory, Nozzle geometry for organic vapor jet printing.
  13. Haack, Larry P.; Straccia, Ann Marie, Plasma coatings and method of making the same.
  14. Haack, Larry P.; Straccia, Ann Marie, Plasma coatings and method of making the same.
  15. Okamoto Tetsuya,JPX, Plasma film forming apparatus that prevents substantial irradiation damage to the substrate.
  16. Matsuuchi, Hidetaka; Iwasaki, Ryuichi; Mankawa, Hirofumi; Masuda, Shigeru; Hayashi, Hirofumi; Mike, Masaaki, Plasma generation apparatus and work processing apparatus.
  17. Fornsel, Peter; Buske, Christian, Plasma nozzle.
  18. Okumura, Tomohiro; Kawaura, Hiroshi; Yukimoto, Tetsuya, Plasma processing apparatus.
  19. Okumura, Tomohiro; Kawaura, Hiroshi; Yukimoto, Tetsuya, Plasma processing apparatus.
  20. Suslov, Nikolay, Plasma-generating device having a plasma chamber.
  21. Suslov, Nikolay, Plasma-generating device having a throttling portion.
  22. Suslov, Nikolay; Rubiner, Igor, Plasma-generating device, plasma surgical device and use of a plasma surgical device.
  23. Suslov, Nikolay; Rubiner, Igor, Plasma-generating device, plasma surgical device and use of a plasma surgical device.
  24. Suslov, Nikolay, Plasma-generating device, plasma surgical device and use of plasma surgical device.
  25. Suslov, Nikolay, Plasma-generating device, plasma surgical device, use of a plasma-generating device and method of generating a plasma.
  26. Suslov, Nikolay, Pulsed plasma device and method for generating pulsed plasma.
  27. Suslov, Nikolay, Pulsed plasma device and method for generating pulsed plasma.
  28. Gottscho, Richard; Dhindsa, Rajinder; Srinivasan, Mukund, Small plasma chamber systems and methods.
  29. Dobashi, Kazuya; Inai, Kensuke; Shimizu, Akitaka; Yasuda, Kenta; Yoshino, Yu; Aida, Toshihiro; Senoo, Takehiko, Substrate cleaning apparatus and vacuum processing system.
  30. Molz, Ronald J.; Leach, James, Symmetrical multi-port powder injection ring.
  31. Refke, Arno; Barbezat, Gerard; Doesburg, Jacobus Cornelis, Thermal spraying material, a thermally sprayed coating, a thermal spraying method and also a thermally coated workpiece.
  32. Refke, Arno; Barbezat, Gerard; Doesburg, Jacobus Cornelis, Thermal spraying material, a thermally sprayed coating, a thermal spraying method and also a thermally coated workpiece.
  33. Suslov, Nikolay, Volumetrically oscillating plasma flows.
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