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System for interconnecting stacked integrated circuits 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-023/02
출원번호 US-0462876 (1995-06-05)
발명자 / 주소
  • Gaul Stephen Joseph (Melbourne FL)
출원인 / 주소
  • Harris Corporation (Palm Bay FL 02)
인용정보 피인용 횟수 : 250  인용 특허 : 0

초록

A surface mountable integrated circuit and a method of manufacture are disclosed. A wafer 110 has a die with an integrated circuit 119 in one surface of the wafer. A via 130 extends to the opposite surface. the via has a sidewall oxide 131 and is filled with a conductive material such as metal or do

대표청구항

A system of interconnected dies comprising: two or more dies of semiconductor material, each die with first and second surfaces and with integrated circuits formed on the first surface of each die; at least one electrical via in each die, each electrical via comprising a first open end on the first

이 특허를 인용한 특허 (250)

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