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Semiconductor device with improved bond pads 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-023/48
출원번호 US-0577911 (1995-12-21)
발명자 / 주소
  • Langley Rodney C. (Boise ID)
출원인 / 주소
  • Micron Technology, Inc. (Boise ID 02)
인용정보 피인용 횟수 : 80  인용 특허 : 3

초록

A semiconductor device with improved bond pads. The semiconductor device includes bond pads electrically connected to an active circuit in the device and openings formed in the bonding surface of the bond pads. The opening(s) may include recesses extending partially into the bonding surface or chann

대표청구항

A semiconductor device having an improved bond pad, the semiconductor device comprising: a. a bond pad electrically connected to an active circuit in the semiconductor device; b. a substantially flat bonding surface on the bond pad; and c. an opening extending partially into the bonding surface.

이 특허에 인용된 특허 (3)

  1. McClure Kevin E. (Kokomo IN) Douglas Thomas P. (Kokomo IN) Houk Larry W. (Kokomo IN), Bond pad having a patterned bonding surface.
  2. Baker Thomas R. (Tempe AZ) Anderson George F. (Tempe AZ), Bonding pad for semiconductor devices.
  3. Heim Dorothy A. (San Jose CA), Composite bond pads for semiconductor devices.

이 특허를 인용한 특허 (80)

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  6. Haba, Belgacem; Honer, Kenneth Allen; Tuckerman, David B.; Oganesian, Vage, Chips having rear contacts connected by through vias to front contacts.
  7. Oganesian, Vage; Haba, Belgacem; Mohammed, Ilyas; Savalia, Piyush; Mitchell, Craig, Compliant interconnects in wafers.
  8. Oganesian, Vage; Haba, Belgacem; Mohammed, Ilyas; Savalia, Piyush; Mitchell, Craig, Compliant interconnects in wafers.
  9. Oganesian, Vage; Haba, Belgacem; Mohammed, Ilyas; Savalia, Piyush; Mitchell, Craig, Compliant interconnects in wafers.
  10. Haba, Belgacem, Conductive pads defined by embedded traces.
  11. Haba, Belgacem, Conductive pads defined by embedded traces.
  12. Zhang, Leilei, Contact pad and method of forming a contact pad for an integrated circuit.
  13. Yamamoto, Koji; Kumamoto, Nobuhisa; Matsumoto, Muneyuki, Damascene interconnection and semiconductor device.
  14. Yamamoto,Koji; Kumamoto,Nobuhisa; Matsumoto,Muneyuki, Damascene interconnection and semiconductor device.
  15. Akram Salman ; Farnworth Warren M. ; Wood Alan G., High density flip chip memory arrays.
  16. Akram, Salman; Farnworth, Warren M.; Wood, Alan G., High density flip chip memory arrays.
  17. Adkisson,James W.; Gambino,Jeffrey P.; Jaffe,Mark D.; Rassel,Richard J.; Sprogis,Edmund J., High surface area aluminum bond pad for through-wafer connections to an electronic package.
  18. Shen, Wen-Wei; Chen, Chen-Shien; Kuo, Chen-Cheng; Chen, Ming-Fa; Wang, Rung-De, Improving the strength of micro-bump joints.
  19. Antol, Joze Eura; Osenbach, John William; Weachock, Ronald James, Integrated circuit package including wire bonds.
  20. Do, Byung Tai; Shim, Il Kwon; Chow, Seng Guan, Integrated circuit packaging system for fine pitch substrates.
  21. Do, Byung Tai; Shim, Il Kwon; Chow, Seng Guan, Integrated circuit packaging system substrates and method of manufacture thereof.
  22. Gregory J. Smith, Integrated circuit with fuse element and contact pad.
  23. Teng Kuo-Shi,TWX ; Yung Hao-Chieh,TWX ; Chiang Shing-Shing,TWX ; Lu Wen-Haw,TWX, Method and structure for preventing bonding pads from peeling caused by plug process.
  24. Yiu Ho-Yin,TWX ; Wu Lin-June,TWX ; Chen Bor-Cheng,TWX ; Horng J. H.,TWX, Method for fabricating a stress buffered bond pad.
  25. Jeng-Jie Peng TW; Ming-Dou Ker TW; Nien-Ming Wang TW, Method for improving integrated circuits bonding firmness.
  26. Peng, Jeng-Jie; Ker, Ming-Dou; Wang, Nien-Ming, Method for improving integrated circuits bonding firmness.
  27. Lin, Po Chun, Method for manufacturing a semiconductor structure.
  28. Hoier, Magdalena; Scherl, Peter; Schneegans, Manfred, Method of forming a bondpad and bondpad.
  29. Chen,Sheng Hsiung, Method of improving copper pad adhesion.
  30. Akram, Salman; Farnworth, Warren M.; Wood, Alan G., Methods of a high density flip chip memory arrays.
  31. Oganesian, Vage; Haba, Belgacem; Mitchell, Craig; Mohammed, Ilyas; Savalia, Piyush, Methods of forming semiconductor elements using micro-abrasive particle stream.
  32. Dias,Rajen; Chandran,Biju, Microelectronic device interconnects.
  33. Oganesian, Vage; Mohammed, Ilyas; Mitchell, Craig; Haba, Belgacem; Savalia, Piyush, Microelectronic elements having metallic pads overlying vias.
  34. Oganesian, Vage; Haba, Belgacem; Mohammed, Ilyas; Mitchell, Craig; Savalia, Piyush, Microelectronic elements with rear contacts connected with via first or via middle structures.
  35. Oganesian, Vage; Haba, Belgacem; Mohammed, Ilyas; Mitchell, Craig; Savalia, Piyush, Multi-function and shielded 3D interconnects.
  36. Oganesian, Vage; Haba, Belgacem; Mohammed, Ilyas; Mitchell, Craig; Savalia, Piyush, Multi-function and shielded 3D interconnects.
  37. Oganesian, Vage; Haba, Belgacem; Mohammed, Ilyas; Mitchell, Craig; Savalia, Piyush, Multi-function and shielded 3D interconnects.
  38. Yu, Chen-Hua; Lii, Mirng-Ji; Chen, Chen-Shien; Tseng, Yu-Jen, Package having substrate with embedded metal trace overlapped by landing pad.
  39. Grinman, Andrey; Ovrutsky, David; Rosenstein, Charles; Haba, Belgacem; Oganesian, Vage, Packaged semiconductor chips.
  40. Grinman, Andrey; Ovrutsky, David; Rosenstein, Charles; Oganesian, Vage, Packaged semiconductor chips with array.
  41. Grinman, Andrey; Ovrutsky, David; Rosenstein, Charles; Oganesian, Vage, Packaged semiconductor chips with array.
  42. Grinman, Andrey; Ovrutsky, David; Rosenstein, Charles; Oganesian, Vage, Packaged semiconductor chips with array.
  43. Grinman, Andrey; Ovrutsky, David; Rosenstein, Charles; Oganesian, Vage, Packaged semiconductor chips with array.
  44. Hunter, Stevan G.; Rasmussen, Bryce A.; Ruud, Troy L., Pad over interconnect pad structure design.
  45. Fitzsimmons,John A.; Gambino,Jeffrey P.; Walton,Erick G., Roughened bonding pad and bonding wire surfaces for low pressure wire bonding.
  46. Tilly Lars,SEX, Semiconductive chip having a bond pad located on an active device.
  47. Tilly,Lars, Semiconductive chip having a bond pad located on an active device.
  48. Kanzaki, Teruaki; Deguchi, Yoshinori; Miki, Kazunobu, Semiconductor device.
  49. Kanzaki, Teruaki; Deguchi, Yoshinori; Miki, Kazunobu, Semiconductor device.
  50. Shindo, Akinori, Semiconductor device and method of manufacturing a semiconductor device.
  51. Minakshisundaran Balasubramanian Anand JP, Semiconductor device and method of manufacturing the same.
  52. Minakshisundaran Balasubramanian Anand JP, Semiconductor device and method of manufacturing the same.
  53. Kimura, Noriyuki; Kadoi, Kiyoaki, Semiconductor device having a bump electrode.
  54. Anand, Minakshisundaran Balasubramanian, Semiconductor device having a plurality of conductive layers.
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  56. Lee, Hun Teak; Kim, Jong Kook; Kim, ChulSik; Jang, Ki Youn, Semiconductor package system with fine pitch lead fingers and method of manufacturing thereof.
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  63. Oganesian, Vage; Haba, Belgacem; Mohammed, Ilyas; Mitchell, Craig; Savalia, Piyush, Stacked microelectronic assembly with TSVS formed in stages and carrier above chip.
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  69. Oganesian, Vage; Haba, Belgacem; Mohammed, Ilyas; Mitchell, Craig; Savalia, Piyush, Staged via formation from both sides of chip.
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  72. Shen, Wen-Wei; Chen, Chen-Shien; Kuo, Chen-Cheng; Chen, Ming-Fa; Wang, Rung-De, Strength of micro-bump joints.
  73. Yiu Ho-Yin,HKX ; Wu Lin-June,TWX ; Chen Bor-Cheng,TWX ; Horng Jan-Her,TWX, Stress buffered bond pad and method of making.
  74. Saran Mukul ; Martin Charles A., System and method for reinforcing a bond pad.
  75. Lee, Hun-Teak; Kim, Jong-Kook; Kim, Chul-Sik; Jang, Ki-Youn; Pendse, Rajendra D., Wire bond interconnection.
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  79. Pendse, Rajendra D.; Han, Byung Joon; Lee, Hun Teak, Wire bonding structure and method that eliminates special wire bondable finish and reduces bonding pitch on substrates.
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