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A process for depositing silicon carbide layers to produce highly pure silicon carbide having a stoichiometric composition and a theoretical density includes feeding a gas mixture to a heated substrate under specified conditions, separating the decomposition products into gas and liquid phases by co

A process for depositing silicon carbide layers to produce highly pure silicon carbide having a stoichiometric composition and a theoretical density includes feeding a gas mixture to a heated substrate under specified conditions, separating the decomposition products into gas and liquid phases by condensation, rectifying the liquid phase and recycling recovered materials, cooling the gas phase and recovering a solid deposit, and compressing and recycling hydrogen.

대표청구항 ▼

A process for producing silicon carbide layers by deposition from a gas phase, comprising feeding a gas-vapor mixture of methyl trichlorosilane and hydrogen into a reactor and decomposing the mixture on a heated substrate to form a silicon carbide layer on said substrate and decomposition products,

A process for producing silicon carbide layers by deposition from a gas phase, comprising feeding a gas-vapor mixture of methyl trichlorosilane and hydrogen into a reactor and decomposing the mixture on a heated substrate to form a silicon carbide layer on said substrate and decomposition products, according to which process: the gas-vapor mixture is fed to the reactor at a rate of 3-4 g/cm2.hr and a methyl trichlorosilane to hydrogen molar ratio of 1:1-3 to said substrate heated to a temperature of from 1200°to 1250°C., the decomposition products from the gas-vapor mixture are withdrawn from the reactor, separated into a gas phase containing hydrogen chloride, methane, and hydrogen and a liquid phase by condensation at a temperature of from 0°to -120°C., the liquid phase is rectified, methyl trichlorosilane and dimethyldicholosilane resulting from the rectification are recovered and recycled to the reactor, the gas phase is cooled to a temperature of from -185°to -196°C. and the hydrogen chloride and the methane are recovered as a solid deposit, and the hydrogen is compressed and recycled to the reactor.