초록 ▼

Fused silica boules (19) having improved homogeneity are produced by causing the boule (19) to flow radially during its formation to achieve local mixing between portions of the boule which may have experienced different laydown conditions. The mixing is achieved by one or a combination of: (1) use

Fused silica boules (19) having improved homogeneity are produced by causing the boule (19) to flow radially during its formation to achieve local mixing between portions of the boule which may have experienced different laydown conditions. The mixing is achieved by one or a combination of: (1) use of a containment vessel (13) having a gently sloping containment wall (22); (2) use of a containment vessel (13) whose inner radius (rv) is substantially larger than the outermost radius (rb) of the burners (14) used to produce the boule (19); and/or (3) maintaining the boule (19) at a sufficiently high temperature during laydown so that radial flow is achieved with a minimum head height of glass. Large blanks having high homogeneity can be made from such boules, e.g., blanks having diameters above 200 millimeters and D-6.

대표청구항

A fused silica blank which has a homogeneity which is less than or equal to 0.25×10-6 for a blank size greater than or equal to 125 millimeters.

A fused silica blank which has a homogeneity which is less than or equal to 0.25×10-6 for a blank size greater than or equal to 125 millimeters.