[특허]Substrate processing method and substrate processing apparatus

[미국특허] Substrate processing method and substrate processing apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-021/68
출원번호	US-0667712 (1996-06-21)
우선권정보	JP-0183539 (1995-06-27); JP-0183540 (1995-06-27)
발명자 / 주소	Harada Junji (Kumamoto JPX) Harada Ichiro (Kumamoto JPX) Nakamura Koji (Kumamoto JPX)
출원인 / 주소	Tokyo Electron Limited (Tokyo JPX 03)
인용정보	피인용 횟수 : 132 인용 특허 : 0

초록 ▼

According to the present invention, a substrate processing method has (a) the step of predetermining initial conditions for cassettes and substrates before processing is started, (b) the step of setting the cassettes in which the substrates are stored, in the loading/unloading section on the basis of the initial conditions, (c) the step of detecting the states of the cassettes set in the loading/unloading section and checking, on the basis of the detection results, whether the cassettes are set in the states set in the step (a), (d) the step of displaying the states of the cassettes when it is determined in the step (c) that the state of at least one cassette is not the state set in the step (a), (e) the step of resetting the cassette in the state set in the step (a) on the basis of the display in the step (d), (f) the step of detecting the substrates which are present in the cassettes set in the loading/unloading section and obtaining mapping data on the basis of the detection results, (g) the step of selecting a substrate from the cassettes in the loading/unloading section on the basis of the mapping data and the initial conditions, (h) the step of extracting the selected substrate from the cassettes, conveying the substrate to a processing section, and processing the substrate according to the initial conditions, and (i) the step of storing the processed substrate in a cassette set in the loading/unloading section.

대표청구항 ▼

A substrate processing apparatus in which substrates are extracted from a supply cassette of a loading/unloading section, the extracted substrates are loaded in a processing section and sequentially processed, the processed substrates are stored in a recovery cassette of said loading/unloading section, comprising: means for predetermining initial conditions of cassettes and substrates before processing is started; said loading/unloading section having a placing table on which the supply and recovery cassettes are placed; a processing section having a plurality of processing units for processing the substrates; means for setting the supply and recovery cassettes in said loading/unloading section on the basis of the initial conditions; a substrate transferring device for extracting substrates from the cassettes set in said loading/unloading section and conveying the substrates to said processing section; a first sensor for detecting the substrates which are present in the cassettes set in said loading/unloading section; means for forming mapping data of the substrates in the cassettes on the basis of the detection results from said first sensor and storing the mapping data; control means for calling the mapping data from said data storing means and controlling said substrate transferring device on the basis of the mapping data and the initial conditions; a second sensor for detecting the states of the supply and recovery cassettes set in said loading/unloading section; and display means for detecting the states of the cassettes detected by said second sensor, characterized in that said control means causes said setting means to reset the supply and recovery cassettes on the placing table according to the initial states when the states of the cassettes detected by said second sensor do not satisfy the initial conditions.

이 특허를 인용한 특허 (132) 인용/피인용 타임라인 분석

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
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안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

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[미국특허] Substrate processing method and substrate processing apparatus 원문보기

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