[특허]Broad spectrum ultraviolet catadioptric imaging system

[미국특허] Broad spectrum ultraviolet catadioptric imaging system 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G02B-013/14 G02B-017/00 G02B-001/00 G02B-021/16
출원번호	US-0681528 (1996-07-22)
발명자 / 주소	Shafer David R. Chuang Yung-Ho Tsai Bin-Ming B.
출원인 / 주소	KLA Instruments Corporation
대리인 / 주소	Schneck
인용정보	피인용 횟수 : 126 인용 특허 : 13

초록 ▼

An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 .mu.m), comprises a focusing lens group with multiple lens elements that provide high levels of correction of both image aberrations and chromatic variation of aberrations over a selected wavelength band, a field lens group formed from lens elements with at least two different refractive materials, such as silica and a fluoride glass, and a catadioptric group including a concave reflective surface providing most of the focusing power of the system and a thick lens providing primary color correction in combination with the focusing lens group. The field lens group is located near the intermediate image provided by the focusing lens group and functions to correct the residual chromatic aberrations. The system is characterized by a high numerical aperture (typ. greater than 0.7) and a large flat field (with a size on the order of 0.5 mm). The broad band color correction allows a wide range of possible UV imaging applications at multiple wavelengths.

대표청구항 ▼

[ We claim:] [1.] A broad-band deep-ultraviolet achromatic catadioptric imaging system, comprising:a focusing lens group including a plurality of lens elements, all formed from a single refractive material with refractive surfaces thereof disposed at first predetermined positions along an optical path of the system and having curvatures and said positions selected to focus ultraviolet light at an intermediate image within the system, and simultaneously to also provide in combination with the rest of the system, high levels of correction of both image aberrations and chromatic variation of aberrations over a wavelength band including at least 0.20-0.29 .mu.m,a field lens group with a net positive power disposed along said optical path proximate to said intermediate image, the field lens group including a plurality of lens elements formed from at least two different refractive materials with different dispersions, with refractive surfaces of the lens elements of the field lens group disposed at second predetermined positions and having curvatures selected to provide correction of chromatic aberrations including at least secondary lateral color of the system over said wavelength band,a catadioptric group including a first optical element having at least a concave reflective surface with a central optical aperture therein disposed along said optical path proximate to said intermediate image so that ultraviolet light from the intermediate image can pass therethrough, the catadioptric group also including a second optical element which is a lens with a reflective mirror coating on a rear surface of said lens except for a central area on said rear surface where said mirror coating is absent, the optical elements of said catadioptric group being arranged such that ultraviolet light from the intermediate image transmitted through said central optical aperture of said first optical element of said catadioptric group passes through the lens portion of said second optical element of said catadioptric group, reflects from said reflective mirror coating on said lens rear surface, passes back through said lens portion towards said concave reflective surface of said first optical element, is reflected thereby and passes a third time through said lens portion of said second optical element and through said central area of said lens rear surface to form a final image beyond said catadioptric group.

이 특허에 인용된 특허 (13) 인용/피인용 타임라인 분석

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Tsai Bin-ming B. (Santa Clara CA) Babian Fred E. (Boulder Creek CA), Method and apparatus for detecting defects in repeated microminiature patterns.
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Shafer David R. (Fairfield CT), Monocentric optical systems.
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Foo Leslie D. (San Jose CA), Multiple mirror catadioptric optical system.
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Shafer David (Fairfield CT) Powell Ian (Gloucester CAX), Optical projection system including a refractive lens assembly having a gap between constituent lenses.
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Friedman Irwin (Weston CT), Single mirror projection optical system.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

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[미국특허] Broad spectrum ultraviolet catadioptric imaging system 원문보기

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