초록 ▼

HDI fabrication techniques are employed to form a variety of optical waveguide structures in polymer materials. Adaptive optical connections are formed, taking into account the actual position and orientation of devices which may deviate from the ideal. Structures include solid light-conducting stru

HDI fabrication techniques are employed to form a variety of optical waveguide structures in polymer materials. Adaptive optical connections are formed, taking into account the actual position and orientation of devices which may deviate from the ideal. Structures include solid light-conducting structures, hollow light-conducting structures which are also suitable for conducting cooling fluid, and optical switching devices employing liquid crystal material. A "shrink back" method may be used to form a tunnel in polymer material which is then filled with an uncured polymer material that shrinks upon curing.

대표청구항 ▼

[ What is claimed is:] [1.] An adaptive method for making an optical coupling to an electro-optical device on a substrate and electrically connected in a high density interconnect structure including at least one layer of polymer dielectric material bonded to a major surface of the electro-optical d

[ What is claimed is:] [1.] An adaptive method for making an optical coupling to an electro-optical device on a substrate and electrically connected in a high density interconnect structure including at least one layer of polymer dielectric material bonded to a major surface of the electro-optical device and a metallization layer over the layer of polymer dielectric electrically connected through a via in the polymer dielectric layer to a contact pad on the electro-optical device, said device being situated within predetermined tolerances from an ideal position and orientation on the substrate, the method comprising the steps of:determining the actual position and orientation of the device on the substrate; andadaptively forming an optical waveguide optically coupled to the device, the optical waveguide being formed along a route adapted as required for a proper optical coupling to the device in its actual position and orientation.