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"" 따옴표 내의 구문과 완전히 일치하는 문서만 검색 예) "Transform and Quantization"

특허 상세정보

Solid state temperature controlled substrate holder

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) H05K-007/20   
미국특허분류(USC) 361/704 ; 165/011.1 ; 34/092 ; 437/248
출원번호 US-0623713 (1996-03-29)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Burns, Doane, Swecker & Mathis, L.L.P.
인용정보 피인용 횟수 : 54  인용 특허 : 13
초록

A substrate resting on a substrate surface is inserted into a processing chamber and processed to produce integrated chips. The substrate may be clamped electrostatically to the substrate support surface during processing. The substrate support surface plays a major role in controlling the temperature of the substrate during processing. The substrate support includes a plurality of thermoelectric modules in heat transfer contact with the substrate support surface and a controlled current supply. By controlling the current supply to each of these modules,...

대표
청구항

[ What is claimed is:] [1.] In a semiconductor processing system for processing a substrate in a a vacuum processing chamber, a temperature controlled substrate support comprising:a plurality of thermoelectric modules in heat transfer contact with a substrate support surface enclosed in the vacuum processing chamber; anda current supply interface, connected to said plurality of thermoelectric modules, for applying controlled currents to said thermoelectric modules to control the temperature of the substrate support surface and to provide a desired temper...

이 특허에 인용된 특허 (13)

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이 특허를 인용한 특허 피인용횟수: 54

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