[특허]Laser having improved beam quality and reduced operating cost

[미국특허] Laser having improved beam quality and reduced operating cost 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01S-030/45
출원번호	US-0583302 (1996-01-05)
발명자 / 주소	Watson Tom A. Partlo William N. Larson Donald G. Fomenkov Igor V. de Ruyter Anthony J. Das Palash P.
출원인 / 주소	Cymer, Inc.
대리인 / 주소	Holland
인용정보	피인용 횟수 : 20 인용 특허 : 20

초록 ▼

Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.

대표청구항 ▼

[ We claim:] [1.] A laser comprisinga) a discharge chamber for generating a laser beam;b) a lasing gas within said discharge chamber;c) a temperature sensor positioned to read the temperature of said lasing gas and thermally optimized by utilizing materials having a small thermal time constant, to generate a real-time temperature signal indicative of the lasing gas temperature; andd) a heat exchange system positioned to add heat to or remove heat from the lasing gas, wherein the heat exchange system comprises a heat exchanger whose rate of heat exchange is continuously variable in response to the temperature signal, and the rate of heat exchange is adjusted in response to a real-time temperature signal from the temperature sensor.

이 특허에 인용된 특허 (20) 인용/피인용 타임라인 분석

Allen, Peter N.; Blake, William, Active pressure regulator for a gas laser.
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Ito Noritoshi (Hiratsuka JPX) Amada Yoshiho (Hiratsuka JPX) Wakabayashi Osamu (Hiratsuka JPX), Apparatus for controlling output of an excimer laser device.
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Ota Kazuo (Kanagawa JPX), Apparatus including a laser scanner.
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Gilbert ; Kendall E. ; Johnson ; Daniel ; Macier ; Robert Raymond, Combustion monitor.
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Akins Robert P. (San Diego CA) Larson Donald G. (San Diego CA) Sengupta Uday K. (Del Mar CA) Sandstrom Richard L. (Encinitas CA), Compact excimer laser.
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Akins Robert P. (San Diego CA) Larson Donald G. (San Diego CA) Sengupta Uday K. (Del Mar CA) Sandstrom Richard L. (Encinitas CA), Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser.
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Bennett Donald (Portola Valley CA) Saunders Richard J. (San Jose CA), Distributive lasing system.
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Das Palash P. (Vista CA) Larson Donald G. (San Diego CA), Excimer laser.
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Kimura Mitsuteru (Miyagi JPX), Flow sensor.
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Gilbert Kendall E. (Schenectady NY) Johnson Daniel (Rexford NY) Macier Robert Raymond (Saratoga Springs NY), Gas turbine temperature sensor validation apparatus and method.
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Maeda Michinori (Yamanashi JPX) Egawa Akira (Yamanashi JPX), High-frequency discharge pumping laser device.
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Bowes Donald (Los Altos Hills CA) Allen Peter N. (Los Altos Hills CA) Blake William (Palo Alto CA), Laser.
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Sasnett Michael W. (Los Altos CA) Bowes Donald (Los Altos Hills CA) Saunders Richard J. (San Jose CA), Laser delivery system.
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Kovats Tibor F. I. (Ottawa CAX) Devenyi Tibor F. (Nepean CAX) Look Christopher M. (Nepean CAX), Light emitting device package having combined heater/cooler.
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Deki Kyoichi (Kakogawa JPX) Sugioka Shinji (Kakogawa JPX) Yoshioka Masaki (Izumi JPX) Hata Hiroshige (Himeji JPX), Metal vapor laser device stabilizing system.
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Larabell Henri J. (Cupertino CA) Davis Richard S. (Palo Alto CA), Modular enclosure apparatus.
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Iehisa Nobuaki (Minamitsuru JPX) Yamazaki Etsuo (Hachioji JPX), NC laser device.
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Allen Peter N. (Los Altos Hills CA) Blake William (Palo Alto CA), Power supply for a laser.
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Cook ; Jr. Benjamin H. (Livermore CA) Kolb William P. (Redwood City CA), Pressure regulation system for gas laser based on temperature of anode stem.
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Aagano Toshitaka (Kaisei JPX) Takasaki Yoshimi (Kaisei JPX), Temperature-controlled laser apparatus.
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이 특허를 인용한 특허 (20) 인용/피인용 타임라인 분석

Baumler, Juergen, Blower for gas laser.
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Camps Claramunt, Joan; Bravo Montero, Francesc; Vogler, Sven Alexander; Boira Plans, Valentí, Chamber for laser apparatus with extruded base frame.
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Thompson, Paul S., Compact ductless cooling with heat exchangers.
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Miyamoto,Yoshio; Yamaguchi,Tsutomu, Electronic digital pressure switch.
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Padmabandu Gamaralalage G. ; Das Palash P. ; Watson Tom A. ; Zambon Paolo, Energy efficient lithography laser.
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Ohmi Tadahiro,JPX ; Shirai Yasuyuki,JPX ; Sano Naoto,JPX, Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface.
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Ohmi Tadahiro,JPX ; Tanaka Nobuyoshi,JPX ; Hirayama Masaki,JPX, Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube.
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Ujazdowski Richard C. ; Shannon Robert A. ; Berger Dmitry ; Partlo William N. ; Watson Tom A. ; Thompson Paul S. ; Ishihara Toshihiko ; Tedesco ; II Carl E. ; Larson Donald G. ; Harrington Steven M. , Gas discharge laser with gas temperature control.
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Osmanow, Rustem; Rebhan, Ulrich, Gas discharge laser with means for removing gas impurities.
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Ohmi, Tadahiro; Osawa, Hiroshi; Tanaka, Nobuyoshi; Ino, Kazuhide; Shinohara, Toshikuni; Shirai, Yasuyuki; Hirayama, Masaki, Gas supply path structure for a gas laser.
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Partio William N. ; Larson Donald G. ; Fomenkov Igor V. ; de Ruyter Anthony J. ; Das Palash P., Laser having baffled enclosure.
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Kay Zimmerman DE; Ulrich Rebhan DE, Laser ventilation system.
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Nolan, John, Method and apparatus for cooling a self-contained laser head.
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Menino Pizarro, Xavier, Protective structure for tables and optical table comprising said protective structure.
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Ishihara Toshihiko ; Duffey Thomas P. ; Melchior John T. ; Besaucele Herve A. ; Morton Richard G. ; Ness Richard M. ; Newman Peter C. ; Partlo William N. ; Rothweil Daniel A. ; Sandstrom Richard L., Reliable, modular, production quality narrow-band high rep rate ArF excimer laser.
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Hofmann Thomas ; Howey James K. ; Shannon Robert A. ; Ujazdowski Richard C., Soldered fan assembly for electric discharge laser.
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Maeda, Katsumi; Iwasa, Shigeyuki; Nakano, Kaichiro; Hasegawa, Etsuo, Sulfonium salt compound, photoresist composition and method for patterning by employing same.
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Paetzel,Rainer, Temperature control systems for excimer lasers.
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Kato, Satoshi; Kobayashi, Hirokazu; Satou, Kazuo; Tanaka, Tsuneki; Horii, Takuto, Thermistor.
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Newman Peter C. ; Sandstrom Richard L., Wavelength system for an excimer laser.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Laser having improved beam quality and reduced operating cost 원문보기