초록 ▼

A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source and a filter to simulate a blackbody of a known temperature. An alignment tool aligns a light-emitting surface of the calibration instrument to the input of the temperature probe. The calibrat

A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source and a filter to simulate a blackbody of a known temperature. An alignment tool aligns a light-emitting surface of the calibration instrument to the input of the temperature probe. The calibration instrument may include a fiber optic bundle to transmit light from the light source to the light emitting surface.

대표청구항 ▼

[ What is claimed is:] [1.] An apparatus for calibrating a temperature probe for a thermal processing chamber, comprising:a) a light source optically coupled to a surface to emit light of a predetermined intensity through said surface during calibration;b) a filter positioned between said light sour

[ What is claimed is:] [1.] An apparatus for calibrating a temperature probe for a thermal processing chamber, comprising:a) a light source optically coupled to a surface to emit light of a predetermined intensity through said surface during calibration;b) a filter positioned between said light source and said surface to cause the radiation spectrum emitted from said surface over a predetermined wavelength range to more closely approximate the radiation spectrum of a black body of a predetermined temperature over said predetermined wavelength range; andc) an alignment mechanism for aligning said surface with an input end of said temperature probe. [10.] A method of calibrating a temperature probe that measures a temperature of a substrate for a thermal processing chamber, comprising:a) generating light of a stable intensity from a light source;b) directing said light to a surface to emit light of a predetermined intensity from said surface during calibration;c) filtering said light with a filter positioned between said light source and said surface to cause the radiation spectrum emitted from said surface over a predetermined wavelength range to more closely approximate the radiation spectrum of a black body of a predetermined temperature over said predetermined wavelength range; andc) aligning said surface with an input end of said temperature probe. An apparatus for calibrating a temperature probe for a thermal processing chamber, comprising:a) a light source optically coupled to an aperture to emit light of a predetermined intensity through said aperture during calibration;b) a filter positioned between said light source and said aperture to cause the radiation spectrum emitted from said aperture over a predetermined wavelength range to more closely approximate the radiation spectrum of a black body of a predetermined temperature over said predetermined wavelength range; andc) an alignment mechanism for aligning said aperture with an input end of said temperature probe.