초록 ▼

A degassing module mounted in an intermediate position of a delivery pipe includes a fluid passage formed of a gas-permeable film material. The fluid passage is enclosed in a gas-tight vacuum chamber. A degassing pipe is connected to the vacuum chamber. The degassing pipe has a switch valve for brea

A degassing module mounted in an intermediate position of a delivery pipe includes a fluid passage formed of a gas-permeable film material. The fluid passage is enclosed in a gas-tight vacuum chamber. A degassing pipe is connected to the vacuum chamber. The degassing pipe has a switch valve for breaking a communication between a sealed space in the vacuum chamber and a vacuum source, thereby forming a closed section including part of the degassing pipe and the sealed space in the vacuum chamber. A reduced quantity of solvent evaporates from a treating solution flowing through the fluid passage of the degassing module, and passes in the form of solvent vapor through the gas-permeable film material into the sealed space of the vacuum chamber. This minimizes change in the concentration and temperature of the treating solution flowing through the degassing module. The degassing pipe has a trap formed in an intermediate position thereof. A liquid level sensor detects the treating solution collected in a predetermined quantity in the trap. An alarm is given in response to a detection signal from the sensor. When the fluid passage of the degassing module is broken, the abnormality is detected reliably to avoid inconveniences due to a decrease in the degassing capability of the degassing module.

대표청구항 ▼

[ What is claimed is:] [1.] A treating solution supplying method for supplying a treating solution to an object under treatment, comprising the steps of: degassing said treating solution supplied through a delivery pipe by causing said treating solution to flow through a fluid passage in a degassing

[ What is claimed is:] [1.] A treating solution supplying method for supplying a treating solution to an object under treatment, comprising the steps of: degassing said treating solution supplied through a delivery pipe by causing said treating solution to flow through a fluid passage in a degassing module mounted in an intermediate position of said delivery pipe, said fluid passage being formed of a gas-permeable film material and having an inlet and an outlet communicating with each other, said fluid passage being enclosed in a gas-tight vacuum chamber defining a sealed space communicating with a vacuum source through a degassing pipe; and switching said degassing pipe between a state of placing said sealed space in communication with said vacuum source and a state of placing said sealed space out of communication with said vacuum source at predetermined times while said treating solution is supplied to said object under treatment.