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Integrated semiconductor optical devices and method of manufacture employing substrate having alignment groove 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G02B-006/36
출원번호 US-0730452 (1996-10-15)
우선권정보 JP-0065559 (1993-03-24)
발명자 / 주소
  • Tabuchi Haruhiko,JPX
출원인 / 주소
  • Fujitsu Limited, JPX
대리인 / 주소
    Staas & Halsey
인용정보 피인용 횟수 : 68  인용 특허 : 10

초록 ▼

A method of manufacturing an integrated semiconductor optical device comprises forming an optical fiber positioning groove of a main surface of a support substrate, flattening the main surface of the support substrate, positioning an optical component on the flatted main surface, again exposing the

대표청구항 ▼

[ I claim:] [1.] An integrated semiconductor optical device comprising:a support substrate having a main surface;a groove, which receives an optical fiber, the groove being formed on and extending along the main surface and from the main surface into the support substrate;a flat plate member having

이 특허에 인용된 특허 (10)

  1. Hauer Heiner (Fellbach DEX) Kuke Albrecht (Auenwald DEX), Arrangement for coupling optoelectronic components and optical waveguides to one another.
    상세보기
  2. Roberts Harold (Westboro MA), Bi-directional optical fiber coupler.
    상세보기
  3. Miller ; Stewart E. ; Ogawa ; Kinichiro, Coupling arrangements between a light-emitting diode and an optical fiber waveguide and between an optical fiber wavegu.
    상세보기
  4. Gaul Stephen J. (Melbourne FL) McLachlan Craig J. (Melbourne Beach FL), Integrated circuits including photo-optical devices and pressure transducers and method of fabrication.
    상세보기
  5. Rajasekharan K. (Lowell MA) Pazaris James O. (Concord MA) Michalka Timothy L. (Salem NH), Method and apparatus for coupling light between an optoelectronic device and a waveguide.
    상세보기
  6. Kuo Shun-Meen (Chandler AZ) Chun Christopher K. Y. (Gilbert AZ), Molded reflective optical waveguide.
    상세보기
  7. Zavracky Paul M. (Norwood MA) Zavracky Matthew M. (N. Attleboro MA) Fan John C. C. (Chestnut Hill MA) Salerno Jack P. (Waban MA), Monolithic integrated transceiver of III-V devices on silicon.
    상세보기
  8. Mikami Kazuo (Kyoto JPX) Watanabe Taro (Takatsuki JPX), Optical coupling device and method of producing same.
    상세보기
  9. Nishizawa Hideaki (Osaka JPX), Package for optical device.
    상세보기
  10. Tabasky Marvin (Peabody MA) Cataldo Victor (Wilmington MA) Fitzgerald Thomas W. (Framingham MA) Chirravuri Jagannath (Medfield MA) Armiento Craig A. (Acton MA) Haugsjaa Paul O. (Acton MA), Waferboard structure and method of fabricating.
    상세보기

이 특허를 인용한 특허 (68)

  1. Gardner, Daniel C.; Karaguleff, Chris; Jurbergs, David C., 2.times.2 integrated fiber array optical switch and method of operation.
    상세보기
  2. Sutherland, James Scott, Angle-cleaved optical fibers and methods of making and using same.
    상세보기
  3. Gruenwald Werner,DEX ; Benz Gerhard,DEX ; Mayer Klaus-Michael,DEX ; Seibold Annette,DEX, Arrangement for converting optical signals into electrical signals and method of producing the arrangement.
    상세보기
  4. Irwin Scott A. ; Rupp John A., Blind-mate fiber optic connector with integral optoelectronic receiver circuits.
    상세보기
  5. Jurbergs, David C.; Karaguleff, Chris, Cascaded integrated fiber array optical switch and method of operation.
    상세보기
  6. DeMeritt, Jeffery Alan; Grzybowski, Richard Robert; Hemenway, Jr., Brewster Roe; Sutherland, James Scott, Channeled substrates for integrated optical devices employing optical fibers.
    상세보기
  7. Mehlhorn Torsten,DEX ; Birkholtz Peter,DEX ; Probster Walter,DEX, Circuit carrier with an optical layer and optoelectronic component.
    상세보기
  8. DeMeritt, Jeffery A.; Sutherland, James S., Coated optical fibers and related apparatuses, links, and methods for providing optical attenuation.
    상세보기
  9. Reedy, Ronald E.; Cable, James S.; Kuznia, Charles B.; Albares, Donald J.; Le, Tri Q., Coupled optical and optoelectronic devices, and method of making the same.
    상세보기
  10. Peng, Yihlih; Pinyan, James A., Coupling a light sensor array with an optical component.
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  12. Badehi, Avner; Rockman, Sylvie, Electro-optic integrated circuits and methods for the production thereof.
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  13. Badehi, Avner; Rockman, Sylvie, Electro-optical circuitry having integrated connector and methods for the production thereof.
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  15. Boutaghou,Zine Eddine; Riddering,Jason W.; Sannino,Anthony P., Extended alumina basecoat advanced air bearing slider.
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  17. Lee, Joon Ki; Kang, Sae-Kyoung; Huh, Joon Young, Hybrid optical coupling module having an alignment mark formed on an optical transmission means and an array lens and manufacturing method thereof.
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  19. David C. Jurbergs ; Chris Karaguleff ; Kenneth C. Noddings ; Robert O. Miller ; Daniel J. Mockler, Integrated fiber array optical switch and method of operation.
    상세보기
  20. Chris Karaguleff ; David C. Jurbergs, Integrated fiber array optical switch using double-pass propagation and method of operation.
    상세보기
  21. Feldman, Michael R.; Morris, James E., Integrated optical device including an optoelectronic element and a sealing substrate with an optical element having optical power thereon.
    상세보기
  22. Feldman, Michael R.; Harden, Brian; Kathman, Alan D.; Welch, W. Hudson, Integrated optical imaging systems including an interior space between opposing substrates and associated methods.
    상세보기
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    상세보기
  24. Williamson, III, Robert S.; Marsland, Robert A., Method & apparatus for packaging high frequency components.
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  26. Williamson III Robert S. ; Marsland Robert, Method and apparatus for optically aligning optical fibers with optical devices.
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  27. Brenner,Karl Heinz; Br？ning,Ulrich, Method and device for establishing an optical connection between an optoelectronic component and an optical waveguide.
    상세보기
  28. Franco Delpiano IT; Luca Pesando IT, Method of and a device for coupling optical fibers and opto-electronic components.
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  29. Murali, Venkatesan, Method of creating a photonic via using deposition.
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  30. Murali, Venkatesan, Method of creating a photonic via using fiber optic.
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  31. Murali,Venkatesan, Method of creating an angled waveguide using lithographic techniques.
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  32. Mizuta Satoru,JPX ; Nishimoto Hiroshi,JPX, Method of manufacturing an optical device with a groove accurately formed.
    상세보기
  33. Yoshihiko Okamoto JP; Masamichi Kobayashi JP; Satoshi Momose JP, Method of manufacturing photomask, photomask, and method of manufacturing semiconductor integrated circuit device.
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  34. Chen, Jingkuang; Kubby, Joel A.; Sun, Decai, Micro-opto-electro-mechanical system (MOEMS).
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  35. Huang,Lidu; Yokouchi,Kishio, Optical backplanes with integrated optical couplers and methods of making the same.
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  36. Yap,Daniel; Yung,Michael, Optical bond-wire interconnections and a method for fabrication thereof.
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  40. Wu, Mao-Jen; Lan, Hsiao-Chin; Lee, Yun-Chih; Chang, Chia-Chi; Hsiao, Hsu-Liang; Chen, Chin-Ta; Shen, Bo-Kuan; Lu, Guan-Fu; Chang, Yan-Chong; Chang, Jen-Yu, Optical coupler module having optical waveguide structure.
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