초록 ▼

A probe (10) is formed to provide a topographical and thermal image of a semiconductor device. The probe (10) is made from a first ribbon of material (11) and a second ribbon of material (12) which forms a thermocouple junction (13). A probe tip (15) is then attached to the thermocouple junction (13

A probe (10) is formed to provide a topographical and thermal image of a semiconductor device. The probe (10) is made from a first ribbon of material (11) and a second ribbon of material (12) which forms a thermocouple junction (13). A probe tip (15) is then attached to the thermocouple junction (13) with an epoxy (14). In an alternate embodiment of the present invention, a probe (20) has a point region (17) which is formed by bending a portion of the thermocouple junction (13) and coating the point region (17) is coated with a thermally conductive material. An optical signal is then reflected off a planar portion of the first ribbon of material (11), the second ribbon of material (12), or the thermocouple junction (13) so the motion of the probe (10,20) can be monitored by an optical detector.

대표청구항 ▼

[ We claim:] [1.] An apparatus having a light emitter and a light detector coupled to a probe, the probe comprising:a first ribbon of material, wherein at least a portion of the first ribbon of material is a first planar surface and the first planar surface is reflective;a second ribbon of material

[ We claim:] [1.] An apparatus having a light emitter and a light detector coupled to a probe, the probe comprising:a first ribbon of material, wherein at least a portion of the first ribbon of material is a first planar surface and the first planar surface is reflective;a second ribbon of material forming a thermocouple junction with the first ribbon of material, wherein the thermocouple junction has a second planar surface that reflects an optical signal from the light emitter to the light detector, and the optical signal that is reflected is coupled to movement of the probe;a point region formed from at least a portion of the thermocouple junction; anda coating on at least a portion of the point region such that the coating and the point region form a probe tip. [8.] A method for forming an apparatus comprising the steps of:providing a light emitter;providing a light detector;providing a first ribbon of material and a second ribbon of material, at least a portion of the first ribbon of material having a first planar surface and a second planar surface;joining the first ribbon of material and the second ribbon of material such that a thermocouple junction is formed, wherein the second planar surface is coupled to the light detector and to the light emitter by and optical signal and optical signal that is reflected is coupled to movement of the probe,bending at least a portion of the thermocouple junction to form a point region; andcoating the point region with a thermally conductive material.