초록 ▼

The present invention relates to an exhaust gas treatment unit which possesses a stable treating capacity, with a reduced running cost. The exhaust gas treatment unit removes noxious gases such as monosilane contained in an exhaust gas by thermal decomposition. The exhaust gas treatment unit include

The present invention relates to an exhaust gas treatment unit which possesses a stable treating capacity, with a reduced running cost. The exhaust gas treatment unit removes noxious gases such as monosilane contained in an exhaust gas by thermal decomposition. The exhaust gas treatment unit includes a heating drum (5) into which the exhaust gas and oxygen or air are introduced and a heating source (6) disposed on the outer periphery of the heating drum (5) so as to heat the inside of said heating drum (5). A temperature sensor (14) detects the temperature of the inside of said heating drum (5) in the vicinity of its outlet and a controller (16) controls the heating source (6) in accordance with a detected temperature value from the temperature sensor (14) so that the temperature of the inside of said heating drum (5) in the vicinity of the outlet is maintained within a predetermined temperature range. An air-cooled type cooling device (2) is connected to the outlet of the heating drum (5) to cool the exhaust gas. The running cost of the invention is lower than the running cost for other known devices in a large extent because metal oxide and chemical agents are not used in contrast to a chemical reaction type exhaust gas treatment unit.

대표청구항 ▼

[ We claim:] [1.] An exhaust gas treatment unit for removing noxious gases contained in an exhaust gas by thermal decomposition comprising;a heating chamber into which exhaust gas and oxygen are introduced, the heating chamber having an outlet;a heating source disposed at an outer periphery of said

[ We claim:] [1.] An exhaust gas treatment unit for removing noxious gases contained in an exhaust gas by thermal decomposition comprising;a heating chamber into which exhaust gas and oxygen are introduced, the heating chamber having an outlet;a heating source disposed at an outer periphery of said heating chamber so as to heat an inside of said heating chamber;a temperature detector for detecting a temperature of the inside of said heating chamber in a vicinity of the outlet and outputting a detected temperature value;a valve for controlling the flow of oxygen into the heating chamber;a controller for controlling said heating source in accordance with the detected temperature value from said temperature detector so that the temperature of the inside of said heating chamber in the vicinity of the outlet is maintained within a predetermined temperature range, and for controlling the flow of oxygen into the heating chamber in accordance with the detected temperature value; anda cooling device connected to the outlet of said heating chamber.