이 특허를 인용한 특허 (49)

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3. Parpia, Jeevak M.; Craighead, Harold G.; Cross, Joshua D.; Ilic, Bojan Robert; Zalalutdinov, Maxim K.; Baldwin, Jeffrey W.; Houston, Brian H., CMOS integrated micromechanical resonators and methods for fabricating the same.

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4. Schoess, Jeffrey N.; Simons, Mark D., Conformal fluid data sensor.

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5. Kang, Joon-Won, Contactless acceleration switch.

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6. Kang, Joon-Won, Contactless acceleration switch.

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7. Zook J. David ; Herb William R. ; Burns David W., Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators.

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8. Dmytriw, Anthony M.; Ricks, Lamar F., Flow sensor with conditioning-coefficient memory.

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10. Qasimi, Mohammed Abdul Javvad; Hoover, William; Sorenson, Richard Charles; Becke, Craig Scott, Flow sensor with pressure output signal.

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11. Miles, Ronald N.; Cui, Weili, Hinged MEMS diaphragm.

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12. Miles, Ronald N.; Cui, Weili, Hinged MEMS diaphragm, and method of manufacture thereof.

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13. DeBar, Michael J.; Yang, Zhihao, Measuring absolute static pressure at one or more positions along a microfluidic device.

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14. DeBar, Michael J.; Yang, Zhihao, Measuring absolute static pressure at one or more positions along a microfluidic device.

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15. Liang Victor C. ; Bothra Subhas ; Sur ; Jr. Harlan Lee, Method and apparatus for rapidly discharging plasma etched interconnect structures.

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16. Hoek Bertil,SEX ; Hammarstroem Ola,SEX ; Benkowski Per,SEX ; von Malmborg Per,SEX ; Tenerz Lars,SEX, Method and sensor for wireless measurement of physiological variables.

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17. Hoek, Bertil; Hammarstroem, Ola; Benkowski, Per; Malmborg, Paer von; Tenerz, Lars, Method and sensor for wireless measurement of physiological variables.

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18. Bothra Subhas ; Sur ; Jr. Harlan Lee ; Liang Victor C., Method for making reliable interconnect structures.

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19. Bothra Subhas ; Patel Jay, Method for preventing electrochemical erosion of interconnect structures.

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20. Stemme, Goeran; Kaelvesten, Edvard, Method of making a pressure sensor comprising a resonant beam structure.

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21. Qing Ma ; Peng Cheng, Micro-electromechanical structure resonator, method of making, and method of using.

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22. Qing Ma ; Peng Cheng, Micro-electromechanical structure resonator, method of making, and method of using.

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23. James Castracane ; Mikhail A. Gutin, Micromachined diffractive pressure sensor system.

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24. Sherrer,David W., Microstructures comprising a dielectric layer and a thin conductive layer.

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25. Sherrer, David W., Microstructures comprising silicon nitride layer and thin conductive polysilicon layer.

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26. Belleville, Claude; Lalancette, Sebastien; Lessard, Nicolas, Miniature high sensitivity pressure sensor.

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27. Bey, Paul Prehn; Hoover, William; Speldrich, Jamie; Jones, Ryan, Modular sensor assembly including removable sensing module.

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28. Castano Cano, Davinson; Grossard, Mathieu; Hubert, Arnaud, Multidimensional resonant force sensor.

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29. Burns,David W., Optical and electronic interface for optically coupled resonators.

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30. Youngner, Daniel W.; Lu, Son Thai, Optical pressure sensor.

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31. Burns,David W., Optically coupled resonant pressure sensor.

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32. Burns,David W., Optically coupled resonant pressure sensor and process.

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33. Burns, David W., Optically coupled resonator.

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34. Burns,David W., Optically coupled sealed-cavity resonator and process.

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35. Youngner, Daniel W., Optically powered resonant integrated microstructure magnetic field gradient sensor.

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36. Youngner, Daniel W., Optically powered resonant integrated microstructure pressure sensor.

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37. Rich,David B.; Crist,Steven M., Piezoresistive sensing structure.

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38. Stewart, Carl; Bradley, Alistair; Ricks, Lamar, Pressure sensor.

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39. Borzabadi,Hamid R.; Koglin,Dennis M.; Manlove,Gregory J.; Long,Stephen P., Pressure sensor module having stress isolation platform.

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40. Stewart,Carl E.; Hancock,Peter G., Pressure transducer with differential amplifier.

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41. Sur ; Jr. Harlan Lee ; Bothra Subhas, Programmable semiconductor structures and methods for making the same.

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42. Stemme Goeran,SEX ; Kaelvesten Edvard,SEX, Resonant sensor and method of making a pressure sensor comprising a resonant beam structure.

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43. Aoki, Daigo; Hashimoto, Hideyuki; Kobayashi, Tetsuya; Koizumi, Kunio; Shimizu, Yoshiaki; Takashima, Yutaka; Yokoyama, Shinya, Semiconductor pressure sensor having a recess with a larger area than a planar shape of a diaphragm.

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44. Bothra Subhas ; Sur ; Jr. Harlan Lee, Semiconductor pressure transducer structures and methods for making the same.

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45. Bothra, Subhas; Sur, Jr., Harlan Lee, Semiconductor pressure transducer structures and methods for making the same.

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46. Hyde, Roderick A.; Myhrvold, Nathan P.; Wood, Jr., Lowell L.; Chan, Alistair K.; Tegreene, Clarence T., System and method for deforming surfaces.

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47. Hyde, Roderick A.; Myhrvold, Nathan P.; Wood, Jr., Lowell L.; Chan, Alistair K.; Tegreene, Clarence T., System for changing the convective heat transfer coefficient for a surface.

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48. Wade, Richard; Ricks, Lamar Floyd, Temperature compensated force sensor.

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49. Milley, Andrew J.; Sorenson, Richard C., Variable scale sensor.

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