$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

[미국특허] Sputtering system using cylindrical rotating magnetron electrically powered using alternating current 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/34
출원번호 US-0736978 (1996-10-25)
발명자 / 주소
  • Lehan John
  • Byorum Henry
  • Hill Russell J.
  • Rough J. Kirkwood
출원인 / 주소
  • The Boc Group, Inc.
대리인 / 주소
    Draegert
인용정보 피인용 횟수 : 195  인용 특허 : 0

초록 ▼

A sputtering system using an AC power supply in the range of 10 kHz to 100 kHz uses two rotatable cylindrical magnetrons. The rotatable cylindrical magnetrons, when used for depositing a dielectric layer onto a substrate, clean off dielectric material that is deposited onto the target. This prevents

대표청구항 ▼

[ What is claimed is:] [1.] A sputtering system for forming a dielectric layer on a substrate comprising:an alternating current power supply having a first and a second pole that alternate in polarity;a chamber;a rotatable magnetron in said chamber, said rotatable magnetron including a cylindrical t

이 특허를 인용한 특허 (195) 인용/피인용 타임라인 분석

  1. Krajewski, Todd, Adhesives for attaching wire network to photovoltaic cells.
    상세보기
  2. Krajewski, Todd, Adhesives for attaching wire network to photovoltaic cells.
    상세보기
  3. German,John R.; Crowley,Daniel T.; Meinke,Brian P.; Peterson,Roger L., Alternating current rotatable sputter cathode.
    상세보기
  4. Yu, Chentao; Xu, Zheng; Heng, Jiunn Benjamin; Fu, Jianming, Aluminum grid as backside conductor on epitaxial silicon thin film solar cells.
    상세보기
  5. McKay, Douglas J.; Zevenbergen, IV, John W.; Birtwhistle, Darin; Janning, Robert; Janning, Mitch, Apparatuses and methods for fabricating wire current collectors and interconnects for solar cells.
    상세보기
  6. van Zyl, Gideon J., Arc detection and handling in radio frequency power applications.
    상세보기
  7. van Zyl,Gideon J., Arc detection and handling in radio frequency power applications.
    상세보기
  8. Ilic, Milan, Arc recovery with over-voltage protection for plasma-chamber power supplies.
    상세보기
  9. Ilic, Milan; Shilo, Vladislav V.; Huff, Robert Brian, Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch.
    상세보기
  10. Juliano, Daniel R.; Mathias, Deborah; Mackie, Neil M., Barrier for doped molybdenum targets.
    상세보기
  11. Juliano, Daniel R.; Mathias, Deborah; Mackie, Neil M., Barrier for doped molybdenum targets.
    상세보기
  12. Liang, Jiuh-Ming; Nieh, Kai-Wei, Battery with protective packaging.
    상세보기
  13. Heng, Jiunn Benjamin; Erben, Christoph; Yang, Bobby, Bifacial photovoltaic module using heterojunction solar cells.
    상세보기
  14. Buhay, Harry; Finley, James J.; Thiel, James P.; Lehan, John P., Coated articles having a protective coating and cathode targets for making the coated articles.
    상세보기
  15. Bangert, Stefan; Fuchs, Frank; Lindenberg, Ralph; Lopp, Andreas; Schüssler, Uwe; Stolley, Tobias, Coater with a large-area assembly of rotatable magnetrons.
    상세보기
  16. Buhay,Harry; Finley,James J.; Thiel,James P., Coating stack comprising a layer of barrier coating.
    상세보기
  17. Luch, Daniel, Collector grid and interconnect structures for photovoltaic arrays and modules.
    상세보기
  18. Luch, Daniel, Collector grid and interconnect structures for photovoltaic arrays and modules.
    상세보기
  19. Luch, Daniel, Collector grid and interconnect structures for photovoltaic arrays and modules.
    상세보기
  20. Luch, Daniel; Luch, Daniel Randolph, Collector grid and interconnect structures for photovoltaic arrays and modules.
    상세보기
  21. Luch, Daniel; Luch, Daniel Randolph, Collector grid and interconnect structures for photovoltaic arrays and modules.
    상세보기
  22. Luch, Daniel; Luch, Daniel Randolph, Collector grid and interconnect structures for photovoltaic arrays and modules.
    상세보기
  23. Luch, Daniel; Luch, Daniel Randolph, Collector grid and interconnect structures for photovoltaic arrays and modules.
    상세보기
  24. Luch, Daniel; Luch, Daniel Randolph, Collector grid and interconnect structures for photovoltaic arrays and modules.
    상세보기
  25. Luch, Daniel; Luch, Daniel Randolph, Collector grid and interconnect structures for photovoltaic arrays and modules.
    상세보기
  26. Luch, Daniel, Collector grid, electrode structures and interconnect structures for photovoltaic arrays and methods of manufacture.
    상세보기
  27. Luch, Daniel, Collector grid, electrode structures and interrconnect structures for photovoltaic arrays and methods of manufacture.
    상세보기
  28. Everson, Shawn; Croft, Steven T.; Halstead, Whitfield G.; Corneille, Jason S., Combined diode, lead assembly incorporating an expansion joint.
    상세보기
  29. Gillaspie, Dane; Kailasam, Sridhar K.; Rozbicki, Robert T., Counter electrode for electrochromic devices.
    상세보기
  30. Gillaspie, Dane; Kailasam, Sridhar K.; Rozbicki, Robert T., Counter electrode for electrochromic devices.
    상세보기
  31. Barrett, Richard L., Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation.
    상세보기
  32. Bernick, Mark A., Cylindrical magnetron.
    상세보기
  33. Bernick, Mark A.; Newcomb, Richard, Cylindrical magnetron having a shunt.
    상세보기
  34. Rietzel,James G.; Johnson,Kevin D., Cylindrical magnetron with self cleaning target.
    상세보기
  35. Zhang, Hongmei; Demaray, Richard E., Deposition of LiCoO2.
    상세보기
  36. Zhang, Hongmei; Demaray, Richard E., Deposition of perovskite and other compound ceramic films for dielectric applications.
    상세보기
  37. Narasimhan,Mukundan; Brooks,Peter; Demaray,Richard E., Dielectric barrier layer films.
    상세보기
  38. Narasimhan,Mukundan; Brooks,Peter; Demaray,Richard E., Dielectric barrier layer films.
    상세보기
  39. Kloeppel, Andreas, Double-coating device with one process chamber.
    상세보기
  40. Seymour, Eric A.; Pratt, Annabelle, Dual magnetron sputtering apparatus utilizing control means for delivering balanced power.
    상세보기
  41. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
    상세보기
  42. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
    상세보기
  43. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
    상세보기
  44. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
    상세보기
  45. Pradhan, Anshu A.; Rozbicki, Robert T., Electrochromic devices.
    상세보기
  46. Pradhan, Anshu A.; Rozbicki, Robert T., Electrochromic devices.
    상세보기
  47. Pradhan, Anshu A.; Rozbicki, Robert T., Electrochromic devices.
    상세보기
  48. Wang, Zhongchun; Kurman, Eric; Kozlowski, Mark; Scobey, Mike; Dixon, Jeremy; Pradhan, Anshu, Electrochromic devices.
    상세보기
  49. Wang, Zhongchun; Pradhan, Anshu A.; Rozbicki, Robert T., Electrochromic devices.
    상세보기
  50. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert, Electrochromic devices.
    상세보기
  51. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert, Electrochromic devices.
    상세보기
  52. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert, Electrochromic devices.
    상세보기
  53. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert, Electrochromic devices.
    상세보기
  54. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert, Electrochromic devices.
    상세보기
  55. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert, Electrochromic devices.
    상세보기
  56. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert, Electrochromic devices.
    상세보기
  57. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert, Electrochromic devices.
    상세보기
  58. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert T, Electrochromic devices.
    상세보기
  59. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert T., Electrochromic devices.
    상세보기
  60. Wang, Zhongchun; Pradhan, Anshu; Rozbicki, Robert T., Electrochromic devices.
    상세보기
  61. Fu, Jianming; Kong, Wen Zhong, Electroplating apparatus with improved throughput.
    상세보기
  62. Demaray, Richard E.; Zhang, Hong Mei; Narasimhan, Mukundan; Milonopoulou, Vassiliki, Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides.
    상세보기
  63. Demaray,Richard E.; Zhang,Hong Mei; Narasimhan,Mukundan; Milonopoulou,Vassiliki, Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides.
    상세보기
  64. Brantner, Paul C., Energy device with integral collector surface for electromagnetic energy harvesting and method thereof.
    상세보기
  65. Brantner, Paul C., Energy device with integral conductive surface for data communication via electromagnetic energy and method thereof.
    상세보기
  66. Keating, Joseph A.; Bradow, Timothy N.; Johnson, Raymond R.; Narayan, Prativadi B., Environmentally-powered wireless sensor module.
    상세보기
  67. Kailasam, Sridhar Karthik; Friedman, Robin; Pradhan, Anshu A.; Rozbicki, Robert T., Fabrication of low defectivity electrochromic devices.
    상세보기
  68. Kailasam, Sridhar Karthik; Friedman, Robin; Pradhan, Anshu A.; Rozbicki, Robert T., Fabrication of low defectivity electrochromic devices.
    상세보기
  69. Kailasam, Sridhar Karthik; Friedman, Robin; Pradhan, Anshu A.; Rozbicki, Robert T., Fabrication of low defectivity electrochromic devices.
    상세보기
  70. Kailasam, Sridhar; Friedman, Robin; Pradhan, Anshu; Rozbicki, Robert T., Fabrication of low defectivity electrochromic devices.
    상세보기
  71. Kozlowski, Mark; Kurman, Eric; Wang, Zhongchun; Scobey, Mike; Dixon, Jeremy; Pradhan, Anshu; Rozbicki, Robert, Fabrication of low defectivity electrochromic devices.
    상세보기
  72. Kozlowski, Mark; Kurman, Eric; Wang, Zhongchun; Scobey, Mike; Dixon, Jeremy; Pradhan, Anshu; Rozbicki, Robert, Fabrication of low defectivity electrochromic devices.
    상세보기
  73. Kozlowski, Mark; Kurman, Eric; Wang, Zhongchun; Scobey, Mike; Dixon, Jeremy; Pradhan, Anshu; Rozbicki, Robert, Fabrication of low defectivity electrochromic devices.
    상세보기
  74. Pradhan, Anshu A.; Rozbicki, Robert T.; Gillaspie, Dane; Kailasam, Sridhar K., Fabrication of low defectivity electrochromic devices.
    상세보기
  75. Dawson-Elli, David Francis; DeMartino, Steven Edward; Hluck, Laura L, Glass laminated articles and layered articles.
    상세보기
  76. Yang, Bobby; Nguyen, Peter P.; Heng, Jiunn Benjamin; Reddy, Anand J.; Xu, Zheng, High efficiency solar panel.
    상세보기
  77. Crowley, Daniel T., High-power ion sputtering magnetron.
    상세보기
  78. Xie, Zhigang; Heng, Jiunn Benjamin; Wang, Wei; Fu, Jianming; Xu, Zheng, Hole collectors for silicon photovoltaic cells.
    상세보기
  79. Neudecker, Bernd J.; Snyder, Shawn W., Hybrid thin-film battery.
    상세보기
  80. Neudecker, Bernd J.; Snyder, Shawn W., Hybrid thin-film battery.
    상세보기
  81. Croft, Steven Thomas; Ghandour, Osman; Halstead, Whitfield Gardner, Integrated diode assemblies for photovoltaic modules.
    상세보기
  82. Wudu, Mulugeta Zerfu; Corneille, Jason Stephen; Croft, Steven Thomas; Flanders, Steven Douglas; McColl, William James, Interconnect assembly.
    상세보기
  83. Neumann, Martin John; Nguyen, Que Anh Song; Mehtani, Disha; Pradhan, Anshu A.; Rozbicki, Robert T.; Shrivastava, Dhairya; Frank, Trevor; Martin, Todd, Lithium sputter targets.
    상세보기
  84. Neumann, Martin John; Nguyen, Que Anh Song; Pradhan, Anshu A.; Rozbicki, Robert T.; Shrivastava, Dhairya; Satern, Jason; Martin, Todd, Lithium sputter targets.
    상세보기
  85. Liang, Jiuh-Ming, Localized heat treatment of battery component films.
    상세보기
  86. Bellido-Gonzalez, Victor, Low impedance plasma.
    상세보기
  87. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James E., Low-maintenance coatings.
    상세보기
  88. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James E., Low-maintenance coatings.
    상세보기
  89. Myli, Kari B.; Krisko, Annette J.; Brownlee, James E.; Pfaff, Gary L., Low-maintenance coatings, and methods for producing low-maintenance coatings.
    상세보기
  90. Wang, Weng-Chung; Nieh, Kai-Wei, Manufacturing method for thin film battery.
    상세보기
  91. Snyder, Shawn W.; Brantner, Paul C.; Zoetewey, Henry L., Masking of and material constraint for depositing battery layers on flexible substrates.
    상세보기
  92. Snyder, Shawn W.; Neudecker, Bernd J.; Brantner, Paul C., Metal film encapsulation.
    상세보기
  93. Snyder, Shawn W.; Neudecker, Bernd J.; Brantner, Paul C., Metal film encapsulation.
    상세보기
  94. Mackie, Neil M.; Corson, John, Method and apparatus for controllable sodium delivery for thin film photovoltaic materials.
    상세보기
  95. Mackie, Neil M.; Corson, John, Method and apparatus for controllable sodium delivery for thin film photovoltaic materials.
    상세보기
  96. Inoue, Kenichi; Takamatsu, Hiroyuki; Kobori, Takashi; Hayashi, Kazushi; Kugimiya, Toshihiro, Method and apparatus for forming thin film.
    상세보기
  97. Szyszka, Bernd; Pflug, Andreas, Method and device for magnetron sputtering.
    상세보기
  98. Juliano, Daniel R., Method for alkali doping of thin film photovoltaic materials.
    상세보기
  99. Mackie, Neil M.; Juliano, Daniel R.; Zubeck, Robert B., Method for alkali doping of thin film photovoltaic materials.
    상세보기
  100. Linss, Volker; Wuensche, Tilo, Method for coating a substrate in a vacuum chamber having a rotating magnetron.
    상세보기
  101. Rietzel, James G., Method for differentially pumping endblock seal cavity.
    상세보기
  102. Ikeda, Toru; Mashimo, Takahiro; Shidoji, Eiji; Kamiyama, Toshihisa; Katayama, Yoshihito, Method for producing silicon oxide film and method for producing optical multilayer film.
    상세보기
  103. Krassnitzer, Siegfried; Lendi, Daniel; Lechthaler, Markus, Method for providing sequential power pulses.
    상세보기
  104. Nyberg,Tomas; Berg,S��ren, Method for reactive sputtering deposition.
    상세보기
  105. Neudecker, Bernd J.; Whitacre, Jay F., Method for sputter targets for electrolyte films.
    상세보기
  106. Bernick, Mark A.; Newcomb, Richard, Method of fine tuning a magnetron sputtering electrode in a rotatable cylindrical magnetron sputtering device.
    상세보기
  107. Juliano, Daniel R.; Mathias, Deborah; Mackie, Neil M., Method of forming a sputtering target.
    상세보기
  108. Vlcek, Johannes; Juliano, Daniel R., Method of making a CIG target by cold spraying.
    상세보기
  109. Vlcek, Johannes; Juliano, Daniel R., Method of making a CIG target by cold spraying.
    상세보기
  110. Newbery, A. Piers; Kueper, Timothy; Juliano, Daniel R., Method of making a CIG target by spray forming.
    상세보기
  111. Buhay, Harry; Finley, James J.; Thiel, James P.; Lehan, John P., Method of making coated articles having an oxygen barrier coating and coated articles made thereby.
    상세보기
  112. Hartig, Klaus, Methods and equipment for depositing coatings having sequenced structures.
    상세보기
  113. Myli, Kari; Pfaff, Gary; Brownlee, James; German, John; Krisko, Annette; Hartig, Klaus, Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films.
    상세보기
  114. Heng, Jiunn Benjamin; Fu, Jianming; Xu, Zheng; Yang, Bobby, Module fabrication of solar cells with low resistivity electrodes.
    상세보기
  115. Heng, Jiunn Benjamin; Fu, Jianming; Xu, Zheng; Yang, Bobby, Module fabrication of solar cells with low resistivity electrodes.
    상세보기
  116. Heng, Jiunn Benjamin; Fu, Jianming; Xu, Zheng; Yang, Bobby, Module fabrication of solar cells with low resistivity electrodes.
    상세보기
  117. Heng, Jiunn Benjamin; Fu, Jianming; Xu, Zheng; Yang, Bobby, Module fabrication of solar cells with low resistivity electrodes.
    상세보기
  118. Heng, Jiunn Benjamin; Fu, Jianming; Xu, Zheng; Yang, Bobby, Module fabrication of solar cells with low resistivity electrodes.
    상세보기
  119. Egerton, Peter; Gaskell, Drew, Multi-pane dynamic window and method for making same.
    상세보기
  120. Egerton, Peter; Gaskell, Drew, Multi-pane dynamic window and method for making same.
    상세보기
  121. Egerton, Peter; Gaskell, Drew, Multi-pane dynamic window and method for making same.
    상세보기
  122. Egerton, Peter; Gaskell, Drew, Multi-pane dynamic window and method for making same.
    상세보기
  123. Egerton, Peter; Gaskell, Drew, Multi-pane dynamic window and method for making same.
    상세보기
  124. Shrivastava, Dhairya; Friedman, Robin; Khosla, Vinod; Mulpuri, Rao, Multi-zone EC windows.
    상세보기
  125. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James, Opposed functional coatings having comparable single surface reflectances.
    상세보기
  126. Ilic, Milan, Over-voltage protection during arc recovery for plasma-chamber power supplies.
    상세보기
  127. Brantner, Paul C.; Keating, Joseph A.; Johnson, Raymond R.; Bradow, Timothy N.; Narayan, Prativadi B.; Neudecker, Bernd J., Passive over/under voltage control and protection for energy storage devices associated with energy harvesting.
    상세보기
  128. Corson, John; Austin, Alex; Rulkens, Ron; Titus, Jochen; Tas, Robert; Shufflebotham, Paul; Juliano, Daniel R.; Mackie, Neil, Photovoltaic cell with copper poor CIGS absorber layer and method of making thereof.
    상세보기
  129. Corson, John; Austin, Alex; Tas, Robert; Mackie, Neil; Larsson, Mats; Demirkan, Korhan; Zhang, Weijie; Titus, Jochen; Sevanna, Swati; Zubeck, Robert; Dorn, Randy; Rairkar, Asit; Rulkens, Ron; Saproo, Ajay; Vitkavage, Dan, Photovoltaic cell with high efficiency CIGS absorber layer with low minority carrier lifetime and method of making thereof.
    상세보기
  130. Corson, John; Austin, Alex; Tas, Robert; Mackie, Neil; Larsson, Mats; Demirkan, Korhan; Zhang, Weijie; Titus, Jochen; Sevanna, Swati; Zubeck, Robert; Dorn, Randy; Rairkar, Asit; Rulkens, Ron; Saproo, Ajay; Vitkavage, Dan, Photovoltaic cell with high efficiency cigs absorber layer with low minority carrier lifetime and method of making thereof.
    상세보기
  131. Reddy, Anand J., Photovoltaic cells with electrodes adapted to house conductive paste.
    상세보기
  132. Shufflebotham, Paul, Photovoltaic device and method and system for making photovoltaic device.
    상세보기
  133. Fu, Jianming; Heng, Jiunn Benjamin; Beitel, Christopher J.; Xu, Zheng, Photovoltaic devices with electroplated metal grids.
    상세보기
  134. Fu, Jianming; Heng, Jiunn Benjamin; Beitel, Christopher J.; Xu, Zheng, Photovoltaic devices with electroplated metal grids.
    상세보기
  135. Fu, Jianming; Heng, Jiunn Benjamin; Beitel, Christopher J.; Xu, Zheng, Photovoltaic devices with electroplated metal grids.
    상세보기
  136. Paulson, Puthur; Sanders, William; Tarbell, Ben, Photovoltaic module utilizing an integrated flex circuit and incorporating a bypass diode.
    상세보기
  137. Corneille, Jason; Krajewski, Todd, Photovoltaic module with flexible wire interconnection.
    상세보기
  138. Nguyen, Peter P., Photovoltaic structures with interlocking busbars.
    상세보기
  139. Tamagaki, Hiroshi; Okimoto, Tadao; Segawa, Toshiki, Plasma CVD apparatus.
    상세보기
  140. Nieh, Kai Wei; Liang, Jiuh-Ming; Krasnov, Victor, Plasma deposition on a partially formed battery through a mesh screen.
    상세보기
  141. Bulliard, Albert; Fragniere, Benoit; Oehen, Joel, Power supply device for plasma processing.
    상세보기
  142. Bulliard, Albert; Fragniere, Benoit; Oehen, Joel, Power supply device for plasma processing.
    상세보기
  143. Bulliard, Albert; Fragniere, Benoit; Oehen, Joel; Cardou, Olivier, Power supply device for plasma processing.
    상세보기
  144. Bulliard, Albert; Fragnière, Benoit; Oehen, Joël, Power supply device for plasma processing.
    상세보기
  145. Bulliard, Albert; Fragnière, Benoit; Oehen, Joël; Cardou, Olivier, Power supply device for plasma processing.
    상세보기
  146. Morgan, Forrest; Frost, Daryl; Heine, Frank; Pelleymounter, Doug; Walde, Hendrik, Power supply ignition system and method.
    상세보기
  147. Neudecker, Bernd J.; Keating, Joseph A., Printed circuit board with integrated thin film battery.
    상세보기
  148. Neudecker, Bernd J.; Keating, Joseph A., Printed circuit board with integrated thin film battery.
    상세보기
  149. Larson, Skip B.; Nauman, Jr., Kenneth E.; Walde, Hendrik; McDonald, R. Mike, Proactive arc management of a plasma load.
    상세보기
  150. Schmidt, Chris; Corson, John, Protective layer for large-scale production of thin-film solar cells.
    상세보기
  151. Schmidt, Chris; Corson, John, Protective layer for large-scale production of thin-film solar cells.
    상세보기
  152. Schmidt, Chris; Corson, John, Protective layer for large-scale production of thin-film solar cells.
    상세보기
  153. Xie, Zhigang; Wang, Wei; Xu, Zheng; Fu, Jianming, Radio-frequency sputtering system with rotary target for fabricating solar cells.
    상세보기
  154. Snyder, Shawn W.; Brantner, Paul C.; Keating, Joseph A.; Bradow, Timothy N.; Narayan, Prativadi B.; Neudecker, Bernd J., Robust metal film encapsulation.
    상세보기
  155. Madocks, John E.; Morse, Patrick Lawrence; Ngo, Phong, Rotary magnetron magnet bar and apparatus containing the same for high target utilization.
    상세보기
  156. Corneille, Jason S.; Vijayendran, Anil; Krajewski, Todd A., Small gauge wire solar cell interconnect.
    상세보기
  157. Juliano, Daniel R.; Tas, Robert; Mackie, Neil; Ziani, Abdelouahab, Sodium salt containing CIG targets, methods of making and methods of use thereof.
    상세보기
  158. Fu, Jianming; Xu, Zheng; Yu, Chentao; Heng, Jiunn Benjamin, Solar cell with electroplated metal grid.
    상세보기
  159. Beitel, Christopher James; Heng, Jiunn Benjamin; Fu, Jianming; Xu, Zheng, Solar panels with integrated cell-level MPPT devices.
    상세보기
  160. Croft, Steven Thomas; McColl, William James; Everson, Shawn; Corneille, Jason Stephen; Whitfield, Kent; Krajewski, Todd; Britwhistle, Darin, Solar-cell module with in-laminate diodes and external-connection mechanisms mounted to respective edge regions.
    상세보기
  161. Henrich, Jurgen; Sauer, Andreas; Geiss, Andreas; Brinckmann, Felix, Sputter apparatus with a pipe cathode and method for operating this sputter apparatus.
    상세보기
  162. Parker, Ronald M.; Rozbicki, Robert T., Sputter target and sputtering methods.
    상세보기
  163. Crowley, Daniel Theodore; Meredith, Jr., William A., Sputtering apparatus.
    상세보기
  164. Crowley, Daniel Theodore; Meredith, Jr., William A., Sputtering apparatus.
    상세보기
  165. Morse, Patrick Lawrence, Sputtering apparatus.
    상세보기
  166. Dennis R. Hollars, Sputtering apparatus and process for high rate coatings.
    상세보기
  167. Dennis R. Hollars ; Martin P. Rosenblum ; Carl T. Petersen, Sputtering apparatus and process for high rate coatings.
    상세보기
  168. Brabender, Dennis M; Kokoschke, Jeffrey L, Sputtering apparatus including target mounting and control.
    상세보기
  169. Neudecker, Bernd J.; Milonopoulou, Vassiliki, Sputtering target of Li3PO4 and method for producing same.
    상세보기
  170. Luch, Daniel, Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays.
    상세보기
  171. Luch, Daniel, Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays.
    상세보기
  172. Luch, Daniel, Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays.
    상세보기
  173. Luch, Daniel, Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays.
    상세보기
  174. Luch, Daniel, Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays.
    상세보기
  175. Luch, Daniel, Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacturing of such arrays.
    상세보기
  176. Luch, Daniel, Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays.
    상세보기
  177. Shufflebotham, Paul; Juliano, Daniel R.; Tas, Robert; Mackie, Neil, Sulfur salt containing CIG targets, methods of making and methods of use thereof.
    상세보기
  178. Wang, Wei, System and method for manufacturing photovoltaic structures with a metal seed layer.
    상세보기
  179. Wang, Wei, System and method for manufacturing photovoltaic structures with a metal seed layer.
    상세보기
  180. Xie, Zhigang; Reddy, Anand J.; Xiao, Chunguang; Heng, Jiunn Benjamin, System and method for mass-production of high-efficiency photovoltaic structures.
    상세보기
  181. Stowell, Michael W., System and method for modulation of power and power related functions of PECVD discharge sources to achieve new film properties.
    상세보기
  182. Erben, Christoph G.; Sun, Zhi-Wen, System and method for tin plating metal electrodes.
    상세보기
  183. Walters, Dean R.; Este, Grantley O., Thin film application device and method for coating small aperture vacuum vessels.
    상세보기
  184. Liang, Jiuh-Ming, Thin film battery and localized heat treatment.
    상세보기
  185. Johnson, Raymond R.; Snyder, Shawn W.; Brantner, Paul C.; Bradow, Timothy J.; Neudecker, Bernd J., Thin film battery on an integrated circuit or circuit board and method thereof.
    상세보기
  186. Liang, Jiuh-Ming; Nieh, Kai Wei, Thin film battery packaging formed by localized heating.
    상세보기
  187. Neudecker, Bernd J., Thin film electrolyte for thin film batteries.
    상세보기
  188. Neudecker, Bernd J.; Snyder, Shawn W., Thin film encapsulation for thin film batteries and other devices.
    상세보기
  189. Neudecker, Bernd J.; Snyder, Shawn W., Thin film encapsulation for thin film batteries and other devices.
    상세보기
  190. Strong, Fabian; Bhatnagar, Yashraj; Dixit, Abhishek Anant; Martin, Todd; Rozbicki, Robert T., Thin-film devices and fabrication.
    상세보기
  191. Fu, Jianming; Xu, Zheng; Heng, Jiunn Benjamin; Yu, Chentao, Transparent conducting oxide for photovoltaic devices.
    상세보기
  192. Fu, Jianming; Xu, Zheng; Heng, Jiunn Benjamin; Yu, Chentao, Transparent conducting oxide for photovoltaic devices.
    상세보기
  193. Demaray, Richard E.; Narasimhan, Mukundan, Transparent conductive oxides.
    상세보기
  194. Fu, Jianming; Xu, Zheng; Heng, Jiunn Benjamin; Yu, Chentao, Tunneling-junction solar cell with copper grid for concentrated photovoltaic application.
    상세보기
  195. Croft, Steven Thomas, Wire network for interconnecting photovoltaic cells.
    상세보기

활용도 분석정보

상세보기
다운로드
내보내기

활용도 Top5 특허

해당 특허가 속한 카테고리에서 활용도가 높은 상위 5개 콘텐츠를 보여줍니다.
더보기 버튼을 클릭하시면 더 많은 관련자료를 살펴볼 수 있습니다.

관련 콘텐츠

저작권 관리 안내
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로