초록 ▼

Sensitive articles, such as IC wafers can be maintained in a contamination-free condition. A base member is provided for supporting one or more of the sensitive articles. A cover is provided for sealing engagement with a base member so as form a sealed unit. The sealed unit has an interior. The seal

Sensitive articles, such as IC wafers can be maintained in a contamination-free condition. A base member is provided for supporting one or more of the sensitive articles. A cover is provided for sealing engagement with a base member so as form a sealed unit. The sealed unit has an interior. The sealed unit is positioned at a storage position. A particle-free ionized gas is passed though the interior to bathe the articles supported therein with the gas at the storage position. The sealed unit is moved with the articles to an access position on associated processing equipment. The cover is removed from the base to expose the articles. The exposed articles are bathed continuously at the access position with a particle-free ionized gas. The articles are moved sequentially between the access position and a processing position on the associated processing equipment. The articles are bathed with a particle-free ionized gas during the moving steps. The cover is replaced on the base member so as to form the sealed unit and the sealed unit is returned with a processed wafer to the storage position.

대표청구항 ▼

[ We claim:] [4.] A method of providing a contaminant-free environment for sensitive articles, comprising the steps of:a) providing a sealed container, said container having an interior, said articles being located in said interior;b) while said container is sealed, passing a particle-free ionized g

[ We claim:] [4.] A method of providing a contaminant-free environment for sensitive articles, comprising the steps of:a) providing a sealed container, said container having an interior, said articles being located in said interior;b) while said container is sealed, passing a particle-free ionized gas through the interior of said sealed container so as to bathe said articles with said gas;c) opening said container so as to allow the transfer of said articles to and from said container interior;d) continuously bathing said articles in said open container with a particle-free ionized gas passing through the interior of said open container.