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Composite shape memory micro actuator 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01H-037/46
  • H01H-037/48
출원번호 US-0735646 (1996-10-25)
발명자 / 주소
  • Wuttig Manfred
  • Su Quanmin
출원인 / 주소
  • University of Maryland
대리인 / 주소
    Nikaido, Marmelstein, Murray & Oram LLP
인용정보 피인용 횟수 : 71  인용 특허 : 6

초록

A micro-dimensioned shape memory alloy composite composed of a thin film of shape memory material and a substrate film. The substrate film does not require further processing and thus the composite can be used as a switch without removing any portion of the substrate on which the SMA is deposited. I

대표청구항

[ What is claimed is:] [1.] A mechanical switch of micro-dimensions comprising a substrate having a face which comprises an actuator portion, said actuator portion comprising a control member which is free to displace between first and second positions, a film of shape memory alloy material deposite

이 특허에 인용된 특허 (6)

  1. Thoma Paul E. (Cedarburg WI), Apparatus including a shape memory actuating element made from tubing and a means of heating.
  2. Lionnet Richard (Parmain FRX), Heat recoverable connector.
  3. Trah Hans-Peter (Reutlingen DEX) Flik Gottfried (Leonberg DEX), Micro-actuator.
  4. Minch Richard B. (15410 N.E. 144th Pl. Woodinville WA 98072), Rapid shape memory effect micro-actuators.
  5. Busch John D. (Berkeley CA) Johnson Alfred D. (Berkeley CA), Shape-memory alloy micro-actuator.
  6. Gabriel Kaigham J. (Fair Haven NJ) Mehregany Mehran (Cambridge MA) Walker James A. (Howell NJ), Thin film shape memory alloy and method for producing.

이 특허를 인용한 특허 (71)

  1. Pinto, IV, Nicholas W.; Alexander, Paul W.; Johnson, Nancy L., Active material circuit protector.
  2. Tiliakos, Nicholas; Castrogiovanni, Anthony G., Adaptive structures, systems incorporating same and related methods.
  3. Ravi Sharma, Assisted drop-on-demand inkjet printer using deformable micro-acuator.
  4. Johnson, Alfred David, Biocompatible copper-based single-crystal shape memory alloys.
  5. Johnson, Alfred David, Biocompatible copper-based single-crystal shape memory alloys.
  6. R. Sjhon Minners, Bistable micro-switch and method for manufacturing the same.
  7. Minners R. Sjhon, Bistable micro-switch and method of manufacturing the same.
  8. Pinto, Nicholas William; Alexander, Paul W.; Johnson, Nancy L., Circuit implement utilizing active material actuation.
  9. Mutharasan, Rajakkannu; Maraldo, David; Campbell, Gossett Augustus; Rijal, Kishan, Detecting an analyte using a piezoelectric cantilever sensor.
  10. Silverbrook, Kia, Ejection nozzle arrangement having dynamic and static structures.
  11. Lim, Ji-hyuk, Energy harvesting device using pyroelectric material.
  12. Johnson,A. David, Eyeglass frame.
  13. Johnson, Alfred David, Fire sprinkler valve actuator.
  14. Silverbrook,Kia, Fluid ejection device with a through-chip micro-electromechanical actuator.
  15. Johnson, Alfred David; Gilbertson, Roger Graham; Martynov, Valery, Frangible shape memory alloy fire sprinkler valve actuator.
  16. Tsai, Richard, Heat valve for thermal management in a mobile communications device.
  17. Johnson, Alfred David, Hyperelastic shape setting devices and fabrication methods.
  18. Johnson, Alfred David, Hyperelastic shape setting devices and fabrication methods.
  19. Johnson, Alfred David; Martynov, Valery; Bokaie, Michael D.; Gray, George R., Hyperelastic shape setting devices and fabrication methods.
  20. Silverbrook, Kia, Ink ejection mechanism with thermal actuator coil.
  21. Silverbrook,Kia, Inkjet printhead comprising contractible nozzle chambers.
  22. Silverbrook, Kia, Inkjet printhead integrated circuit incorporating fulcrum assisted ink ejection actuator.
  23. Silverbrook, Kia, Inkjet printhead with nozzle layer defining etchant holes.
  24. Ma, Xiaoguang, Magnetic data storage system.
  25. Johnson, Alfred David, Method and devices for preventing restenosis in cardiovascular stents.
  26. Johnson, Alfred D.; Bachmann, Walter A., Method of alloying reactive components.
  27. Johnson, Alfred David; Bachmann, Walter A., Method of alloying reactive components.
  28. Johnson, Alfred David; Bachmann, Walter A., Method of alloying reactive components.
  29. Johnson, Alfred David; Bachmann, Walter A., Method of alloying reactive components.
  30. Xu, Baomin; Fork, David Kirtland; Young, Michael Yu Tak; Chow, Eugene Michael, Methods for manufacturing stressed material and shape memory material MEMS devices.
  31. Silverbrook, Kia, Micro-electromechanical nozzle assembly with an arcuate actuator.
  32. Silverbrook,Kia, Micro-electromechanical valve having transformable valve actuator.
  33. Johnson,A. David; Bokaie,Michael; Martynov,Valery, Non-explosive releasable coupling device.
  34. Silverbrook,Kia, Nozzle assembly incorporating a shuttered actuation mechanism.
  35. A. David Johnson, Optical switching device and method.
  36. Chua, Christopher L.; Hantschel, Thomas; Fork, David K.; Van Schuylenbergh, Koenraad F.; Yang, Yan Yan, Out-of-plane spring structures on a substrate.
  37. Lantz, Mark Alfred, Phase change MEMS switch.
  38. Lantz, Mark Alfred, Phase change actuator.
  39. William F. Quinn ; James B. Kalapodis, Pressure and temperature responsive switch assembly.
  40. Grummon, David S., Prestrained thin-film shape memory actuator using polymeric substrates.
  41. Silverbrook,Kia, Printhead having inkjet actuators with contractible chambers.
  42. Silverbrook, Kia, Printhead having relatively dimensioned ejection ports and arms.
  43. Silverbrook, Kia, Printhead micro-electromechanical nozzle arrangement with motion-transmitting structure.
  44. Silverbrook,Kia, Printhead nozzle arrangement with a micro-electromechanical shape memory alloy based actuator.
  45. Silverbrook, Kia, Printhead nozzle arrangements with magnetic paddle actuators.
  46. Silverbrook, Kia, Printhead nozzle having heater of higher resistance than contacts.
  47. Silverbrook, Kia, Printhead with fluid flow control.
  48. Mutharasan, Rajakkannu; Maraldo, David; Campbell, Gossett Augustus; Rijal, Kishan, Self-exciting, self-sensing piezoelectric cantilever sensor.
  49. Mutharasan, Rajakkannu; deLesdernier, David L.; Campbell, Gossett Augustus; Maraldo, David R.; Nagy, Peter A., Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air.
  50. Lajnef, Nizar; Chakrabartty, Shantanu; Burgueno, Rigoberto; Wassim, Borchani, Self-powered sensing system for the monitoring of quasi-static structural response.
  51. Alacqua, Stefano; Butera, Francesco; Pairetti, Bartolomeo, Shape memory actuator with bi-stable operation.
  52. Knebel, Albert M.; Salemi, Mike R., Shape memory alloy fuel injector.
  53. Johnson, A David, Shape memory alloy thin film, method of fabrication, and articles of manufacture.
  54. Cripe, David Wayne; McCoy, Bryan S.; Legge, Ryan J.; Woychik, Gerard A.; Campbell, Robert P., Shape-memory alloy actuator.
  55. Johnson, A. David; Bokaie, Michael; Martynov, Valery, Single crystal shape memory alloy devices and methods.
  56. Johnson, A. David; Bokaie, Michael; Martynov, Valery, Single crystal shape memory alloy devices and methods.
  57. Johnson, Alfred David; Gilbertson, Roger Graham; Martynov, Valery, Sprinkler valve with active actuation.
  58. Woychik, Gerard A.; Legge, Ryan J.; McCoy, Bryan S., Stimulus for achieving high performance when switching SMA devices.
  59. Xu,Baomin; Fork,David Kirtland; Young,Michael Yu Tak; Chow,Eugene Michael, Stressed material and shape memory material MEMS devices and methods for manufacturing.
  60. Kautz, Stefan; Marondel, Matthias, Switching device with an actuator element consisting of a shape memory alloy.
  61. Johnson, A. David, Tear-resistant thin film methods of fabrication.
  62. Eder Philip B. ; Quinn William F. ; Roberts Mark A. ; Welch Richard E. ; Clow David W., Temperature responsive switch with shape memory actuator.
  63. Kia Silverbrook AU, Thermal actuator.
  64. Silverbrook,Kia, Thermal actuators.
  65. Kia Silverbrook AU, Thermal bend actuator.
  66. Silverbrook, Kia, Thermal bend actuator.
  67. Silverbrook,Kia, Thermal bend actuator with corrugate profile.
  68. Quinn William F. ; Motley Wayne M. ; Kalapodis James B., Thermal switch.
  69. Quinn William F. ; Motley Wayne M. ; Kalapodis James B., Thermal switch.
  70. Kalapodis James B. ; Quinn William F., Thermal switch assembly.
  71. Hill, Lisa R.; Carman, Gregory P., Thin film shape memory alloy reflector.
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