초록 ▼

A method for controlling an apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an ongoing ashing process. In

A method for controlling an apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an ongoing ashing process. In accordance with the procedure, steam evaporated in a closed steam supply tank is introduced into a vacuum chamber via a pressure reducing mass-flow controller. The temperature of the water in the supply tank, the temperature of the steam in the pipes leading from the supply tank to the mass-flow controller, the temperature of the steam in the pipes from the mass-flow controller to the vacuum chamber and the temperature of the steam in the mass-flow controller itself are all independently controlled such that the temperature in the water tank is equal to or less than the temperature in the pipes leading to and from the mass-flow controller and the temperature in the pipes is less than or equal to the temperature in the mass-flow controller.

대표청구항 ▼

[ We claim:] [1.] A method for operating an apparatus for supplying steam to a vacuum chamber, said apparatus comprising a steam generation vessel and a mass-flow controller, said method comprising:supplying heat to said vessel to evaporate water therein and thereby generate steam for introduction i

[ We claim:] [1.] A method for operating an apparatus for supplying steam to a vacuum chamber, said apparatus comprising a steam generation vessel and a mass-flow controller, said method comprising:supplying heat to said vessel to evaporate water therein and thereby generate steam for introduction into said chamber;causing the steam generated in the vessel to pass through said mass-flow controller prior to its introduction into the chamber;regulating the amount of heat supplied to water in said vessel to thereby maintain a water temperature in said vessel establishing a vapor pressure capable of providing a predetermined maximum steam flow to said chamber; andcontrolling the operation of the mass-flow controller such that the steam flow into said chamber is maintained at a level which is at least 50% of said predetermined maximum steam flow to thereby minimize condensation of water in said controller and maximize stability of said steam flow.