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A process for making a chip sized semiconductor device, in which a semiconductor chip is prepared so as to have electrodes on one of surfaces thereof and an electrically insulating passivation film formed on the one surface except for areas where the electrodes exist. An insulation sheet is prepared

A process for making a chip sized semiconductor device, in which a semiconductor chip is prepared so as to have electrodes on one of surfaces thereof and an electrically insulating passivation film formed on the one surface except for areas where the electrodes exist. An insulation sheet is prepared so as to have first and second surfaces and a metallic film coated on the first surface. The second surface of the insulation sheet is adhered on the one surface of the semiconductor chip. First via-holes are provided in the metallic film at positions corresponding to the electrodes. Second via-holes are provided in the insulation sheet at positions corresponding to the first via-holes so that the electrodes are exposed. The metallic film is electrically connected to the electrodes of the semiconductor chip through the first and second via-holes. A circuit pattern is formed from the metallic film so that the circuit pattern has external terminal connecting portions. An insulation film is adhered on the insulation sheet so that the external terminal connecting portions are exposed. External connecting terminals are electrically connected to the external terminal connecting portions of the circuit pattern.

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[ We claim:] [1.] A chip sized semiconductor device comprising:a semiconductor chip having electrodes on a first surface thereof and an electrically insulating passivation film formed on said first surface excluding areas where said electrodes exist;a first insulation film made of a photosensitive r

[ We claim:] [1.] A chip sized semiconductor device comprising:a semiconductor chip having electrodes on a first surface thereof and an electrically insulating passivation film formed on said first surface excluding areas where said electrodes exist;a first insulation film made of a photosensitive resin and formed on said passivation film so that said electrodes are exposed;a circuit pattern formed on said first insulation film so that said circuit pattern has first portions electrically connected to said electrodes of the semiconductor chip, and second portions;a second insulation film formed on said circuit pattern so that said second portions of the circuit pattern are exposed;external connecting terminals electrically connected to said second portions of the circuit pattern; anda metallic protective film formed between first surface of the semiconductor chip and said first insulation film to stop an ultraviolet beam from penetrating therethrough toward said semiconductor chip.